Development of a eco thermal expansion manufacturing method for glass dome structure

2022 Fiscal Year Final Research Report

• Project/Area Number: 20K15151
• Research Category: Grant-in-Aid for Early-Career Scientists
• Allocation Type: Multi-year Fund
• Review Section: Basic Section 28050:Nano/micro-systems-related
• Research Institution: Nara Institute of Science and Technology
• Principal Investigator: Yalikun Yaxiaer 奈良先端科学技術大学院大学, 先端科学技術研究科, 准教授 (30735064)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: 微細加工 / 石英ガラス / ドーム構造 / 三次元加工 / 立体加工 / 熱膨張加工

Outline of Final Research Achievements

In this research, it was demonstrated that the glass micro-dome structure could be formed with the precise designed dimensions by only simple 4 steps: (1) forming shallow micro- cavities on the glass substrate, (2) cover and bonding the micro-cavities with thin glasses (3) by employing the principle of blowing glass, the glass micro-dome structure can be formed due to the expansion of the air in the closed micro-cavities (4) slowly cooling it.
In addition, we investigated the shape change of the glass dome structure depending on the processing conditions, and clarified the relationship between each parameter and the shape changes. The effect of the processing order on the formation of the glass dome structure was clarified too. We also clarified the time distribution of the multi-steps heating temperature and slow cooling process in case of using different glass material. In addition, we explored the application of thin plate glass and its dome structures.

Free Research Field

機械工学

Academic Significance and Societal Importance of the Research Achievements

当手法は、次世代産業で重要となる立体型半導体デバイス、分析光学素子、マイクロ化学反応や医療向け細胞分離分析検査デバイス、基板組み込み型カメラの高精度マイクロレンズやマイクロジャイロなどに用いるマイクロガラスドームを低環境負荷で簡便に大量生産する革新的な製造技術を提供するもので、他にさきがけて我が国のリーディング産業の核に育成する必要がある重要技術である。