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2011 Fiscal Year Final Research Report

Creation of single-crystal graphene substrate through surface structure control on a wafer scale

Research Project

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Project/Area Number 21246006
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionNTT Basic Research Laboratories

Principal Investigator

HIBINO Hiroki  日本電信電話株式会社NTT物性科学基礎研究所, 機能物質科学研究部, 主幹研究員 (60393740)

Co-Investigator(Kenkyū-buntansha) NAGASE Masao  徳島大学, 大学院・ソシオテクノサイエンス研究部, 教授 (20393762)
KAGESHIMA Hiroyuki  日本電信電話株式会社NTT物性科学基礎研究所, 量子電子物性研究部, 主任研究員 (70374072)
KANISAWA Kiyoshi  日本電信電話株式会社NTT物性科学基礎研究所, 量子電子物性研究部, 主任研究員 (70393767)
YAMAGUCHI Toru  日本電信電話株式会社NTT物性科学基礎研究所, 量子電子物性研究部, 主任研究員 (30393763)
TANAKA Satoru  九州大学, 工学(系)研究科(研究院), 教授 (80281640)
MIZUNO Seigi  九州大学, 総合理工学研究科(研究院), 教授 (60229705)
Project Period (FY) 2009 – 2011
Keywordsナノ構造物性
Research Abstract

When SiC is thermally decomposed by annealing, graphene epitaxially grows on the substrate. Based on this phenomenon, we produced highly-uniform monolayer, bilayer, and trilayer graphene by controlling the annealing environment and temperature. We fabricated top-gated Hall bar devices using the monolayer and bilayer graphene, and measured their characteristics. We clarified that monolayer and bilayer graphene exhibit distinctly different electronic transport properties, reflecting their electronic structures.

  • Research Products

    (51 results)

All 2012 2011 2010 2009 Other

All Journal Article (18 results) (of which Peer Reviewed: 18 results) Presentation (20 results) Book (3 results) Remarks (5 results) Patent(Industrial Property Rights) (5 results)

  • [Journal Article] Growth and electronic transport properties of epitaxial graphene on SiC(0001)2012

    • Author(s)
      H. Hibino, S. Tanabe, S. Mizuno, and H. Kageshima
    • Journal Title

      J. Phys. D : Appl. Phys.

      Volume: 45 Pages: 154008-1-12

    • DOI

      DOI:10.1088/0022-3727/45/15/154008

    • Peer Reviewed
  • [Journal Article] Electrical characterization of bilayer graphene formed by hydrogen intercalation of monolayer graphene on SiC(0001)2012

    • Author(s)
      S. Tanabe, Y. Sekine, H. Kageshima, and H. Hibino
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51 Pages: 02BN02-1-3

    • DOI

      DOI:10.1143/JJAP.51.02BN02

    • Peer Reviewed
  • [Journal Article] Molecular beam epitaxial growth of graphene and ridge-structure networks of graphene2011

    • Author(s)
      F. Maeda and H. Hibino
    • Journal Title

      J. Phys. D : Appl. Phys.

      Volume: 44 Pages: 435305-1-9

    • DOI

      DOI:10.1088/0022-3727/44/43/435305

    • Peer Reviewed
  • [Journal Article] Atomic structure of epitaxial graphene islands on SiC(0001) surfaces and their magnetoelectric effects2011

    • Author(s)
      H. Kageshima, H. Hibino, M. Nagase, Y. Sekine and H. Yamaguchi
    • Journal Title

      AIP Conf. Proc.

      Volume: 1399 Pages: 755-756

    • DOI

      DOI:10.1063/1.3666596

    • Peer Reviewed
  • [Journal Article] Carrier transport mechanism in graphene on SiC(0001)2011

    • Author(s)
      S. Tanabe, Y. Sekine, H. Kageshima, M. Nagase, and H. Hibino
    • Journal Title

      Phys. Rev. B

      Volume: 94 Pages: 115458-1-5

    • DOI

      DOI:10.1103/PhysRevB.84.115458

    • Peer Reviewed
  • [Journal Article] Theoretical study on epitaxial graphene growth by Si sublimation from SiC(0001) surface2011

    • Author(s)
      H. Kageshima, H. Hibino, H. Yamaguchi, and M. Nagase
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 50 Pages: 95601-1-6

    • DOI

      DOI:10.1143/JJAP.50.095601

    • Peer Reviewed
  • [Journal Article] Study of graphene growth by gas-source molecular beam epitaxy using cracked ethanol : influence of gas flow rate on graphitic material deposition2011

    • Author(s)
      F. Maeda and H. Hibino
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 50 Pages: 06GE12-1-4

    • DOI

      DOI:10.1143/JJAP.50.06GE12

    • Peer Reviewed
  • [Journal Article] Theoretical study on magnetoelectric and thermoelectric properties for graphene devices2011

    • Author(s)
      H. Kageshima, H. Hibino, M. Nagase, Y. Sekine, and H. Yamaguchi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 50 Pages: 070115-1-5

    • DOI

      DOI:10.1143/JJAP.50.070115

    • Peer Reviewed
  • [Journal Article] Observation of bandgap in epitaxial bilayer graphene field effect transistor2011

    • Author(s)
      S. Tanabe, Y. Sekine, H. Kageshima, M. Nagase, and H. Hibino
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 50 Pages: 04DN04-1-4

    • DOI

      DOI:10.1143/JJAP.50.04DN04

    • Peer Reviewed
  • [Journal Article] Electronic transport properties of top-gated monolayer and bilayer graphene devices on SiC2011

    • Author(s)
      S. Tanabe, Y. Sekine, H. Kageshima, M. Nagase, and H. Hibino
    • Journal Title

      MRS Proc.

      Volume: 1283

    • URL

      http://dx.doi.org/10.1557/opl.2011.675

    • Peer Reviewed
  • [Journal Article] Evaluation of few-layer graphene grown by gas-source molecular beam epitaxy using cracked ethanol2011

    • Author(s)
      F. Maeda and H. Hibino, I. Hirosawa, and Y. Watanabe
    • Journal Title

      e-J. Surf. Sci. Nanotech.

      Volume: 9 Pages: 58-62

    • DOI

      DOI:10.1380/ejssnt.2011.58

    • Peer Reviewed
  • [Journal Article] Epitaxial graphene growth studied by low-energy electron microscopy and first-principles2011

    • Author(s)
      H. Kageshima, H. Hibino, and M. Nagase
    • Journal Title

      Mater. Sci. Forum

      Volume: 645-648 Pages: 597-602

    • DOI

      DOI:10.4028/www.scientific.net/MSF.645-648.597

    • Peer Reviewed
  • [Journal Article] Anisotropic layer-by-layer growth of graphene on vicinal SiC(0001) surfaces2011

    • Author(s)
      S. Tanaka, K. Morita, and H. Hibino
    • Journal Title

      Phys. Rev. B

      Volume: 81 Pages: 041406(R)-1-4

    • DOI

      DOI:10.1103/PhysRevB.81.041406

    • Peer Reviewed
  • [Journal Article] Atomic structure and physical properties of epitaxial graphene islands embedded in SiC(0001) surfaces2010

    • Author(s)
      H. Kageshima, H. Hibino, M. Nagase, Y. Sekine, and H. Yamaguchi
    • Journal Title

      Appl. Phys. Exp.

      Volume: 3 Pages: 115103-1-3

    • DOI

      DOI:10.1143/APEX.3.115103

    • Peer Reviewed
  • [Journal Article] Epitaxial few-layer graphene : toward single crystal growth2010

    • Author(s)
      H. Hibino, H. Kageshima, and M. Nagase
    • Journal Title

      J. Phys. D : Appl. Phys.

      Volume: 43 Pages: 374005-1-14

    • DOI

      DOI:1088/0022-3727/43/37/374005

    • Peer Reviewed
  • [Journal Article] Half-integer quantum Hall effect in gate-controlled epitaxial graphene devices2010

    • Author(s)
      S. Tanabe, Y. Sekine, H. Kageshima, M. Nagase, and H. Hibino
    • Journal Title

      Appl. Phys. Exp.

      Volume: 3 Pages: 075102-1-3

    • DOI

      DOI:10.1143/APEX.3.075102

    • Peer Reviewed
  • [Journal Article] Contact conductance measurement of locally suspended graphene on SiC2010

    • Author(s)
      M. Nagase, H. Hibino, H. Kageshima, and H. Yamaguchi
    • Journal Title

      Appl. Phys. Exp.

      Volume: 3 Pages: 045101-1-3

    • DOI

      DOI:10.1143/APEX.3.045101

    • Peer Reviewed
  • [Journal Article] Local conductance measurements of double-layer graphene on SiC substrate2009

    • Author(s)
      M. Nagase, H. Hibino, H. Kageshima, and H. Yamaguchi
    • Journal Title

      Nanotechnology

      Volume: 20 Pages: 445704-1-6

    • DOI

      DOI:10.1088/0957-4484/20/44/445704

    • Peer Reviewed
  • [Presentation] Carrier transport in epitaxial graphene grown on SiC(0001)2011

    • Author(s)
      H. Hibino, S. Tanabe, and H. Kageshima
    • Organizer
      The Third International Symposium on the Surface and Technology of Epitaxial Graphene(STEG3)[invited]
    • Place of Presentation
      Saint Augustine, USA
    • Year and Date
      2011-10-25
  • [Presentation] SiC上グラフェンナノ構造の形成と電子物性2011

    • Author(s)
      田中悟
    • Organizer
      第72回応用物理学学術講演(招待講演)
    • Place of Presentation
      山形
    • Year and Date
      2011-08-29
  • [Presentation] エピタキシャルグラフェンの成長とLEEMによる評価2011

    • Author(s)
      日比野浩樹
    • Organizer
      第72回応用物理学学術講演(招待講演)
    • Place of Presentation
      山形
    • Year and Date
      2011-08-29
  • [Presentation] Growth and transport properties of monolayer and bilayer graphene on SiC2011

    • Author(s)
      H. Hibino, S. Tanabe, and H. Kageshima
    • Organizer
      XX International Materials Research Congress(IMRC-XX)[invited]
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2011-08-17
  • [Presentation] Growth, structure, and transport properties of epitaxial graphene on SiC2011

    • Author(s)
      H. Hibino, S. Tanabe, and H. Kageshima
    • Organizer
      8th International Symposium on Atomic Level Characterizations for New Materials and Devices' 11(ALC' 11)[invited]
    • Place of Presentation
      Seoul, South Korea
    • Year and Date
      2011-05-24
  • [Presentation] Growth and characterization of graphene on SiC. Graphene Workshop in Tsukuba[invited]2011

    • Author(s)
      H. Hibino, S. Tanabe, and H. Kageshima
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2011-01-17
  • [Presentation] Theoretical study on functions of graphene2010

    • Author(s)
      H. Kageshima, H. Hibino, M. Nagase, Y. Sekine, and H. Yamaguchi
    • Organizer
      International Symposium on Graphene Devices : Technology, Physics, and Modeling(ISGD 2010)[invited]
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2010-10-29
  • [Presentation] Electrical contact properties of few-layer epitaxial on SiC substrate2010

    • Author(s)
      M. Nagase, H. Hibino, H. Kageshima, and H. Yamaguchi
    • Organizer
      International Symposium on Graphene Devices : Technology, Physics, and Modeling(ISGD 2010)[invited]
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2010-10-28
  • [Presentation] Growth, structure, and transport properties of epitaxial graphene on SiC2010

    • Author(s)
      H. Hibino, S. Tanabe, H. Kageshima, and M. Nagase
    • Organizer
      International Symposium on Graphene Devices : Technology, Physics, and Modeling(ISGD 2010)[invited]
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2010-10-27
  • [Presentation] Surface electron microscopy of epitaxial graphene2010

    • Author(s)
      H. Hibino
    • Organizer
      2nd International Symposium on the Surface and Technology of Epitaxial Graphene(STEG2)[invited]
    • Place of Presentation
      Amelia Island, USA
    • Year and Date
      2010-09-14
  • [Presentation] Dynamics of Si surface morphology/Epitaxial graphene growth on SiC surfaces2010

    • Author(s)
      H. Hibino
    • Organizer
      The 14th International Summer School on Crystal Growth(ISSCG-14)[invited]
    • Place of Presentation
      Dalian, China
    • Year and Date
      2010-08-06
  • [Presentation] In-situ surface electron microscopy observations of growth and etching of epitaxial few-layer graphene on SiC2010

    • Author(s)
      H. Hibino, H. Kageshima, and M. Nagase
    • Organizer
      International Workshop on in situ characterization of near surface processes 2010[invited]
    • Place of Presentation
      Eisenerz, Austria
    • Year and Date
      2010-05-31
  • [Presentation] SiC上エピタキシャルグラフェンの原子構造と電子状態2010

    • Author(s)
      影島博之
    • Organizer
      日本物理学会2010年春第65回年次大会(招待講演)
    • Place of Presentation
      岡山
    • Year and Date
      2010-03-22
  • [Presentation] SiC上に成長したエピタキシャルグラフェンの構造と電子特性の表面電子顕微鏡による解析2010

    • Author(s)
      日比野浩樹
    • Organizer
      日本物理学会2010年春第65回年次大会(招待講演)
    • Place of Presentation
      岡山
    • Year and Date
      2010-03-21
  • [Presentation] LEEM/PEEMによるグラフェンの構造と電子物性2010

    • Author(s)
      日比野浩樹
    • Organizer
      2010年春季・第57回応用物理学関係連合講演会(招待講演)
    • Place of Presentation
      平塚
    • Year and Date
      2010-03-17
  • [Presentation] Microscopic characterization of few-layer graphene on SiC using an integrated nanogap probe2009

    • Author(s)
      M. Nagase, H. Hibino, H. Kageshima, and H. Yamaguchi
    • Organizer
      17th International Colloquium on Scanning Probe Microscopy(ICSPM17)[invited]
    • Place of Presentation
      Izu, Japan
    • Year and Date
      2009-12-12
  • [Presentation] Microscopic evaluations of structure and electronic properties of epitaxial graphene2009

    • Author(s)
      H. Hibino, H. Kageshima, and M. Nagase
    • Organizer
      7th International Symposium on Atomic Level Characterizations for New Materials and Devices(ALC' 09)[invited]
    • Place of Presentation
      Hawaii, USA
    • Year and Date
      2009-12-09
  • [Presentation] Microscopic characterization of few-layer graphene on SiC2009

    • Author(s)
      M. Nagase, H. Hibino, H. Kageshima, and H. Yamaguchi
    • Organizer
      International Symposium on Advanced Nanodevices and Nanotechnology(ISANN2009)[invited]
    • Place of Presentation
      Hawaii, USA
    • Year and Date
      2009-12-03
  • [Presentation] Structure and electronic properties of epitaxial graphene grown on SiC studied by surface electron microscopy2009

    • Author(s)
      H. Hibino, H. Kageshima, and M. Nagase
    • Organizer
      22nd International Microproesses and Nanotechnology Conference(MNC2009)[invited]
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2009-11-18
  • [Presentation] Study of Epitaxial Graphene Growth using LEEM and First-principles2009

    • Author(s)
      H. Kageshima, H. Hibino, and M. Nagase
    • Organizer
      13th International Conference on Silicon Carbide and Related Materials(ICSCRM2009)[invited]
    • Place of Presentation
      Nurnberg, Germany
    • Year and Date
      2009-10-11
  • [Book] グラフェンが拓く材料の新領域-物性・作製法から実用化まで-2012

    • Author(s)
      日比野浩樹、永瀬雅夫, 他
    • Total Pages
      90-98
    • Publisher
      エヌ・ティー・エス
  • [Book] ナノカーボンの応用と実用化-フラーレン・ナノチューブ・グラフェンを中心に-2011

    • Author(s)
      永瀬雅夫, 他
    • Total Pages
      174-184
    • Publisher
      シーエムシー出版
  • [Book] グラフェン・イノベーション電子デバイスを変えるナノカーボン材料革命2011

    • Author(s)
      日経エレクトロニクス編
    • Total Pages
      146-153
    • Publisher
      日経BP社
  • [Remarks]

    • URL

      http://www.brl.ntt.co.jp/people/hibino/

  • [Remarks] (2)日経産業新聞、「薄くて透明炭素材料に新顔壁に張るパソコンなど期待」、2010年7月18日

  • [Remarks] (3)日本経済産業新聞、「富士通やNTT、新型炭素材技術、丸められる端末・携帯スパコンに道」、2010年7月17日

  • [Remarks] (4)日刊工業新聞、[グラフェントランジスタ次世代素子実用化競う」、2009年12月7日

  • [Remarks] (5)日本経済新聞、「高機能の新炭素材料「グラフェン」」、2009年9月7日

  • [Patent(Industrial Property Rights)] 電界効果トランジスタ、製造用基板、およびその製造方法2012

    • Inventor(s)
      前田文彦、日比野浩樹
    • Industrial Property Rights Holder
      日本電信電話株式会社
    • Industrial Property Number
      特許、特願2012-079785
    • Filing Date
      2012-03-30
  • [Patent(Industrial Property Rights)] グラファイト薄膜の製造方法2012

    • Inventor(s)
      前田文彦、日比野浩樹
    • Industrial Property Rights Holder
      日本電信電話株式会社
    • Industrial Property Number
      特許、特願2012-025925
    • Filing Date
      2012-02-09
  • [Patent(Industrial Property Rights)] グラフェンpn接合の製造方法2012

    • Inventor(s)
      田邉真一、日比野浩樹
    • Industrial Property Rights Holder
      日本電信電話株式会社
    • Industrial Property Number
      特許、特願2012-019839
    • Filing Date
      2012-02-01
  • [Patent(Industrial Property Rights)] 電界効果トランジスタ、製造用基板、およびその製造方法2011

    • Inventor(s)
      前田文彦、日比野浩樹
    • Industrial Property Rights Holder
      日本電信電話株式会社
    • Industrial Property Number
      特許、特願2011-085106
    • Filing Date
      2011-04-07
  • [Patent(Industrial Property Rights)] グラフェントランジスタおよびその製造方法2010

    • Inventor(s)
      田邉真一、日比野浩樹、永瀬雅夫、関根佳明
    • Industrial Property Rights Holder
      日本電信電話株式会社
    • Industrial Property Number
      特許、特願2010-037004
    • Filing Date
      2010-02-23

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Published: 2013-07-31  

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