2011 Fiscal Year Final Research Report
Quantitative analysis of SEM image contrasts with consideration of diffraction phenomenon and challenges of nano-characterization
| Project/Area Number |
21651054
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Single-year Grants |
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| Research Field |
Nanomaterials/Nanobioscience
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| Research Institution | Kyushu University |
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Principal Investigator |
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| Project Period (FY) |
2009 – 2011
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| Keywords | 走査電子顕微鏡 / 像コントラスト / 電子回折 / 後方散乱電子 / チャネリング / 微細構造解析転位 / バーガースベクトル |
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| Research Abstract |
In this research project, the formation mechanism of electron channeling(EC) contrasts in SEM-BSE(back-scatter electron) images was investigated by examining the influences of EC contrasts to the tilting of specimen and the position of an electron detector. The experimental results revealed that the EC contrasts are explained by the relative relationship between the intensity distribution of primary electron waves and the positions of atomic columns in crystalline specimen. A new procedure for characterization of dislocations was proposed.
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