2023 Fiscal Year Final Research Report
Development of a stylus with a Fabry-Perot interferometer built into an optical fiber tip for microstructure measurement
| Project/Area Number |
21K03808
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Review Section |
Basic Section 18020:Manufacturing and production engineering-related
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| Research Institution | The University of Kitakyushu |
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Principal Investigator |
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| Project Period (FY) |
2021-04-01 – 2024-03-31
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| Keywords | 微細形状測定 / 光ファイバ / スタイラス / ファブリ・ペロー干渉 |
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| Outline of Final Research Achievements |
In this study, the stylus with a Fabry-Perot interferometer embedded in the optical fiber stylus tip was used to develop the measurement system capable of nondestructively measuring the microstructures. The stylus design parameters were optimized, and stylus fabrication was investigated. Experiments were conducted to measure the resolution of the stylus, and it was confirmed that the measurement resolution was approximately 30 nm.
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| Free Research Field |
微細形状測定，加工モニタリング，異常検知
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| Academic Significance and Societal Importance of the Research Achievements |
現状で寄せられている高アスペクト比（穴の場合、穴深さ/穴径）での穴・溝の形状や側壁粗さ測定のニーズは，半導体TSV，各種ノズル，マイクロニードル用の微細金型やマイクロリアクターの流路や側壁の計測など半導体・自動車・微細金型・バイオ・医療分野まで広きにわたる．本技術は，従来の三次元計測方法では対応できない測定を可能にするため，社会におけるマイクロシステムテクノロジーの応用領域の拡大に寄与できるものと考える．
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