Development of coating film control technology for high-viscosity particle dispersion materials by controlling the shear force of a planetary spin coater

2022 Fiscal Year Final Research Report

• Project/Area Number: 21K20417
• Research Category: Grant-in-Aid for Research Activity Start-up
• Allocation Type: Multi-year Fund
• Review Section: 0301:Mechanics of materials, production engineering, design engineering, fluid engineering, thermal engineering, mechanical dynamics, robotics, aerospace engineering, marine and maritime engineering, and related fields
• Research Institution: Oita National College of Technology
• Principal Investigator: TOKUMARU KAZUKI 大分工業高等専門学校, 機械工学科, 助教 (80909523)
• Project Period (FY): 2021-08-30 – 2023-03-31
• Keywords: スピンコート / セラミックス / 薄膜 / 高粘度流体 / 粒子配向

Outline of Final Research Achievements

The purpose of this research is to establish thin film formation and particle control technology for new high-viscosity slurry materials using a planetary spin coater.
In the first year, through experiments using alumina slurry, we succeeded in developing a planetary spin coater that can reduce surface waviness to 4% compared to conventional spin coaters.
In the final year, we worked on the development of a large-area inorganic EL with reduced luminance unevenness using the planetary spin coater that we had developed. As a result of our research, we found that the standard deviation of brightness on the light-emitting surface was about half that of the conventional spin-coating method, making it possible to achieve the goal of suppressing brightness unevenness.

Free Research Field

工学

Academic Significance and Societal Importance of the Research Achievements

遊星式スピンコーターの開発とアルミナスラリーを用いた実験，チタン酸バリウム粉末を用いた分散型無機ELの開発の結果より，遊星式スピンコーターがセラミックススラリーのような高粘度粒子分散材料の製膜に対して非常に効果的であり，得られた薄膜は従来の方法と比較し格段に高い性能を得ることが可能であることが確認できた．本手法は様々なセラミックス薄膜の製膜に応用できるだけでなく，高分子分散溶液や高粘度溶液の均一成膜にも応用できると考えられる．これにより，IoT用小型センサ，燃料電池，全固体電池など研究当初に掲げていた目標以外にも，太陽電池やMEMS分野など様々なニーズに対応できる可能性を秘めている．