2012 Fiscal Year Final Research Report
Development of Sub-Nano Position Control for Slight Movement Stage Driven by Pneumatic Bellows Using Low Flow Noise Type Valve
| Project/Area Number |
22560251
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Tokyo Denki University |
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Principal Investigator |
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| Co-Investigator(Renkei-kenkyūsha) |
KAGAWA Toshiharu 東京工業大学, 精密工学研究所, 教授 (50108221)
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| Project Period (FY) |
2010 – 2012
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| Keywords | 精密機械システム / 機械要素 / 流体工学 / 空気圧 / 超精密位置決め |
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| Research Abstract |
The study on ultra-precise positioning moves focus from nano positioning to sub-nano positioning. In this study, we fabricated the slight movement stage driven by the pneumatic bellows for ultra precise positioning, covering the shortcomings of piezoelectric element. To increase positioning accuracy of this stage, the low flow noise type servo vale, which reduce the small pressure disturbance by using clearance flow, and the control method driving this stage were developed. Finally, we realized ultimate level of sub-nano positioning.
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