2011 Fiscal Year Final Research Report
Hybrid actuator-driven ultraprecision 2-DOF rotary table system
| Project/Area Number |
22686016
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
YOSHIOKA Hayato 東京工業大学, 精密工学研究所, 准教授 (90361758)
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| Project Period (FY) |
2010 – 2011
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| Keywords | ハイブリッド駆動 / 空気圧アクチュエータ / 電磁アクチュエータ / 回転テーブル / 超精密位置決め / 空気静圧軸受 |
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| Research Abstract |
In order to realize an ultraprecision 2-DOF rotary table system, key technologies for the table system has been proposed and evaluated in this study. A hybrid driving mechanism which can achieve high torque, quick response, and low heat generation, a torque ripple-free electric motor for precise rotation, and a high stiff and high damping hydrostatic bearing system were newly developed, and their basic characteristics were clarified.
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