2011 Fiscal Year Final Research Report
Mechanics of deformation and fracture in metal/ceramic nano-laminated thin films
| Project/Area Number |
22860053
|
|---|
| Research Category |
Grant-in-Aid for Research Activity Start-up
|
| Allocation Type | Single-year Grants |
|---|
| Research Field |
Materials/Mechanics of materials
|
|---|
| Research Institution | University of Hyogo |
|---|
Principal Investigator |
|
|---|
| Project Period (FY) |
2010 – 2011
|
| Keywords | 積層構造 / 表面構造 / 薄膜 / 機械的特性 / 自立化 |
|---|
| Research Abstract |
A fabrication method of free-standing metal/ceramic nano-laminate thin film and its tensile testing technique was developed, and the deformation and fracture behavior of free-standing metal/ceramic nano-laminate thin film was investigated. The fracture toughness of Cu/Al_2O_3 laminated film with 5 layers (thickness: 500nm, Cu: 120nm, Al_2O_3: 60nm) was lower than that of Cu film (thickness: 500nm). However, Cu layer with a thickness of only 120nm in laminated film still caused plastic deformation. Moreover, we proposed a novel technique for the fabrication of laminated film with surface nanostructure.
|
Research Products
(11 results)
