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2013 Fiscal Year Final Research Report

Enhancement of piezoelectric properties by introducing heterogeneous structure

Research Project

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Project/Area Number 23560804
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionTokyo University of Science

Principal Investigator

OKAMURA Soichiro  東京理科大学, 理学部, 教授 (60224060)

Co-Investigator(Kenkyū-buntansha) IIJIMA Takashi  独立行政法人産業技術総合研究所, 研究員 (90356402)
Project Period (FY) 2011 – 2013
Keywords圧電体 / 薄膜 / 空孔率 / PZT / 歪み / ナノ粒子
Research Abstract

Pb(Zr,Ti)O3 (PZT) thin films with some amounts of pores or Pt nanoparticles were prepared by chemical solution deposition and their piezoelectric properties were evaluated by atomic force microscopy (AFM). Film thickness was approximately 300 nm. Their microstructures were also investigated by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The amount of pores was adjusted by changing the speed of spin-coating. Finally, the densities of the PZT films were estimated to be 0.92-0.98. On the other hand, the amount of Pt nanoparticles was adjusted by changing the mixing ratios of precursor solutions to 0-9%. As a result, an effective piezoelectric constant d33,AFM estimated by the AFM was enhanced with increasing the amounts of pores or Pt nanoparticles. These results suggest that unstable lattices which were easily distorted with applying an electric field increased by introducing the heterogeneous structures.

  • Research Products

    (4 results)

All 2013 2012 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (3 results)

  • [Journal Article] Crystal Structure Change with Applied Electric Field for (100)/(001)-oriented Polycrystalline Lead Zirconate Titanate Films2013

    • Author(s)
      A. Wada, Y. Ehara, S. Yasui, T. Oikawa, M. Nakajima, M. Wada, P. S. S. R. Krishnan, S. Okamura, K. Nishida, T. Yamamoto, T. Kobayashi, H. Morioka and H. Funakubo
    • Journal Title

      MRS Proceedings

      Volume: 1507 Pages: 6

    • DOI

      10.1557/opl.2013.161.

    • Peer Reviewed
  • [Presentation] 図8白金ナノ粒子の配合率2%のPZT薄膜相蘇亨、舟窪浩、岡村総一郎、山本孝、のヒステリシス特性および圧電特性飯島高志「Pb(Zr,Ti)O_3膜における圧電定数d_<31>, d_<33>の同時測定」2013

    • Author(s)
      松岡将史、西出正道、島宏美、西田謙
    • Organizer
      第30回強誘電体応用会議
    • Place of Presentation
      京都
    • Year and Date
      20130500
  • [Presentation] Comparison of Piezoelectric Properties of Pb(Zr_<0.4>, Ti_<0.6>)O_3 Thin Films with Different Microstructures2012

    • Author(s)
      S. Okamura, R. Yanase, Y. Fujiuchi, T. Nakajima and T. Iijima
    • Organizer
      9th International Work shop on Piezoelectric Materials and Applications in Actuators
    • Place of Presentation
      Hirosaki
    • Year and Date
      20120400
  • [Presentation] 「不均一構造導入による圧電体膜の特性改善」

    • Author(s)
      柳瀬亮、中嶋宇史、飯島高志、岡村総一郎
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      20110800-20110900

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Published: 2015-07-16  

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