2012 Fiscal Year Final Research Report
Development of a single-shot soft-X-ray reflection type microscope
| Project/Area Number |
23651103
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Nanomaterials/Nanobioscience
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| Research Institution | The University of Tokyo |
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Principal Investigator |
SUEMOTO Tohru 東京大学, 物性研究所, 教授 (50134052)
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| Co-Investigator(Kenkyū-buntansha) |
HASEGAWA Noboru 独立行政法人日本原子力研究開発機構, 研究員 (50360409)
BABA Motoyoshi 東京大学, 物性研究所, 助教 (60159077)
MINAMI Yasuo 横浜国立大学, 工学(系)研究科(研究院), 研究教員 (60578368)
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| Co-Investigator(Renkei-kenkyūsha) |
NISHIKINO Masaharu 独立行政法人日本原子力研究開発機構, 研究員 (70370450)
TOMITA Takuro 徳島大学, 大学院・ソシオテクノサイエンス研究部, 助教 (90359547)
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| Project Period (FY) |
2011 – 2012
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| Keywords | ナノ計測 / 軟 X 線レーザー / 顕微技術 / 時間分解 |
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| Research Abstract |
A grazing angle incident reflection type soft x-ray microscope, using a Fresnel zoneplate as an imaging element and a soft x-ray laser with a wavelength of 13.9 nm and a pulse width of 7 ps as a light source was developed. Groove structures made on a Pt film were clearly captured at a single shot exposure. The spatial resolution near the center of the field was 200 nm and 1000 nm in vertical and horizontal directions, respectively. The degradation of the resolution within 100 μm square was tolerable. This microscope was proven to have a performance sufficient for scientific use.
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