2014 Fiscal Year Final Research Report
Coaxial multi-modal imaging system using optical MEMS
| Project/Area Number |
23686039
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | The University of Tokyo |
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Principal Investigator |
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| Project Period (FY) |
2011-04-01 – 2015-03-31
|
| Keywords | 知能機械 / マイクロ・ナノデバイス / 同軸光学系 / シリコン三次元加工 |
|---|
| Outline of Final Research Achievements |
A compact optical system to obtain thermal and color images simultaneously was proposed. The key is to use a silicon-glass hybrid lens, with which visible and far-infrared light can be focused. The focused light was split by a silicon plate. The thermal and color images were taken by a thermal and color imager, respectively. The focal plane was tuned by the position of the lens keeping the correspondence of thermal and color images.
Using MEMS silicon 3D fabrication process, a Fresnel lens was fabricated. Color and thermal images of a point light source were focused with the hybrid lens.
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| Free Research Field |
MEMS，ロボティクス
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