2013 Fiscal Year Final Research Report
Development of nano-droplet laser CVD process and application to functional ceramics coatings
| Project/Area Number |
23686096
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Inorganic materials/Physical properties
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| Research Institution | Japan Fine Ceramics Center |
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Principal Investigator |
KIMURA Teiichi 一般財団法人ファインセラミックスセンター, その他部局等, 研究員 (10333882)
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| Project Period (FY) |
2011-04-01 – 2014-03-31
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| Keywords | 化学気相析出 / 静電噴霧 / レーザー / コーティング / 高結晶性膜 / 高密度膜 / 低温成膜 / 大気圧CVD |
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| Research Abstract |
Laser-assisted chemical vapor deposition using electro-sprayed nano-droplets as source has been newly developed. In this process, decrease of a surface temperature caused by vaporization of solvents and source molecules can be suppressed by direct energy supply to the surface by laser, and homogenization reaction in gas phase vapor can also be suppressed by electrostatic repulsion of charged droplets. Consequently as a result, a source yield and a deposition rate was much improved comparing to a conventional CVD.
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