2012 Fiscal Year Final Research Report
Development of a depth profiling system with nano meter order resolution for organic mass spectrometry
| Project/Area Number |
23710126
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Nanomaterials/Nanobioscience
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| Research Institution | University of Yamanashi |
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Principal Investigator |
NINOMIYA Satoshi 山梨大学, 大学院・医学工学総合研究部, 特任助教 (10402976)
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| Research Collaborator |
HIRAOKA Kenzo 山梨大学, クリーンエネルギー研究センター, 特任教授 (80107218)
SAKAI Yuji 山梨大学, クリーンエネルギー研究センター, 研究員 (10594103)
CHEN Lee Chuin 山梨大学, 大学院医学工学総合研究部, 特任助教 (40585577)
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| Project Period (FY) |
2011 – 2012
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| Keywords | 質量分析 / 深さ方向分析 / 帯電液滴 / エッチング |
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| Research Abstract |
In this study, we developed a depth profiling system with nano meter order resolution by using a charged droplet beam. In order to achieve it, we modified the charged droplet beam source, installed the objective lens and beam scanning electrodes, and made a program for automatic measurement. Practical thin films such as polymers and oxides were depth profiled by using the charged droplet beam as a primary probe.
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Research Products
(10 results)
