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2012 Fiscal Year Final Research Report

Growth of free-standing two-dimensional atomic sheet by nano-plasma processing and its applications

Research Project

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Project/Area Number 23740405
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Plasma science
Research InstitutionTohoku University

Principal Investigator

KATO Toshiaki  東北大学, 大学院・工学研究科, 助教 (20502082)

Project Period (FY) 2011 – 2012
Keywords単層カーボンナノウォール / 垂直配向 / グラフェン / プラズマCVD / キャリア移動度
Research Abstract

Direct growth of graphene on an insulating substrate is realized by rapid-heating plasma CVD (RH-PCVD), which is originally developed by our group. For the first time, integration of graphene nanoribbons, quasi-one-dimensional structure of graphene, is also realized using Ni nanobar as catalysts for their growth. It is also revealed that the graphene nanoribbon devices show very high transistor performance (on/off ratio > 10,000).

  • Research Products

    (30 results)

All 2013 2012 2011 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (21 results) Book (3 results) Remarks (1 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Site- and Alignment-Controlled Growth of Graphene Nanoribbons from Nickel Nanobars2012

    • Author(s)
      T. Kato and R. Hatakeyama
    • Journal Title

      Nature Nanotechnology

      Volume: Vol. 7, No.10 Pages: 651-656

    • DOI

      DOI:10.1038/nnano.2012.145.

    • Peer Reviewed
  • [Journal Article] Direct Growth of Doping-Density-Controlled Hexagonal Graphene on SiO2 Substrate by Rapid-Heating Plasma CVD2012

    • Author(s)
      T. Kato and R. Hatakeyama
    • Journal Title

      ACS Nano

      Volume: Vol. 6, No. 10 Pages: 8508-8515

    • DOI

      DOI:10.1021/nn302290z.

    • Peer Reviewed
  • [Journal Article] Plasma-Synthesized Single-Walled Carbon Nanotubes and Their Applications2011

    • Author(s)
      R. Hatakeyama, T. Kaneko, T. Kato, and Y.F. Li
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: Vol. 44, No. 17 Pages: 174004-1-21

    • DOI

      DOI:10.1088/0022-3727/44/17/174004.

    • Peer Reviewed
  • [Presentation] Direct Growth and Integration of Graphene Nanoribbon2013

    • Author(s)
      T. Kato, R. Hatakeyama, and T. Kaneko
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県
    • Year and Date
      2013-03-28
  • [Presentation] Integration of High Performance Graphene Nanoribbon Field Effect Transistors2013

    • Author(s)
      T. Kato, R. Hatakeyama, and T. Kaneko
    • Organizer
      The 44th Fullerenes-Nanotubes-Graphene General Symposium
    • Place of Presentation
      Tokyo
    • Year and Date
      2013-03-13
  • [Presentation] Synthesis of Nanocarbon-Nanoparticle Conjugate Using Gas-Liquid Interfacial Non-Equilibrium Plasmas2013

    • Author(s)
      T. Kaneko, S. Takahashi, and T. Kato
    • Organizer
      1st International Workshop on Solution Plasma and Molecular Technologies
    • Place of Presentation
      Tokyo
    • Year and Date
      2013-03-06
  • [Presentation] Growth and Functionalization of Graphene and Graphene Nanoribbon by Advanced Plasma Technology2013

    • Author(s)
      T. Kato, R. Hatakeyama, and T. Kaneko
    • Organizer
      2013Workshop on Plasma & Nano Technology
    • Place of Presentation
      Chuncheon, Korea
    • Year and Date
      2013-01-29
  • [Presentation] Structure-Controlled Synthesis of Fullerenes and Carbon Nanotubes Using Plasma Technology2013

    • Author(s)
      R. Hatakeyama, T. Kato, and T. Kaneko
    • Organizer
      2013Workshop on Plasma & Nano Technology
    • Place of Presentation
      Chuncheon, Korea
    • Year and Date
      2013-01-28
  • [Presentation] Growth and Integration of Graphene Nanoribbon by Rapid-Heating Plasma Chemical Vapor Deposition2012

    • Author(s)
      T. Kato, T. Kaneko, and R. Hatakeyama
    • Organizer
      The Second International Conference on Small Science (ICSS 2012)
    • Place of Presentation
      Orlando, USA
    • Year and Date
      2012-12-17
  • [Presentation] Controllable Growth of Graphene Nanoribbon by Advanced Plasma Chemical Vapor Deposition2012

    • Author(s)
      T. Kato, T. Kaneko, and R. Hatakeyama
    • Organizer
      2nd International Conference on Nanotek and Expo
    • Place of Presentation
      Philadelphia, USA
    • Year and Date
      2012-12-03
  • [Presentation] Controllable Graphene Growth Using Novel Plasma Catalytic Deposition2012

    • Author(s)
      T. Kato and R. Hatakeyama
    • Organizer
      34th International Symposium on Dry Process (DPS2012)
    • Place of Presentation
      東京都
    • Year and Date
      2012-11-16
  • [Presentation] Advanced Plasma CVD for Structural-Controlled Growth of Single-Walled Carbon Nanotube and Graphene2012

    • Author(s)
      T. Kato and R. Hatakeyama
    • Organizer
      IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012)
    • Place of Presentation
      神奈川県
    • Year and Date
      2012-09-25
  • [Presentation] Direct Growth of Hexagonal Domain Graphene on SiO_2 Substrate2012

    • Author(s)
      T. Kato, R. Hatakeyama, and T. Kaneko
    • Organizer
      第43回フラーレン・ナノチューブ・グラフェン総合シンポジウム
    • Place of Presentation
      宮城県
    • Year and Date
      2012-09-07
  • [Presentation] Direct Growth of High-Quality Mono-Layer Graphene on Insulating Substrate by Advanced Plasma CVD2012

    • Author(s)
      T. Kato and R. Hatakeyama
    • Organizer
      IEEE Nano2012
    • Place of Presentation
      Birmingham, UK
    • Year and Date
      2012-08-20
  • [Presentation] UniformSingle-Layer Graphene Growth on SiO2Substrate by Diffusion Plasma CVD and itsGrowth Mechanism2012

    • Author(s)
      T. Kato and R. Hatakeyama
    • Organizer
      Thirteenth International Conference on the Science and Application of Nanotubes (NT12)
    • Place of Presentation
      Brisbane, Australia
    • Year and Date
      2012-06-27
  • [Presentation] 拡散プラズマプロセスによる単層カーボンナノチューブ及びグラフェンの構造制御合成と機能化2012

    • Author(s)
      加藤俊顕,畠山力三
    • Organizer
      第59回応用物理学関連連合講演会
    • Place of Presentation
      東京都
    • Year and Date
      2012-03-15
  • [Presentation] シリコン酸化膜上へのグラフェン直接合成と成長機構2012

    • Author(s)
      加藤俊顕,畠山力三
    • Organizer
      第59回応用物理学関連連合講演会
    • Place of Presentation
      東京都
    • Year and Date
      2012-03-15
  • [Presentation] Direct Fabrication of High-Quality Single-Layer Graphene on SiO2 Substrate by Diffusion Plasma CVD2012

    • Author(s)
      T. Kato and R. Hatakeyama
    • Organizer
      第42回フラーレン・ナノチューブ・グラフェン総合シンポジウム
    • Place of Presentation
      東京都
    • Year and Date
      2012-03-06
  • [Presentation] Growth and Functionalization of High-Quality Graphene by Diffusion Plasma Processing2011

    • Author(s)
      T. Kato and R. Hatakeyama
    • Organizer
      第21回日本MRS学術シンポジウム
    • Place of Presentation
      神奈川県
    • Year and Date
      2011-12-19
  • [Presentation] プラズマCVDによるグラフェン合成と構造制御2011

    • Author(s)
      加藤俊顕,畠山力三
    • Organizer
      Plasma Conference2011(プラズマ・核融合学会第28回年会/応用物理学会第29回プラズマプロセシング研究会/日本物理学会(領域2)2011年秋季大会)
    • Place of Presentation
      石川県
    • Year and Date
      2011-11-22
  • [Presentation] Effects of Room Temperature Plasma Treatment on the Selective Edge Functionalization of Graphene Nano Ribbon2011

    • Author(s)
      T. Kato, L. Jiao, X. Wang, H. Wang, X. Li, L. Zhang, R. Hatakeyama, and H. Dai
    • Organizer
      第41回フラーレン・ナノチューブ・グラフェン総合シンポジウム
    • Place of Presentation
      東京都
    • Year and Date
      2011-09-05
  • [Presentation] アンモニアプラズマによる室温グラフェンエッジ修飾及びドーピング2011

    • Author(s)
      T. Kato, L. Jiao, X. Wang, H. Wang, X. Li, R. Hatakeyama, and H. Dai
    • Organizer
      平成23年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形県
    • Year and Date
      2011-08-29
  • [Presentation] プラズマCVD中グラフェン合成におけるプラズマ効果2011

    • Author(s)
      加藤俊顕,森川昌登,畠山力三
    • Organizer
      平成23年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形県
    • Year and Date
      2011-08-29
  • [Presentation] Selective Edge Functionalization of Graphene by Room Temperature Mild Plasma Treatment2011

    • Author(s)
      T. Kato, L. Jiao, X. Wang, H. Wang, X. Li, L. Zhang, R. Hatakeyama, and H. Dai
    • Organizer
      12th International Conference on the Science and Application of Nanotubes
    • Place of Presentation
      Cambridge, UK
    • Year and Date
      2011-07-10
  • [Book] "Recent Progress of Plasma CVD for Structure Controlled Growth of Single-Walled Carbon Nanotubes" 「Recent Progress in Carbon Nanotube Research」2013

    • Author(s)
      T. Kato and R. Hatakeyama
    • Total Pages
      89-108
    • Publisher
      InTech (edited by Satoru Suzuki)
  • [Book] "Fabrication of Stable N-Type Thin-Film Transistor with Cs Encapsulated Single-Walled Carbon Nanotubes",「Nanoelectronic Device Applications Handbook」2013

    • Author(s)
      T. Kato, R. Hatakeyama, and Y. Osanai
    • Total Pages
      499-502
    • Publisher
      CRC Press (Taylor & Francis Group)edited by J. E. Morris & K. Iniewski
  • [Book] "Structure Control of Single-Walled Carbon Nanotubes by Plasma CVD", 「Plasma Processing of Nanomaterials」2011

    • Author(s)
      R. Hatakeyama and T. Kato
    • Total Pages
      219-230
    • Publisher
      CRC Press, Taylor & Francis Group(edited by R. M. Sankaran)
  • [Remarks]

    • URL

      http://www.plasma.ecei.tohoku.ac.jp

  • [Patent(Industrial Property Rights)] グラフェン構造体及びそれを用いた半導体装置並びにそれらの製造方法2011

    • Inventor(s)
      畠山力三,加藤俊顕
    • Industrial Property Rights Holder
      畠山力三,加藤俊顕
    • Industrial Property Number
      特許権、特願2011-264157
    • Filing Date
      2011-12-01
  • [Patent(Industrial Property Rights)] 単層カーボンナノチューブの製造方法2011

    • Inventor(s)
      畠山力三,加藤俊顕
    • Industrial Property Rights Holder
      畠山力三,加藤俊顕
    • Industrial Property Number
      特許権、特願2011-225534
    • Filing Date
      2011-10-13

URL: 

Published: 2014-09-25  

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