2012 Fiscal Year Final Research Report
Micro End Milling of Lithium Niobate for fabrication of New SAW device
| Project/Area Number |
23760118
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | University of Hyogo |
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Principal Investigator |
SHIZUKA Hiroo 兵庫県立大学, 工学(系)研究科(研究院), 助教 (80552570)
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| Co-Investigator(Renkei-kenkyūsha) |
OKUDA Koichi 兵庫県立大学, 工学(系)・研究科(研究院), 教授 (50124061)
NUNOBIKI Masayuki 兵庫県立大学, 工学(系)・研究科(研究院), 教授 (50244687)
UTSUMI Yuichi 兵庫県立大学, 高度産業科学技術研究所, 教授 (80326298)
SAIKI Tsunemasa 兵庫県立工業技術センター, 情報技術支援部, 主任研究員 (80470227)
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| Project Period (FY) |
2011 – 2012
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| Keywords | ニオブ酸リチウム / 延性モード切削 / μ-TAS / Lithium Niobate / ダイヤモンド切削 / ダイヤモンドエンドミル / シェーパ加工 / 弾性表面波 |
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| Research Abstract |
This report describes the cutting characteristics of lithium niobate, which is used for surface acoustic wave type micro pumps, regarding the formation of micro grooves by direct cutting. Since lithium niobate is a brittle material with a strong crystal orientation dependency, significant differences were observed in the characteristics of the finished surface according to different directions of cutting. The ductile mode cutting of lithium niobate was found to be feasible with cutting depths of approx. 5 μm or less. Also, results of the study show the feasibility of the formation of minute grooves through the cutting of lithium niobate, using milling with an end mill. In addition, we tried to product MEMS device, and we succeeded in the development of new μ-TAS devices with surface acoustic wave type micro pomp using lithium niobate.
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