Development of photonic-system-on-chip technology

2013 Fiscal Year Final Research Report

• Project/Area Number: 24651163
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Single-year Grants
• Research Field: Microdevices/Nanodevices
• Research Institution: Nara Institute of Science and Technology
• Principal Investigator: SASAGAWA Kiyotaka 奈良先端科学技術大学院大学, 物質創成科学研究科, 助教 (50392725)
• Project Period (FY): 2012-04-01 – 2014-03-31
• Keywords: マイクロセンサー / マイクロ光システム / イメージセンサー

Research Abstract

On-chip photonic devices based on wiring layers of CMOS process were designed and fabricated. The devices can be monolithically integrated, for example, on images sensors. Its structure is a metal grating on an image sensor pixel, which has characteristics of polarization separation and wavelength dependence. By using recent advanced CMOS processes, the pitches of the metal grating with wiring layers can be designed finer than visible wavelengths. In this study, the extinction ratio of approximately 100 was successfully achieved by using 65-nm process.

Research Products

• [Journal Article] Image sensor pixel with on-chip hig extinction ratio polarizer based on 65-nm standard CMOS technology (2013)
  • Author(s): Kiyotaka Sasagawa, Norimitsu Wakama, Toshihiko Noda, Takashi Tokuda, Kiyomi Kakiuchi, Jun Ohta
  • Journal Title: Opt. Express Volume: vol.21 Pages: 11132-11140
  • DOI: 10.1364/OE.21.011132
• [Journal Article] Polarisation analyzing complementary metal-oxide semiconductor image sensor in 65-nm standard CMOS technology (2013)
  • Author(s): Norimitsu Wakama, Daisuke Okabayashi, Toshihiko Noda, Kiyotaka Sasagawa, Takashi Tokuda, Kiyomi Kakiuchi, Jun Ohta
  • Journal Title: J. Eng Pages: 1-3
  • DOI: 10.1049/joe.2013.0033
• [Presentation] On-chip polarizer on image sensor using advanced CMOS technology (2014)
  • Author(s): Kiyotaka Sasagawa, Norimitsu Wakama, Toshihiko Noda, Takashi Tokuda, Kiyomi Kakiuchi, Jun Ohta
  • Organizer: Photonics West
  • Place of Presentation: San Francisco, CA, USA
  • Year and Date: 2014-02-04
  • Invited
• [Presentation] 先端集積回路プロセスによる偏光子搭載イメージセンサ (2013)
  • Author(s): 笹川清隆,若間範光,野田俊彦,徳田崇,太田淳
  • Organizer: 光応用電磁界計測(PEM)次元研究専門委員会
  • Place of Presentation: 大阪大学,大阪
  • Year and Date: 2013-08-07
• [Presentation] A polarization-analyzing CMOS image sensor with metal wire grid in 65-nm standard CMOS technology for in-situ chiral analysis (2013)
  • Author(s): Norimitsu Wakama, Daisuke Okabayashi, Toshihiko Noda, Kiyotaka Sasagawa, Takashi Tokuda, Kiyomi Kakiuchi, Jun Ohta
  • Organizer: Seventh International Conference on Molecular Electronics and Bioelectronics (M&BE7)
  • Place of Presentation: Fukuoka, Japan
  • Year and Date: 2013-03-19
• [Presentation] Dual-Layer Metal-Grid Polarizer for Polarization Image Sensor in 65-nm CMOS Technology (2012)
  • Author(s): Kiyotaka Sasagawa, Norimitsu Wakama, Daisuke Okabayashi, Toshihiko Noda, Takashi Tokuda, Jun Ohta
  • Organizer: IEEE sensors 2012
  • Place of Presentation: Taipei, Taiwan
  • Year and Date: 2012-10-31
• [Presentation] Real-time multifunctional optical analyzer based on polarization-analyzing CMOS image sensor for microchemical systems (2012)
  • Author(s): Norimitsu Wakama, Nobuya Tachikawa, Kimitada Terao, Mikiko Shibata, Toshihiko Noda, Kiyotaka Sasagawa, Takashi Tokuda, Yasuhiro Nishiyama, Kiyomi Kakiuchi, Jun Ohta
  • Organizer: 2012 International Conference on Solid State Devices and Materials(SSDM2012)
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 2012-09-26
• [Presentation] 65 nm標準CMOSプロセスを用いた偏光分析CMOSイメージセンサの消光比評価 (2012)
  • Author(s): 若間範充,岡林大恭,野田俊彦,笹川清隆,徳田崇,垣内喜代三,太田淳
  • Organizer: 応用物理学会学術講演会
  • Place of Presentation: 愛媛大学,松山
  • Year and Date: 2012-09-13
• [Presentation] 65nmプロセスを用いた二層構造オンチップメタル偏光子搭載イメージセンサ (2012)
  • Author(s): 岡林大恭,若間範充,野田俊彦,笹川清隆,徳田崇,太田淳
  • Organizer: 映像情報メディア学会年次大会
  • Place of Presentation: 広島市立大学,広島
  • Year and Date: 2012-08-30
• [Presentation] 偏光分析CMOSイメージセンサによるマイクロ化学システム用in situ不斉計測デバイス (2012)
  • Author(s): 若間範充,松岡均,寺尾公維,芝田実希子,立川展也,野田俊彦,笹川清隆,徳田崇,西山靖浩,垣内喜代三,太田淳
  • Organizer: バイオ・マイクロシステム研究会
  • Place of Presentation: 京都大学,京都
  • Year and Date: 2012-06-12
• [Presentation] On-chip metal wire grid polarizer for CMOS image sensor based on 65-nm technology (2012)
  • Author(s): Kiyotaka Sasagawa, Keisuke Ando, Hitoshi Matsuoka, Takuma Kobayashi, Toshihiko Noda, Takashi Tokuda, Jun Ohta
  • Organizer: Conference on Lasers and Electro-Optics (CLEO 2012)
  • Place of Presentation: San Jose, CA, USA
  • Year and Date: 2012-03-07
• [Remarks]
  • URL: http://mswebs.naist.jp/LABs/pdslab/index-j.html