Studies on THz sampling and signal generation technologies based on MEMS/resonant tunneling diode integration

2016 Fiscal Year Final Research Report

• Project/Area Number: 25249042
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: University of Toyama
• Principal Investigator: Maezawa Koichi 富山大学, 大学院理工学研究部(工学), 教授 (90301217)
• Co-Investigator(Kenkyū-buntansha): 石井 仁 豊橋技術科学大学, その他部局等, その他 (20506175) ; 安藤 浩哉 豊田工業高等専門学校, その他部局等, 教授 (30212674)
• Co-Investigator(Renkei-kenkyūsha): MORI Masayuki 富山大学, 大学院理工学研究部, 准教授 (90303213)
• Project Period (FY): 2013-05-31 – 2017-03-31
• Keywords: 共鳴トンネル / テラヘルツ / MEMS / サンプリング / 異種材料集積 / InP / パルス / 発振器

Outline of Final Research Achievements

The purpose of this research is to develop all-electronic THz spectroscopy system on a chip based on a resonant tunneling diode (RTD), Micro electro mechanical system (MEMS) and heterogeneous integration technology. Various device and circuit technologies, such as RTD pulse generators, MEMS phase shifters, wide-range variable-frequency oscillators, and super regenerative detectors, have been investigated. A prototype circuit of the samplers for the THz spectroscopy was also fabricated and demonstrated the basic operation.

Free Research Field

半導体デバイス工学