Improvement of compositional analysis on TEM by means of microcalorimeter-EDS

2015 Fiscal Year Final Research Report

• Project/Area Number: 25390086
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: National Institute for Materials Science
• Principal Investigator: HARA TORU 国立研究開発法人物質・材料研究機構, 表界面構造・物性ユニット, 主席研究員 (70238161)
• Co-Investigator(Renkei-kenkyūsha): MARHATA Keisuke 国立大学法人九州大学, 工学研究院エネルギー量子工学部門, 准教授 (30190317) ; NISHIDA Minoru 国立大学法人九州大学, 綜合理工学研究院融合創造理工学部門, 教授 (90183540)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 電子顕微鏡 / 組成分析 / 超伝導遷移端センサ / マイクロカロリメータ / X線分析 / 組成分析 / 金属材料

Outline of Final Research Achievements

We are developing a transition-edge sensor type X-ray detector for electron microscopes. This detector realizes X-ray analysis with very high energy resolution, less than 10eV. The purpose of this study is to develop a method to perform accurate analysis and apply to practical researches. From the present study, X-ray detecting efficiency and detecting limit etc. with the new detecting system were investigated.

Free Research Field

金属組織学