Constraction of a reliable shape measurement system using interferometry and phase measurement deflectometry

2014 Fiscal Year Final Research Report

• Project/Area Number: 25820025
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Production engineering/Processing studies
• Research Institution: The Graduate School for the Creation of New Photonics Industries
• Principal Investigator: HANAYAMA Ryohei 光産業創成大学院大学, 光産業創成研究科, 講師 (20418924)
• Project Period (FY): 2013-04-01 – 2015-03-31
• Keywords: 形状計測 / 位相計測ディフレクトメトリ / 金型 / 超精密計測 / 計測工学

Outline of Final Research Achievements

Phase measuring deflectometry is an emerging technique to measure specular complex surface, such as aspherical surface and free-form surface. It is very attractive for its wide dynamic range of vertical scale and application range. On the other hand, interferometry is accurate and well-known method for precision shape measurement. In interferometry, the original measured data is phase of interference signal, which directly shows the surface shape of the target. Then I proposeｄ measuring method using both interferometer and deflectometry for reliable shape measurement.
One of the major difference of deflectometry against to interferometry is artificial, pixelated and quantized fringe. In phase detection for such a fringe, there are some limitation in the resolution. The resolution causes that of gradient of normal vector. However, it is expected that it can be achieved several thousandth of wavelength of phase resolution.

Free Research Field

精密計測