Study on high sensitive force sensor using a piezo-effect occurred in ZnO nano-rods synthesized controlling their growth mode

2016 Fiscal Year Final Research Report

• Project/Area Number: 26390102
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: General applied physics
• Research Institution: Nagoya Institute of Technology
• Principal Investigator: Ichikawa Yo 名古屋工業大学, 工学(系)研究科(研究院), 教授 (10314072)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Keywords: ZnOナノロッド / ピエゾ効果 / フォースセンサー

Outline of Final Research Achievements

The purpose of this study is a realization of a high sensitive force sensor composed of “X-formed” zinc oxide (ZnO) nano-rods. In this sensor, a piezo-resistance of the nano-rods is changed by applying force. We investigated the optimal conditions of bringing up ZnO nano-rods so that rods become cross “X-formed”, and the fine processing for forming electrodes sandwiching the both ends of the ZnO nano-rods in order to realize a high sensitive force sensor composed of ZnO nano-rods.
As for the main results in this study, 1) orientational ZnO nano-rods could be successfully obtained at room temperature by hydrothermal synthesis, 2) high sensitivity of the X-formed ZnO nanorods for applied force could be confirmed and 3) the condition of thermal chemical vapor deposition (CVD) processing that ZnO nano-rods grow up directly on graphene could be found out.

Free Research Field

機能性材料の薄膜化・ナノ構造化