Research of high sensitivity X-ray sensor for low radiation dose X-ray CT using side X-ray irradiation method

2016 Fiscal Year Final Research Report

• Project/Area Number: 26390104
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: General applied physics
• Research Institution: Kyushu Institute of Technology
• Principal Investigator: Ariyoshi Tetsuya 九州工業大学, マイクロ化総合技術センター, 助教 (60432738)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Keywords: X線センサー / トレンチ構造型フォトダイオード / 低被曝線量 / 半導体デバイス

Outline of Final Research Achievements

Medical X-ray diagnosis devices such as CT scanners entails the problem of X-ray radiation dose. By improving the sensitivity of the X-ray sensors, the X-ray radiation dose can be decreased and everyone can easily use various kinds of safe X-ray diagnosis without restrictions. In this study, we propose a direct conversion type silicon X-ray sensor adopting a trench-structured photodiodes. This proposed X-ray sensor has the features of high sensitivity, high speed response, long device lifetime, low power consumption, and high energy resolution. The prototype X-ray sensor was fabricated, and this sensor demonstrated the absorbed X-ray-to-current signal conversion efficiency approaching the theoretical limit.

Free Research Field

放射線計測