Development of Evaluation Method of Film Delamination Strength, and Improvement by Nano-wire

2016 Fiscal Year Final Research Report

• Project/Area Number: 26420016
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Materials/Mechanics of materials
• Research Institution: Hiroshima University
• Principal Investigator: Kato Masahiko 広島大学, 工学研究院, 准教授 (70274115)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Keywords: プラズマ放電 / はく離強度 / ナノワイヤ / SiC薄膜

Outline of Final Research Achievements

Evaluation system of delamination strength of films with a thickness less than 1 micro meter was newly developed, because quantitative evaluation of delamination strength of thin films is important for engineering application. Reliable results were obtained by the newly developed measurement system, and the system was applicable to the evaluation of delamination strength of thin films.
Nano-wires were formed on the substrate to improve the delamination strength of thin films before coating. The result showed that the delamination strength was improved by the formation of the nano-wire, and revealed the effectiveness of the formation of nano-wire.

Free Research Field

表面処理