Development of nano-scale X-ray diffraction mapping technique

2016 Fiscal Year Final Research Report

• Project/Area Number: 26420292
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Electronic materials/Electric materials
• Research Institution: Japan Synchrotron Radiation Research Institute
• Principal Investigator: Imai Yasuhiko 公益財団法人高輝度光科学研究センター, 利用研究促進部門, 副主幹研究員 (30416375)
• Research Collaborator: SUMITANI Kazushi ; KIMURA Shigeru
• Project Period (FY): 2014-04-01 – 2017-03-31
• Keywords: マイクロ回折 / マイクロＸ線回折 / ナノビーム回折 / ナノビームＸ線回折 / 逆格子マップ / Ｘ線 / 放射光 / アラインメント

Outline of Final Research Achievements

Real space mapping of X-ray diffraction measurement have been performed using synchrotron X-ray focused to 100 nm in order to reveal strain distribution in a sample. To achieve high-spatial-resolution, X-rays irradiation position on a sample should not be moved by the sample rotation. For this reason, a sample surface is precisely aligned to the rotation center of a rotation stage.
A technique has been developed to align any position on a sample surface to the rotation center of the rotation stage automatically independent of surface figuration of the sample. Using this technique, large area real space mapping of nano-beam X-ray diffraction has been achieved.

Free Research Field

精密Ｘ線光学