2017 Fiscal Year Final Research Report
Current-enhanced CVD and annealing of multilayer graphene for reduction of resistance
| Project/Area Number |
26420319
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Shibaura Institute of Technology |
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Principal Investigator |
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| Project Period (FY) |
2014-04-01 – 2018-03-31
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| Keywords | グラフェン配線 / 化学的気相成長 / 固相析出 / 電流印加 / エレクトロマイグレーション / 低温プロセス / 結晶性 / 集積回路 |
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| Outline of Final Research Achievements |
Although multilayer graphene (MLG) is expected as a nano-sized fine interconnect material, establishment of a method for forming a film with good crystallinity at low temperature is the greatest challenge for achieving MLG interconnection. In this study, the effect of electric current other than heating (temperature) was used to realize low temperature formation of MLG film and improvement of film quality, and the mechanism of its action was clarified. By this research, it is expected that MLG film with good film quality can be formed at low temperature by new means of applying current, leading to low resistance of nano size wiring.
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| Free Research Field |
電極配線プロセス技術
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