Fabrication of high dielectric BaTiO3 film by a control of defect structures using transmission electron microscopy

2015 Fiscal Year Final Research Report

• Project/Area Number: 26889078
• Research Category: Grant-in-Aid for Research Activity Start-up
• Allocation Type: Single-year Grants
• Research Field: Inorganic materials/Physical properties
• Research Institution: Japan Fine Ceramics Center
• Principal Investigator: KOBAYASHI Shunsuke 一般財団法人ファインセラミックスセンター, その他部局等, 研究員 (60714623)
• Project Period (FY): 2014-08-29 – 2016-03-31
• Keywords: チタン酸バリウム / 薄膜 / 誘電率 / 透過型電子顕微鏡 / 歪み

Outline of Final Research Achievements

High dielectric material is very important for technological applications. Especially, ferroelectric perovskite oxide films have been intensively investigated due to an expectation for a high dielectric constant. In this study, we aim to fabricate the high dielectric BaTiO3 film by tuning stoichiometry in a film and forming atomically flat interface between an electrode and a film. In the present BaTiO3 film, the dielectric constant showed ε = 11,005 at Tc (690 K) and also over 2,000 (300 ~690 K), which is significantly higher than previously reported values.

Free Research Field

電子顕微鏡による材料の微細構造解析