1987 Fiscal Year Final Research Report Summary
3D microscopy by using acoustic wave and electron beam
| Project/Area Number |
61550285
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| Research Category |
Grant-in-Aid for General Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Research Field |
電子機器工学
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| Research Institution | Osaka Institute of Technology |
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Principal Investigator |
SUGA Hiroshi Professor,Faculty of Engineering,Osaka Institute of Technology, 工学部, 教授 (80079574)
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| Co-Investigator(Kenkyū-buntansha) |
KOTERA Masatoshi Assosiate Prof.,Faculty of Engineering, Osaka Institute of Technology, 工学部, 助教授 (40170279)
OCHI Kanyoshi Assosiate Prof.,Faculty of Engineering, Osaka Institute of Technology, 工学部, 講師 (80079582)
UMEDA Wataru Assosiate Prof.,Faculty of Engineering, Osaka Institute of Technology, 工学部, 講師 (30079579)
NISHIKAWA Haruyoshi Assosiate Prof.,Faculty of Engineering, Osaka Institute of Technology, 工学部, 助教授 (00079568)
IMAI Kenzo Assosiate Prof.,Faculty of Engineering, Osaka Institute of Technology, 工学部, 助教授 (50079571)
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| Project Period (FY) |
1986 – 1987
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| Keywords | Acoustic microscopy / 3D Microscopy / 赤外線顕微鏡 |
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| Research Abstract |
The main of this project is to get some bacic concepts of three dimensional microscopy which is especially for observing inner structure of various small devices such as integrated circuits. We obtained the following two new resulys. 1. An acoustic image arising from the three dimensional stucture was observed. Two acoustic transtic transducers and one specially made piezoelectric film were set on each side of right prism. In this arrangement,acoustic image on the film was observed by the scanning electrn microscope. 2. Because infrared light penetratc some of specimens like silicon wafer as good as acoustic wave,it is also used to see through the inside of the specimen three dimensionally with the stereoscopic technique.
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Research Products
(1 results)
