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1987 Fiscal Year Final Research Report Summary

Formation of Thin Films and Surface Modification by Shock Wave Plasma.

Research Project

Project/Area Number 61580014
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field プラズマ理工学
Research InstitutionHirishima-Denki Institute of Technology

Principal Investigator

EZUMI Hiromichi  Hiroshima-Denki Institute of Technology, Faculty of Engineering, 工学部, 助教授 (40069208)

Co-Investigator(Kenkyū-buntansha) YAMADA Hikaru  Hiroshima-Denki Institute of Technology, Faculty of Engineering, 工学部, 助教授 (50069209)
ENDO Toshiro  Hiroshima-Denki Institute of Technology, Faculty of Engineering, 工学部, 助教授 (60069200)
KUWAHARA Kaizo  Hiroshima-Denki Institute of Technology, Faculty of Engineering, 工学部, 教授 (60034279)
Project Period (FY) 1986 – 1987
KeywordsShock Wave / Plasma / Deposition-Thin Film / Superconductivity Mon / 超伝導 / 窒化ニオブ / 窒化モリブデン
Research Abstract

(1) The deposition of Cu, Nb and Mo on fused quartz substrates was made by the shock wave deposition(SWD) method, Using a plasma produced by the T-shaped electromagnetic shock tube.
(2) The Cu deposits formed from powders placed between the electrode were not laminar but granular. Adhesion of the deposits was much higher than that of Cu films formed by the convetionl Vacuum deposition.
(3) The Nb or Mo deposits formed in the carrier gas of nitrogen from Nb or Mo pellets placed between the electrodes were laminer, mainly composed of NbN or MoN and 50-60 nm thick for 2 plasma shots. In the case of MoN, Films of 200 nm thick could be produced on a substrate inclined at 60゜ to the flow direction.
(4) All the films of MoN and NbN exhibited the superconductivity transition. The superconfuvyibity characteristics were improved with increasing the initial pressure P_1 of carrier gas.
(5) For P_1 =400 Pa and shock velocity v=12 Km/s, temperature and pressure behind the incident shock wave were determined to be 13000 K and 0.6 MPa respectively.
(6) It was concluded that the SWD method is especialy effective to the formation of transition metal nitride films.

  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] 江角弘道: 広島電機大学・広島自動車工業短期大学研究報告. 19. 13-20 (1986)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Toshiro Endo: 広島電機大学・広島自動車工業短期大学研究報告. 19. 55-62 (1986)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hiromichi Ezumi: J.Phys.Soc.Jpn.56. 1731-1737 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 江角弘道: 広島電機大学・広島自動車工業短期大学研究報告. 20. 13-20 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 酒井恒: 広島電機大学・広島自動車工業短期大学研究報告. 20. 21-31 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hiromichi Ezumi: Thin Solid Films. (1988)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Toshiro Endo: Thin Solid Films. (1988)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hiromichi Ezumi: "Formation of Thin Films Using Plasma Produced Shock Wave." Memoirs of The Hiroshima-Denki Institute of Technology and The Hiroshima Junior College of Automotive AttomotiveEngineering. 19. 13-20 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Toshiro Endo: "Point Contact Spectroscopy in (Superconduction Nb) -Ag past above 4.2 k" Memoirs of The Hiroshima-Denki Institute of Technology and The Hiroshima Junior College of Automotive Engineering. 19. 55-62 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiromichi Ezumi: "Point Contact Spectroscopy in (Superconduction Nb) -Ag past above 4.2 k" Memoirs of The Hiroshima-Denki Institute of Technology and The Hiroshima Junior College of Automotive Engineering. 19. 55-62 (1986)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiromichi Ezumi: "Atom-Atom Excitation in Shock in Argon-Oxygen Mixture." J. Phys. Soc. Jpn.56. 1731-1737 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiromichi Ezumi: "Formation of Transition Metal Nitride Films Using Shock Wave Deposition Method." Memoirs of The Hiroshima-Denki Institute of Technology and The Hirishima Junior College of Automotive Engineering. 20. 13-20 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hisashi Sakai: "Analysis of Atomic Population Density in a Helium Plasma Produced by a Descharge in a Hollow Cathode of Plane Parallel Geometry." Memoirs of The Hiroshima-Denki Institute of Technology and The Hiroshima Junior College of Automotive Engineering. 20. 21-31 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiromichi Ezumi: "Formation of Thin Films by Shock Wave Deposition Method." Thin Solid Films. (1988)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Toshiro Endo: "Fabrication of Transition Metal Nitride Films Using a Shock Wave Plasma." Thin Solid Films. (1988)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1989-03-30  

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