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1990 Fiscal Year Final Research Report Summary

Layer-by-Layer Preparation and Property of Functional Ceramics with Artificial Lattices.

Research Project

Project/Area Number 62430016
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field 無機工業化学
Research InstitutionOkayama University

Principal Investigator

MIURA Y  Okayama Univ., Faculty of Eng., Prof., 工学部, 教授 (80032952)

Co-Investigator(Kenkyū-buntansha) NANBA T  Okayama Univ., Faculty of Eng., Research associate, 工学部, 助手 (80218073)
OSAKA A  Okayama Univ., Faculty of Eng., Associate prof., 工学部, 助教授 (20033409)
BANDO Y  Kyoto Univ., Institute for Chemical Research, Prof., 化学研究所, 教授 (70027027)
TAKADA J  Okayama Univ., Faculty of Eng., Prof., 工学部, 教授 (60093259)
Project Period (FY) 1987 – 1990
KeywordsCeramic artificial lattice / Electron-beam evaporation apparatus / Activated reactive evaporation / Thin films for electronics
Research Abstract

A few metals were evaporated in vacuum from each source, heated by an electron beam or a resistance heater, and were reacted with activated gases in order to deposit thin films of relevant compounds (Activated reactive evaporation, ARE, method). Employing the ARE method we have prepared several oxidefilms of artificial lattices and epitaxically grown films of single oxides, examined their structure, and measured physical properties. The results are :
1) Thin oxide films of artificial lattices were prepared in the systems CoO/NiO, Fe_3O_4/CoO and Fe_3O_4/SiO_2. They had distorted superlattices, whose magnetic structures and magnetic transformation temperatures depended on their film thickness.
2) CoO/SiO_X layered films were prepared. Hydrogen reduction yielded the layered Co/SiO_X films in which a layer of ultrafine particles of metallic Co were sandwiched between the SiO_X layers. The Co particles were superparamagnetic and protected by the SiO_X layers.
3) Simultaneous reactive evaporat … More ion of Cu, Y and Ba yielded superconducting YBa_2Cu_3O_<7-X> films at 600゚C having Tc=90K and Jc=4x10^6 A・cm^<-2>.
4) Though each layer of thinner films of NiO/ZnO artificial lattices took a NaCl type structure, the ZnO layer of thicker films took a Wurtzite structure.
5) (100) -oriented BaTiO_3 films were epitaxically grown on a substrate, SrTiO_3/Pt. The as-grown films were ferroelectric and had a resistance >10^9 OMEGA・cm.
6) We have established a routine to prepare stoichiometric PbTiO_3 with preferred orientation : c-axis oriented films were deposited on MgO (100) substrates and (111) -oriented ones on the sapphire c-planes. Those as-grown films were ferroelectric and exhibited good pyroelectricity.
7) A detailed examimation was made on the mechanism of diposition c-axis oriented ZnO films on silica glass substrates. Transparent electroconductive films of Al doped ZnO were prepared. The transparent films doped with 2-5% Al could be deposited on the substrate whose temperature was kept at as lowas 150^0C, and they had specific resistivity <1x10^<-3> OMEGA・cm. Less

  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] 坂東 尚周 ら: "酸化物仕格子薄膜の構造と磁性" 応用物理. 56. 1337-1342 (1987)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 坂東 尚周 ら: "CoOlSiOx多層膜からCo超微粒子の作製" 日本結晶学会誌. 30. 37-42 (1988)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Bando,et al.,: "Formation and Stucture of Artificial Suprelattices of oxides and Selenides by Evaporation Techniques." MRS In'l.Mtg.on Adv.Mats.10. 83-94 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Bando,et.al.,: "Low Temperature Growth and Propeties of YBCO Single Crystal Films." Thin Solid Films. 181. 147-155 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Iijima,et.al.,: "Fromation and Structures of NiOーZnO Artificial Superlattices" J.Crystal Growth. 95. 505-508 (1989)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Iijima,et.al.,: "Preparation of Ferroelectric BaTiO_3 Thin Films by Activated Reactive Evaporation." Appl.Phys.Lett.56. 527-529 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 岡村 敏彦 ら: "活性化反応蒸着法によるPbTiO^3薄膜の作製" 日本セラミックス協会学術論文誌. 98. 749-753 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Miura,et.al.,: "Prepartion of ZnO Films by Activated Reactive Evaporation Method." Memoirs of the Faculty of Engineering,Okayama University. 25. 23-35 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 三浦 嘉也 ら: "活性化反応蒸着法によるZnO薄膜の作製" 材料. 40,〔451〕. 13-18 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y. Bando: "Structure and Magnetism of Artificial Superlattice Films of Oxides." Oyo Buturi. 56. 1337-1342 (1987)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Bando: "Preparation of Co Ultrafine particles by Reduction of Multilayered CoO/SiO_X Films." Jpn. J. Crystallography.30. 37-42 (1988)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Bando: "Formation and Structure of Artificial Superlattices of Oxides and Selenides by Evaporation Techniques." MRC Int'l. Mtg. on Adv. Mats. 10. 83-94 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Bando: "Low Temperature Growth and Properties of YBCO Single Crystal Films." Thin Solid Films. 181. 147-155 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Iijima: "Formation and Structures of NiO-ZnO Artificial Superlattices." J. Crystal Growth. 95. 505-508 (1989)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Iijima: "Preparation of Ferroelectric BaTiO_3 Thin Films by Activated Reactive Evaporation." Appl. Phys. Lett.56. 527-529 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Okamura: "Preparation of PbTiO_3 Filims by Activated Reactive Evaporation." J. of Ceram. Soc. Japan. 98. 749-753 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Miura: "Preparation of ZnO Films by Activated Reactive Evaporation Method." Memoris of the Faculty of Engineering. Okayama University. 25. 23-35 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Miura: "Preparation of ZnO Films by Activated Reactive Evaporation Method." Zairyo. 40. [451]13-18 (1991)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1993-08-12  

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