1989 Fiscal Year Final Research Report Summary
Development of a Differential Laser Autocollimation Probe for precision measurement of mirror shapes
| Project/Area Number |
63850028
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| Research Category |
Grant-in-Aid for Developmental Scientific Research
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| Allocation Type | Single-year Grants |
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| Research Field |
機械工作
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| Research Institution | TOHOKU UNIVERSITY |
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Principal Investigator |
KAMADA Osamu Tohoku Univ., Dept.of Precision Eng., Prof., 工学部, 教授 (00006131)
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| Co-Investigator(Kenkyū-buntansha) |
SATOH Eiich Olympus Corp., Dept.of Research, Manager, 研究開発部, 課長
KIYONO Satoshi Tohoku Univ., Dept.of Precision Eng., Assoc. Prof., 工学部, 助教授 (40005468)
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| Project Period (FY) |
1988 – 1989
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| Keywords | Laser Diode / Autocollimation / Differential Measurement / Mirror Shape / Precision Measurement / On Machine Measurement / オンマシン測定 |
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| Research Abstract |
In order to apply the differential laser autocollimation method to on-machine-measurement, a trial probe is made. The probe has been constructed from two collimated beams of laser diode and a PSD position sensitive device ) located in a focal plane of an objective. The resolution and accuracy of the trial probe is about 1 second.
In scanning measurements of cross sectional profiles of mirrors, translatory and angular errors during the scanning notion are canceled remarkably. Measured profiles reproduced with maximum deviation of 0.05 micron under residual vibration due to stepping notion of a scanning table.
In order to present 3-dimensional profile, it is necessary to scan in and y-direction of surface by DLAC probe and also to measure relative inclination of at least two curves by using single bean laser autocollimation.
It has been shown that parabolic surface mirror and plane mirror with a concave error are able to be measured and displayed by 3- dimensional expression. Reproducibility of measured shapes by resetting a specimen after a turn of 90 degree was realized within deviation of 0.1 micron.
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