Observation of the femto second laser ablation process by the soft x-ray laser probe towards the control of laser nano-processing

• Project/Area Number: 16K04989
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Optical engineering, Photon science
• Research Institution: National Institutes for Quantum and Radiological Science and Technology
• Principal Investigator: HASEGAWA Noboru 国立研究開発法人量子科学技術研究開発機構, 関西光科学研究所 光量子科学研究部, 主幹研究員(定常) (50360409)
• Co-Investigator(Kenkyū-buntansha): 錦野 将元 国立研究開発法人量子科学技術研究開発機構, 関西光科学研究所 光量子科学研究部, グループリーダー(定常) (70370450) ; 石野 雅彦 国立研究開発法人量子科学技術研究開発機構, 関西光科学研究所 光量子科学研究部, 主幹研究員(定常) (80360410) ; 難波 愼一 広島大学, 工学研究科, 教授 (00343294)
• Project Period (FY): 2016-04-01 – 2019-03-31
• Project Status: Completed (Fiscal Year 2018)
• Budget Amount: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000); Fiscal Year 2018: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2017: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2016: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
• Keywords: レーザーアブレーション / フェムト秒レーザー加工 / 軟Ｘ線干渉計測 / 時間空間分解計測 / フェムト秒レーザー / アブレーション / レーザー加工 / 軟Ｘ線顕微鏡 / 時間分解計測 / 軟Ｘ線レーザー / フェムト秒レーザーアブレーション / 超高速現象の時間分解計測 / 軟Ｘ線プローブ計測 / 光プロセシング / 超短パルスレーザー加工

Outline of Final Research Achievements

In this study, we observed the femto second laser ablation process around the laser ablation threshold towards the understanding and precise control of the laser processing. The soft x-ray interferometer with 7 picosecond time resolution, 1.5 nanometer depth resolution and 0.7 micron lateral resolution was developed for the temporal and spatial resolved measurement.
By using this system, we have succeeded in the measurement of the femto second laser ablation process with the thin film structures, and obtaining the data set from the initial stage with nanometer scale expansion to the crater formation in the same experimental arrangement.

Academic Significance and Societal Importance of the Research Achievements

本研究で開発した軟Ｘ線レーザープローブを用いた時間空間分解計測手法により得られるアブレーションダイナミクスに関する計測結果は、従来困難であったシミュレーションと実験の直接比較を可能とする。また、本計測手法は、金属に限らず軟Ｘ線が反射可能な条件であれば様々な材質に対して適応可能であることから、加工シミュレーター等の開発への貢献が期待される。

Research Products

• [Journal Article] Enhancement of water-window soft x-ray emission from laser-produced Au plasma under low-pressure nitrogen atmosphere (2019)
  • Author(s): Christian John, 岸本 牧, Tomoyuki Johzaki, Takeshi Higashiguch, Noboru Kakunaka, Yasuhiro Matsumoto, 長谷川 登, 錦野 将元, Takeo Ejima, Atsushi Sunahara, Takuma Endo
  • Journal Title: Optics Letters Volume: 44 Pages: 1439-1442
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Study of damage structure formation on aluminum film targets by picosecond soft X-ray laser ablation around threshold region (2018)
  • Author(s): Ishino Masahiko、Inogamov Nail A.、Tamotsu Satoshi、Zhakhovsky Vasily V.、Hasegawa Noboru、Skobelev Igor Yu.、Faenov Anatoly Ya.、Pikuz Tatiana A.、Mikami Katsuhiro、Kawachi Tetsuya、Nishikino Masaharu
  • Journal Title: Applied Physics A Volume: 124 Issue: 9 Pages: 1-8
  • DOI: 10.1007/s00339-018-2072-9
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] 軟Ｘ線レーザーによるフェムト秒レーザーアブレーション過程の観察 (2018)
  • Author(s): 長谷川 登, 錦野 将元
  • Journal Title: J. Plasma Fusion Res. Volume: 94 Pages: 261-265
  • Peer Reviewed / Open Access
• [Journal Article] The Observation of Transient Thin Film Structures During the Femto-Second Laser Ablation Process by Using the Soft X-Ray Laser Probe (2018)
  • Author(s): Hasegawa N.、Nishikino M.、Ishino M.、Ohnishi N.、Ito A. M.、Minami Y.、Baba M.、Faenov A. Ya.、Inogamov N.、Kawachi T.、Kondo K.、Suemoto T.
  • Journal Title: Proceedings of the 15th International Conference on X-Ray Lasers Volume: 202 Pages: 273-277
  • DOI: 10.1007/978-3-319-73025-7_40
  • ISBN: 9783319730240, 9783319730257
  • Peer Reviewed
• [Journal Article] Ultra-intense X-Ray Radiation Photopumping of Exotic States of Matter by Relativistic Laser Plasma in the Radiation-Dominated Kinetic Regime (RDKR) (2018)
  • Author(s): A. Ya. Faenov, Noboru Hasegawa, Masaharu Nishikino, et al.
  • Journal Title: Proceedings of the 15th International Conference on X-Ray Lasers Volume: 202 Pages: 149-158
  • DOI: 10.1007/978-3-319-73025-7_23
  • ISBN: 9783319730240, 9783319730257
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] High-Order Harmonic Generation by Relativistic Plasma Singularities: The Driving Laser Requirements (2018)
  • Author(s): Pirozhkov A. S.、Esirkepov T. Zh.、Pikuz T. A.、Faenov A. Ya.、Ogura K.、Hayashi Y.、Kotaki H.、Ragozin E. N.、Neely D.、Kiriyama H.、Koga J. K.、Fukuda Y.、Sagisaka A.、Nishikino M.、Imazono T.、Hasegawa N.、Kawachi T.、Daido H.、Kato Y.、Bulanov S. V.、Kondo K.、Kando M.
  • Journal Title: Proceedings of the 15th International Conference on X-Ray Lasers Volume: 202 Pages: 85-92
  • DOI: 10.1007/978-3-319-73025-7_13
  • ISBN: 9783319730240, 9783319730257
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Analysis of Reflection Signal from EUV Multilayer Mirror for Irradiation-Induced Damage Study (2018)
  • Author(s): Ishino M.、Ichimaru S.、Hatayama M.、Hasegawa N.、Oku S.、Nishikino M.
  • Journal Title: Proceedings of the 15th International Conference on X-Ray Lasers Volume: 202 Pages: 315-319
  • DOI: 10.1007/978-3-319-73025-7_47
  • ISBN: 9783319730240, 9783319730257
  • Peer Reviewed
• [Journal Article] Progress and Prospects of X-Ray Laser Research in QST (2018)
  • Author(s): Nishikino M.、Hasegawa N.、Ishino M.、Imazono T.、Sasaki A.、Mikami K.、Dinh T. -H.、Suemoto T.、Namba S.、Faenov A. Ya.、Pikuz T. A.、Ichimaru S.、Hatayama M.、Kawachi T.
  • Journal Title: Proceedings of the 15th International Conference on X-Ray Lasers Volume: 202 Pages: 21-24
  • DOI: 10.1007/978-3-319-73025-7_3
  • ISBN: 9783319730240, 9783319730257
  • Peer Reviewed
• [Journal Article] Irradiation Damage Test of Mo/Si, Ru/Si and Nb/Si Multilayers Using the Soft X-Ray Laser Built at QST (2018)
  • Author(s): Ichimaru S.、Ishino M.、Nishikino M.、Hatayama M.、Hasegawa N.、Kawachi T.、Maruyama T.、Inokuma K.、Zenba M.、Oku S.
  • Journal Title: Proceedings of the 15th International Conference on X-Ray Lasers Volume: 202 Pages: 303-308
  • DOI: 10.1007/978-3-319-73025-7_45
  • ISBN: 9783319730240, 9783319730257
  • Peer Reviewed
• [Journal Article] Development of Time-Resolved Small-Angle X-Ray Scattering System Using Soft X-Ray Laser (2018)
  • Author(s): Kumada T.、Hasegawa N.、Nishikino M.、Otobe T.、Motokawa R.、Suemoto T.
  • Journal Title: Proceedings of the 15th International Conference on X-Ray Lasers Volume: 202 Pages: 401-404
  • DOI: 10.1007/978-3-319-73025-7_60
  • ISBN: 9783319730240, 9783319730257
  • Peer Reviewed
• [Journal Article] Investigation of Surface Excitation Effect for Ablation of 4H-SiC Substrate Using Double-Pulse Beam (2018)
  • Author(s): Matsunaga K.、Hayashi T.、Kurokawa S.、Yokoo H.、Hasegawa N.、Nishikino M.、Kumada T.、Otobe T.、Matsukawa Y.、Takaya Y.
  • Journal Title: Proceedings of the 15th International Conference on X-Ray Lasers Volume: 202 Pages: 321-326
  • DOI: 10.1007/978-3-319-73025-7_48
  • ISBN: 9783319730240, 9783319730257
  • Peer Reviewed
• [Journal Article] Laser-Induced Damage on Silica Glasses by Irradiation of Soft X-Ray Laser Pulse (2018)
  • Author(s): Mikami K.、Ishino M.、Dinh T.- H.、Yamamoto Y.、Hasegawa N.、Nishikino M.、Kawachi T.、Motokoshi S.、Jitsuno T.
  • Journal Title: Proceedings of the 15th International Conference on X-Ray Lasers Volume: 202 Pages: 333-337
  • DOI: 10.1007/978-3-319-73025-7_50
  • ISBN: 9783319730240, 9783319730257
  • Peer Reviewed
• [Journal Article] Development of a High Repetition Rate and High Pulse Energy Nd:YAG MOPA Laser System (2018)
  • Author(s): Mikami K.、Hasegawa N.、Okada H.、Kondo S.、Nishikino M.、Kawachi T.
  • Journal Title: Proceedings of the 15th International Conference on X-Ray Lasers Volume: 202 Pages: 405-408
  • DOI: 10.1007/978-3-319-73025-7_61
  • ISBN: 9783319730240, 9783319730257
  • Peer Reviewed
• [Journal Article] Demonstration of 25-Hz-inspection-speed laser remote sensing for internal concrete defects (2018)
  • Author(s): Kurahashi Shinri、Mikami Katsuhiro、Kitamura Toshiyuki、Hasegawa Noboru、Okada Hajime、Kondo Shuji、Nishikino Masaharu、Kawachi Tetsuya、Shimada Yoshinori
  • Journal Title: Journal of Applied Remote Sensing Volume: 12 Issue: 01 Pages: 1-1
  • DOI: 10.1117/1.jrs.12.015009
  • Peer Reviewed
• [Journal Article] Burst intensification by singularity emitting radiation in multi-stream flows (2017)
  • Author(s): Pirozhkov A. S.、Esirkepov T. Zh.、Pikuz T. A.、Faenov A. Ya.、Ogura K.、Hayashi Y.、Kotaki H.、Ragozin E. N.、Neely D.、Kiriyama H.、Koga J. K.、Fukuda Y.、Sagisaka A.、Nishikino M.、Imazono T.、Hasegawa N.、Kawachi T.、Bolton P. R.、Daido H.、Kato Y.、Kondo K.、Bulanov S. V.、Kando M.
  • Journal Title: Scientific Reports Volume: 7 Issue: 1 Pages: 17968-17968
  • DOI: 10.1038/s41598-017-17498-5
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Experimental characterization of concrete removal by high-power quasicontinuous wave fiber laser irradiation (2017)
  • Author(s): Long Nguyen Phi、Daido Hiroyuki、Yamada Tomonori、Nishimura Akihiko、Hasegawa Noboru、Kawachi Tetsuya
  • Journal Title: Journal of Laser Applications Volume: 29 Issue: 4 Pages: 041501-041501
  • DOI: 10.2351/1.5008326
  • Peer Reviewed
• [Journal Article] Flash-lamp-pumped 4 J, 50 Hz Nd:YAG nanosecond laser system for mobile and transportable equipment (2017)
  • Author(s): Mikami Katsuhiro、Hasegawa Noboru、Okada Hajime、Kondo Shuji、Nishikino Masaharu、Kawachi Tetsuya
  • Journal Title: Japanese Journal of Applied Physics Volume: 56 Issue: 8 Pages: 082701-082701
  • DOI: 10.7567/jjap.56.082701
  • NAID: 210000148146
  • Peer Reviewed
• [Journal Article] Formation of x-ray Newton’s rings from nano-scale spallation shells of metals in laser ablation (2017)
  • Author(s): Masaharu Nishikino, Noboru Hasegawa, Takuro Tomita, Yasuo Minami, Takashi Eyama, Naoya Kakimoto, Rui Izutsu, Motoyoshi Baba, Tetsuya Kawachi, and Tohru Suemoto
  • Journal Title: AIP Advances Volume: 7 Issue: 1
  • DOI: 10.1063/1.4975218
  • NAID: 120006877870
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] Study of optical emission during spallative ablation induced by soft x-ray laser pulses (2016)
  • Author(s): M. Ishino, M. Nishikino, N. Hasegawa, T. Pikuz, I. Skobelev, A. Faenov, M. Yamagiwa, and T. Kawachi
  • Journal Title: Springer Proceedings in Physics Volume: 169 Pages: 405-409
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Progress and prospects of coherent x-ray research using high power lasers in Japan Atomic Energy Agency (2016)
  • Author(s): T. Kawachi, M. Nishikino, A. Sasaki, M. Ishino, N. Hasegawa, T. Imazono, T. A. Pikuz, A. Y. Faenov, M. Magnitskiy, M. Maruyama, T. Tomita, T. Suemoto, A. S. Pirozhkov, S. V. Bulanov, H. Kiriyama, M. Kando, M. Yamagiwa, K. Kondo, P. Bolton, and Y. Kato
  • Journal Title: Springer Proceedings in Physics Volume: 169 Pages: 3-10
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] X-ray coherent mirage: Generation of phase matched coherent poins source in plasma media by propagated X^ray laser seeded beam (2016)
  • Author(s): A. Ya. Faenov, T. A. Pikuz, S. A. Magnitskiy, N. Nagorskiy, M. Tanaka, M. Ishino, M. Nishikino, M. Kando, R. Kodama, Y. Kato and T. Kawachi
  • Journal Title: Laser and Particle Beams Volume: 34 Pages: 402-411
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Evaluation of a flat-field grazing incidence spectrometer for highly charged ion plasma emission in soft x-ray spectral region from 1 to 10 nm (2016)
  • Author(s): Thanh-Hung Dinh, Yoshiki Kondo, Toshiki Tamura, Yuichi Ono, Hiroyuki Hara, Hiroki Oikawa, Yoichi Yamamoto, Masahiko Ishino, Masaharu Nishikino, Tetsuya Makimura, Padraig Dunne, Gerry O’Sullivan, Shigeru Ohta, Ken Kitano, Takeo Ejima, Hatano Tadashi, and Takeshi Higashiguchi
  • Journal Title: Review of Scientific Instruments Volume: 87 Issue: 12 Pages: 123106-123106
  • DOI: 10.1063/1.4971421
  • NAID: 120007135053
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] 高密度プラズマによるＸ線レーザーの屈折 -Ｘ線による蜃気楼現象の観測- (2016)
  • Author(s): FAENOV Anatoly, 石野雅彦, 河内哲哉
  • Journal Title: プラズマ・核融合学会誌 Volume: 92 Pages: 523-529
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Observation of the Dependence on the Fluence and Materials in Femto-second Laser Ablation Process by Using the Soft x-ray Laser Probe (2016)
  • Author(s): N. HASEGAWA, T. TOMITA, M. NISHIKINO, T. EYAMA, N. KAKIMOTO, Y. MINAMI, M. BABA, N. OHNISHI, A. M. ITO, T. KAWACHI, M. YAMAGIWA and T. SUEMOTO
  • Journal Title: JAEA-Conf 2015 Volume: 2015-001 Pages: 17-20
  • Peer Reviewed
• [Journal Article] 超短パルス軟Ｘ線レーザープローブによるフェムト秒レーザーアブレーション初期過程の解明 (2016)
  • Author(s): 長谷川 登, 錦野 将元, 南康夫, 馬場基芳, 大西直史, 伊藤篤史, 河内 哲哉, 末元徹
  • Journal Title: 第85回レーザ加工学会講演論文集 Volume: 85 Pages: 179-182
  • Acknowledgement Compliant
• [Journal Article] Reinjection of transmitted laser light into laser-produced plasma for efficient laser ignition (2016)
  • Author(s): T. Endo, Y. Takenaka, Y. Sako, T. Honda, T. Johzaki and S. Namba
  • Journal Title: Applied Optics Volume: 55 Pages: 1132-1137
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Avalanche of stimulated forward scattering in high harmonic generation (2016)
  • Author(s): C. Serrat,, D.Roca, J. M. Budesca, J. Seres, E. Seres, B. Aurand, A. Hoffmann, S. Namba, T. Kuehl, and C. Spielmann
  • Journal Title: Optics express Volume: 24 Pages: 8028-8044
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Development of a cascade arc discharge source for an atmosphere-vacuum interface device (2016)
  • Author(s): S. Namba, T. Endo, S. Fujino, C. Suzuki, and N. Tamura
  • Journal Title: Rev. Sci. Instrum. Volume: 87 Pages: 83503-83503
  • Peer Reviewed
• [Journal Article] Core-level attosecond transient absorption spectroscopy of laser-dressed solid films of Si and Zr (2016)
  • Author(s): E. Seres, J. Seres, C. Serrat and S. Namba
  • Journal Title: Phys. Rev. B Volume: 94 Pages: 165125-165125
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Numerical Study of Spectral Line Shapes in High-Density He Plasmas (2016)
  • Author(s): H. Kawazome and Shinichi Namba
  • Journal Title: Plasma Fusion. Res. Volume: 11
  • Peer Reviewed
• [Journal Article] An experimental study on the ignition ability of a laser-induced gaseous breakdown (2016)
  • Author(s): T. Endo, Y. Takenaka, Y. Sako, T. Johzaki, S. Namba
  • Journal Title: Combustion and Flame Volume: 178 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Measurement of ion Mach number of arcjet plasmas by a directional Langmuir probe under high-gas pressure (2016)
  • Author(s): W. Sasano, T. Shikama, K. Kozue, L. Matsuoka, N. Tamura and S. Namba
  • Journal Title: IEEE Transactions on Plasma Science Volume: 3 Pages: 285-288
  • Peer Reviewed
• [Presentation] Study of the dynamics of the femto-second laser ablation by using the soft x-ray laser probe in QST (2019)
  • Author(s): Noboru Hasegawa, Masaharu Nishikino, Masahiko Ishino, Thanhhung Dinh, 南 康夫, 馬場 基芳, Toru Suemoto
  • Organizer: SPIE Photonics West LASE LAMOM
  • Int'l Joint Research
• [Presentation] Development of soft x-ray laser irradiation beamline for ablation and damage study (2019)
  • Author(s): 石野 雅彦, タンフン ヂン, 長谷川 登, 坂上 和之, 東口 武史, 市丸 智, 畑山 雅俊, 鷲尾 方一, 錦野 将元
  • Organizer: SPIE Photonics West LASE LAMOM
  • Int'l Joint Research
• [Presentation] 軟X線自由レーザーによる材料表面加工応用に向けた表面アブレーション (2019)
  • Author(s): 錦野 将元, 石野 雅彦, タンフン ヂン, 長谷川 登, 坂上 和之, 東口 武史, 鷲尾 方一
  • Organizer: レーザー学会学術講演会第39回年次大会
• [Presentation] Ablation of silicon using femtosecond extreme ultraviolet laser (2019)
  • Author(s): タンフン ヂン, Nikita Medvedev, 石野 雅彦, 長谷川 登, 今 亮, 犬伏 雄一, 大和田 成起, 原 広行, 東口 武史, 坂上 和之, 鷲尾 方一, 羽多野 忠, 錦野 将元
  • Organizer: レーザー学会学術講演会第39回年次大会
• [Presentation] 金属薄膜のフェムト秒レーザーアブレーション過程の観察 (2019)
  • Author(s): 長谷川 登, 錦野 将元, タンフン ヂン, 石野 雅彦, 南 康夫, 馬場 基芳, 末元 徹
  • Organizer: レーザー学会学術講演会第39回年次大会
• [Presentation] Surface Ablation by Soft X-ray Laser Pulse for EUV nano-scale fabrication (2019)
  • Author(s): 錦野 将元, 石野 雅彦, タンフン ヂン, 長谷川 登, 坂上 和之, 東口 武史, 鷲尾 方一, 木下 博雄
  • Organizer: SPIE Photonics West /LAMOM XXIV
  • Int'l Joint Research / Invited
• [Presentation] EUV Laser Ablation and Damage Examination (2018)
  • Author(s): 石野 雅彦, タンフン ヂン, 北村 俊幸, 長谷川 登, 錦野 将元, 坂上 和之, 鷲尾 方一, 東口 武史, 市丸 智, 岡本 一将, 古澤 孝弘, 末元 徹, 木下 博雄, Tatiana Pikuz, Anatoly Faenov
  • Organizer: SACLA Users' Meeting 2018
• [Presentation] EUV laser irradiation system with intensity monitor (2018)
  • Author(s): 石野 雅彦, タンフン ヂン, 長谷川 登, Kazuyuki Sakaue, Takeshi Higashiguchi, Satoshi Ichimaru, Masataka Hatayama, Masakazu Washio, Masaharu Nishikino, Tetsuya Kawachi
  • Organizer: 16th International Conference on X-Ray Lasers (ICXRL 2018)
  • Int'l Joint Research
• [Presentation] Li-like Aluminum plasma soft x-ray laser by means of recombination scheme (2018)
  • Author(s): S. Namba, N. Kubo, 岸本 牧, C. John, 長谷川 登, 錦野 将元
  • Organizer: 16th International Conference on X-Ray Lasers (ICXRL 2018)
  • Int'l Joint Research
• [Presentation] Properties of a compact plasma-based x-ray laser at QST-KPSI (2018)
  • Author(s): Thanhhung Dinh, Noboru Hasegawa, Kiminori Kondo, Shinichi Namba, Masaharu Nishikino, Tetsuya Kawachi
  • Organizer: 16th International Conference on X-Ray Lasers (ICXRL 2018)
  • Int'l Joint Research
• [Presentation] Study of the laser ablation process of metals by using the soft x-ray laser (2018)
  • Author(s): 長谷川 登, 錦野 将元, 石野 雅彦, タンフン ヂン, 河内 哲哉, 南 康夫, 馬場 基芳, 末元 徹
  • Organizer: 16th International Conference on X-Ray Lasers (ICXRL 2018)
  • Int'l Joint Research
• [Presentation] Driver laser for high-brightness compact quantum beams at the QST-KPSI (2018)
  • Author(s): タンフン ヂン, 長谷川 登, 森 道昭, 近藤 公伯, 錦野 将元
  • Organizer: The 9th Asian Workshop on Generation and Application of Coherent XUV and X-ray Radiation
  • Int'l Joint Research
• [Presentation] Fully coherent plasma x-ray laser by injection of a parametrically amplified high-order harmonic beam (2018)
  • Author(s): S. Namba, D. T. Hung, 長谷川 登, 岸本 牧, 錦野 将元, J. Seres, C. Serrat
  • Organizer: 60th Annual Meeting of the APS Division of Plasma Physics
  • Int'l Joint Research
• [Presentation] Water window soft X-ray emission from Au plasmas generated with a picosecond laser pulse (2018)
  • Author(s): N. Kakunaka, C. John, 岸本 牧, Y. Matsumoto, 長谷川 登, 錦野 将元, T. Higashiguch, T. Ejima, A. Sunahara, F. Nakajima, T. Johzaki, T. Endo, S. Namba
  • Organizer: 2nd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)
  • Int'l Joint Research
• [Presentation] Anomalous enhancement of water window X-rays emitted from laser produced Au plasma under low-pressure nitrogen atmosphere (2018)
  • Author(s): S. Namba, 岸本 牧, C. John, N. Kakunaka, Y. Matsumoto, 長谷川 登, 錦野 将元, T. Higashiguchi, T. Ejima, A. Sunahara, T. Johzaki
  • Organizer: 2nd Asia-Pacific Conference on Plasma Physics (AAPPS-DPP2018)
  • Int'l Joint Research
• [Presentation] フェムト秒レーザーアブレーションの軟Ｘ線時間分解計測 (2018)
  • Author(s): 長谷川 登, 錦野 将元, 石野 雅彦, タンフン ヂン, 河内 哲哉, 南 康夫, 馬場 基芳, 末元 徹
  • Organizer: 第35回プラズマ・核融合学会
  • Invited
• [Presentation] Study of the laser ablation process of metals and dielectrics using the soft x-ray lasers in QST (2018)
  • Author(s): Noboru Hasegawa, Masaharu Nishikino, Thanhhung Dinh, Masahiko Ishino
  • Organizer: World Congress of Smart Materials 2018
  • Int'l Joint Research / Invited
• [Presentation] リチウム様アルミイオンにおける再結合型軟X線レーザーの発生 (2018)
  • Author(s): 難波愼一，久保暢明，佐藤祐太，長谷川登，岸本牧，錦野将元
  • Organizer: レーザー学会年会
• [Presentation] EUV-FEL リソグラフィに向けた SXFELと多層膜鏡とレジスト材料の相互作用に関する研究 (2018)
  • Author(s): 錦野将元
  • Organizer: EUV-FEL光源産業化研究会 第７回全体会議
  • Invited
• [Presentation] Observation of fs-laser spallative ablation by soft x-ray laser probe (2017)
  • Author(s): Masaharu Nishikino, Noboru Hasegawa, Takuro Tomita, Yasuo Minami, Takashi Eyama, Naoya Kakimoto, Rui Izutsu, Motoyoshi Baba, Tetsuya Kawachi, and Tohru Suemoto
  • Organizer: SPIE Photonics west: Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
  • Place of Presentation: San-fransisco(USA)
  • Year and Date: 2017-01-30
  • Int'l Joint Research / Invited
• [Presentation] Soft x-ray laser ablation of metals and dielectrics (2017)
  • Author(s): 石野 雅彦, Anatoly Y. Faenov（阪大）, Tatiana A. Pikuz（阪大）, 長谷川 登, 錦野 将元, 神門 正城, 兒玉 了祐（阪大）, 河内 哲哉
  • Organizer: SPIE Optics + Optoelectronics 2017
  • Int'l Joint Research
• [Presentation] パラメトリック増幅高調波を用いたフルコヒーレントプラズマX線レーザーの開発 (2017)
  • Author(s): 難波愼一，Dinh Thanh Hung, 長谷川登，岸本牧，錦野将元, Jozsef Seres, Carles Serrat
  • Organizer: Plasma2017
  • Int'l Joint Research
• [Presentation] EUV微細加工技術に向けたSXFELと物質・材料の相互作用に関する研究 (2017)
  • Author(s): 錦野将元
  • Organizer: 第２回EUV-FELワークショップ
  • Invited
• [Presentation] Observation of fs-laser spallative ablation by soft x-ray laser probe (2017)
  • Author(s): M. Nishikino, N. Hasegawa, N. Ohnishi, A. M. Ito, Y. Minami, N. A. Inogamov, V. Zakhovskii, A. Ya. Faenov, T. Suemoto, and T. Kawachi
  • Organizer: SPIE Photonic west, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII
  • Int'l Joint Research / Invited
• [Presentation] EUVレーザーによる多層膜反射鏡の照射損傷評価 (2016)
  • Author(s): 石野雅彦, 錦野将元, 市丸智, 畑山雅俊, 奥哲
  • Organizer: 光・量子ビーム科学合同シンポジウム（Opto2016）
  • Place of Presentation: 千里ライフサイエンスセンター（大阪府豊中市）
  • Year and Date: 2016-11-24
• [Presentation] 軟X線レーザープローブによるフェムト秒レーザーアブレーション初期過程の観測 (2016)
  • Author(s): 長谷川 登, 錦野 将元, 河内 哲哉, 末元 徹, 大西 直史, 伊藤 篤史, 南 康夫, 馬場 基芳, A. Y. Faenov, N. Inogamov
  • Organizer: 光・量子ビーム科学合同シンポジウム（Opto2016）
  • Place of Presentation: 千里ライフサイエンスセンター（大阪府豊中市）
  • Year and Date: 2016-11-24
• [Presentation] 超短パルス軟Ｘ線レーザープローブによるフェムト秒レーザーアブレーション初期過程の解明 (2016)
  • Author(s): 長谷川 登, 錦野 将元, 南康夫, 馬場基芳, 大西直史, 伊藤篤史, 河内 哲哉, 末元徹
  • Organizer: 第85回レーザ加工学会
  • Place of Presentation: 銀杏会館（大阪府吹田市）
  • Year and Date: 2016-06-10
  • Invited
• [Presentation] Study on Initial Process of fs Laser Ablation Dynamics by using Soft x-ray Laser Prob (2016)
  • Author(s): M.Nishikino, N. Hasegawa, T.Kawachi
  • Organizer: CLEO:2016
  • Place of Presentation: California(USA)
  • Year and Date: 2016-06-07
  • Int'l Joint Research / Invited
• [Presentation] Progress and Prospects of X-ray Laser Research in QST (2016)
  • Author(s): M. Nishikino, N. Hasegawa, M. Ishino, T. Imazono, A. Sasaki, K. Mikami, D. Thanh-Hung, T. Suemoto, S. Namba, A. Ya. Faenov, T. Pikuz, S. Ichimaru, M. Hatayama, and T. Kawachi
  • Organizer: International Conference on X-ray Lasers 2016
  • Place of Presentation: 奈良春日野国際フォーラム（奈良県奈良市）
  • Year and Date: 2016-05-26
  • Int'l Joint Research / Invited
• [Presentation] Analysis of Reflection Signal from EUV Multilayer Mirror for Irradiation Induced Damage Study (2016)
  • Author(s): M. Ishino, S. Ichimaru, M. Hatayama, N. Hasegawa, S. Oku, and M. Nishikino
  • Organizer: International Conference on X-ray Lasers 2016
  • Place of Presentation: 奈良春日野国際フォーラム（奈良県奈良市）
  • Year and Date: 2016-05-22
  • Int'l Joint Research
• [Presentation] The observation of transient thin film structures during the femto-second laser ablation process by using the soft x-ray laser probe (2016)
  • Author(s): Noboru Hasegawa, Masaharu Nishikino, Masahiko Ishino, Naofumi Ohnishi, Atsushi M. Ito, Yasuo Minami, Motoyoshi Baba, Anatoly.Y. Faenov, N. Inogamov, Tetsuya Kawachi, Tohru Suemoto
  • Organizer: International Conference on X-ray Lasers 2016
  • Place of Presentation: 奈良春日野国際フォーラム（奈良県奈良市）
  • Year and Date: 2016-05-22
  • Int'l Joint Research
• [Presentation] Damage on EUV multilayer optics caused by irradiation of focused pico-second soft x-ray laser pulses (2016)
  • Author(s): M. Ishino, S. Ichimaru, M. Nishikino, N. Hasegawa, M. Hatayama, T. Kawachi, and S. Oku
  • Organizer: International Conference on X-ray Optics, Detectors, Sources and their Applications 2016 (XOPT2016)
  • Place of Presentation: パシフィコ横浜（神奈川県横浜市）
  • Year and Date: 2016-05-18
  • Int'l Joint Research