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Low temperature synthesis of nitride thin films through a reaction between oxide gel films and molten salts

Research Project

Project/Area Number 17H03382
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionHokkaido University

Principal Investigator

TADANAGA Kiyoharu  北海道大学, 工学研究院, 教授 (90244657)

Co-Investigator(Kenkyū-buntansha) 三浦 章  北海道大学, 工学研究院, 准教授 (10603201)
Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥17,680,000 (Direct Cost: ¥13,600,000、Indirect Cost: ¥4,080,000)
Fiscal Year 2019: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2018: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2017: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
Keywords窒化物薄膜 / 酸窒化物薄膜 / 液相法 / 低温窒化 / ゲル膜 / 窒化物 / 酸窒化物 / 薄膜
Outline of Final Research Achievements

In this study, new processes to obtain thin films of metal nitrides or metal oxynitrides at rather mild conditions have been studied. Gel films prepared by the sol-gel process were reacted with a liquid phase of a low-temperature molten salt containing nitrogen, or heat-treated with various nitrogen-containing compounds.
Oxide gel films were heat-treated in an electric furnace, where urea was placed upstream, under a nitrogen flow. Cu3N or TaON thin films were obtained by this heat-treatment with copper oxide or tantalum oxide thin films prepared by a liquid phase process.

Academic Significance and Societal Importance of the Research Achievements

溶液法による膜形成と尿素を用いた窒化反応により、金属窒化物や酸窒化物薄膜を、様々な基板上に容易に形成できる手法を見出した。本手法では、金属窒化物薄膜および酸窒化物薄膜を得るために、容易に手に入る尿素粉末を窒素源として用いており、窒化反応において有毒なアンモニアガスを用いる必要がないことが大きな特徴である。
今回見出した手法を他の系に適用することが可能となれば、金属窒化物薄膜あるいは酸窒化物が容易に得られることから、窒化物薄膜あるいは酸窒化物薄膜の研究の大きく進展し、さらに、応用の拡大が期待できる。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (18 results)

All 2019 2018 2017

All Journal Article (2 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 2 results) Presentation (16 results) (of which Int'l Joint Research: 6 results,  Invited: 1 results)

  • [Journal Article] Self-Combustion Synthesis of Novel Metastable Ternary Molybdenum Nitrides2019

    • Author(s)
      Jin Odahara, Wenhao Sun, Akira Miura, Nataly Carolina Rosero-Navarro, Masanori Nagao, Isao Tanaka, Gerbrand Ceder, and Kiyoharu Tadanaga
    • Journal Title

      ACS Materials Letters

      Volume: 1 Issue: 1 Pages: 64-70

    • DOI

      10.1021/acsmaterialslett.9b00057

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Explosive Reaction for Barium Niobium Perovskite Oxynitride2017

    • Author(s)
      Odahara Jin、Miura Akira、Rosero-Navarro Nataly Carolina、Tadanaga Kiyoharu
    • Journal Title

      Inorganic Chemistry

      Volume: 57 Issue: 1 Pages: 24-27

    • DOI

      10.1021/acs.inorgchem.7b02660

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] Preparation of Cu3N thin films on glass substrate by nitridation of solution process-derived CuO thin film with urea2019

    • Author(s)
      Y. Ohigashi, A. Miura, N. Rosero Navarro, K. Tadanaga
    • Organizer
      25th International Congress on Glasses (ICG2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 液相法および尿素による窒化を用いたTaON薄膜の作製2019

    • Author(s)
      樋口亜門・三浦章・Nataly Carolina ROSERO NAVARO・鱒渕友治・忠永清治
    • Organizer
      日本化学会北海道支部2019年夏季研究発表会
    • Related Report
      2019 Annual Research Report
  • [Presentation] ナトリウムアミド融液を用いたスピネル型マンガン鉄酸窒化物の低温合成2019

    • Author(s)
      清藤太郎・三浦章・Nataly Carolina ROSERO NAVARO・忠永清治
    • Organizer
      日本化学会北海道支部2019年夏季研究発表会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Preparation of transition metal nitride and oxynitride thin films by nitridation of sol-gel derived oxide thin films with urea2019

    • Author(s)
      K. Tadanaga, Y. Ohigashi, A. Higuchi, N. C. Rosero Navarro and Akira Miura
    • Organizer
      The 20th International Sol-Gel Conference
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Synthesis of Binary and Ternary Nitrides by Self-Combustion Synthesis using NaNH22019

    • Author(s)
      A. Miura, J. Odahara, N.C. Rosero Navarro, M. Nagao, I. Tanaka, K. Tadanaga
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies(PACRIM13)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 液相法と尿素による窒化を用いたTaON薄膜の合成と評価2019

    • Author(s)
      樋口亜門・Nataly Carolina ROSERO-NAVARRO・三浦 章・鱒渕友治・忠永清治
    • Organizer
      令和元年度 日本セラミックス協会東北北海道支部研究発表会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Exploring Ternary Molybdenum Superconducting Nitrides by Self-Combustion Synthesis2019

    • Author(s)
      Akira MIURA, Jin ODAHARA, Nataly Carolina ROSERO-NAVARRO, Masanori NAGAO, Isao TANAKA, Kiyoharu TADANAGA
    • Organizer
      Materials Research Meeting 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 自己燃焼反応による新規マンガンモリブデン窒化物の合成2019

    • Author(s)
      三浦 章・小田原 仁・Nataly Carolina Rosero-Navarro・忠永 清治・長尾 雅則・田中 功
    • Organizer
      日本セラミックス協会2019年年会
    • Related Report
      2018 Annual Research Report
  • [Presentation] アミド溶液を介した酸化インジウム薄膜への窒素ドープ2018

    • Author(s)
      成瀬 雅浩・三浦 章・Rosero-Navarro Nataly Carolina・伊左治 忠之・前田 真一・藤本 修・忠永 清治
    • Organizer
      日本セラミックス協会第31回秋季シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] 尿素を用いた酸化銅薄膜の窒化とその反応機構2018

    • Author(s)
      大東侑生・三浦 章・Nataly Carolina Rosero-Navarro・忠永清治
    • Organizer
      2018年日本セラミックス協会東北北海道支部研究発表会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Explosive Synthesis of BaNbO2N2018

    • Author(s)
      Akira Miura, Nataly Carolina Rosero-Navarro, Kiyoharu Tadanaga
    • Organizer
      The 8th Advanced Functional Materials and Devices
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Synthesis of Nitrides and Oxynitrides using NaNH2 for Emerging New Functional Materials2018

    • Author(s)
      Akira Miura, Kiyoharu, Tadanaga
    • Organizer
      2018 International Conference of Young Researchers on Advanced Materials(ICYRAM2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 液相法で作製した酸化銅薄膜の尿素を用いた窒化2018

    • Author(s)
      大東侑生, 三浦章, Nataly Carolina ROSERO NAVARRO, 忠永清治
    • Organizer
      第 56 回セラミックス基礎科学討論会、講演要旨集p.215(2F18)(2018.1.11-12).
    • Related Report
      2017 Annual Research Report
  • [Presentation] ペロブスカイト型酸窒化物 BaTaO2N の爆発的反応合成2018

    • Author(s)
      小田原 仁・三浦 章・Nataly Carolina Rosero-Navarro・忠永 清治
    • Organizer
      日本セラミックス協会2018年年会、講演要旨集1K24(2018.3.15-17).
    • Related Report
      2017 Annual Research Report
  • [Presentation] NaNH2を用いたBaNbO2Nの合成2017

    • Author(s)
      小田原仁・三浦章・Nataly Carolina Rosero Navarro・忠永清治
    • Organizer
      平成29年度日本セラミックス協会東北北海道支部研究発表会、講演要旨集1P06(2017.11.1-2)
    • Related Report
      2017 Annual Research Report
  • [Presentation] 酸化インジウム薄膜の室温プラズマ窒化と電気特性2017

    • Author(s)
      成瀬雅浩・三浦章・Nataly Carolina Rosero Navarro・樋口幹雄・忠永清治
    • Organizer
      平成29年度日本セラミックス協会東北北海道支部研究発表会、講演要旨集1P07(2017.11.1-2)
    • Related Report
      2017 Annual Research Report

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Published: 2017-04-28   Modified: 2021-02-19  

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