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Development of AFM lithography for conductance measurements of single molecules

Research Project

Project/Area Number 19760019
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionTohoku University

Principal Investigator

AKIYAMA Kotone  Tohoku University, 原子分子材料科学高等研究機構, 助教 (60447175)

Project Period (FY) 2007 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥3,750,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥450,000)
Fiscal Year 2008: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2007: ¥1,800,000 (Direct Cost: ¥1,800,000)
Keywords走査プローブ顕微鏡
Research Abstract

原子間力顕微鏡(AFM)の探針先端から電界蒸発により原子を飛ばし試料表面にパターン描画するAFMリソグラフィー手法をより精度の高い手法として確立した。水晶振動子に取り付けた極細金属ワイヤーを集束イオンビームにより加工してAFM探針とし、非接触法によって探針・試料間距離制御を行うことにより、自然酸化膜付きのSi基板上に線幅20〜30nm程度の金属細線描画や金属ナノドットのパターン形成を行った。

Report

(3 results)
  • 2008 Annual Research Report   Final Research Report ( PDF )
  • 2007 Annual Research Report
  • Research Products

    (17 results)

All 2009 2008 2007

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (11 results)

  • [Journal Article] Nanoscale chemical imaging by scanning tunneling microscopy assisted by synchrotron radiation2009

    • Author(s)
      T. Okuda, T. Eguchi, Kotone Akiyama, A. Harasawa, T. Kinoshita, Y. Hasegawa, M. Kawamori, Y. Haruyama, S. Matsui
    • Journal Title

      Physical Review Letters 102

      Pages: 1055031-4

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Nanoscale chemical imaging by scanning tunneling microscopy assisted by synchrotron radiation2009

    • Author(s)
      T. Okuda, K. Akiyama, et.al.
    • Journal Title

      Physical Review Letters 102

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanoscale lithography with frequency-modulation atomic force microscopy2008

    • Author(s)
      M. Hamada, T. Eguchi, K. Akivama, Y. Hasegawa
    • Journal Title

      Review of Scientific Instruments 79

      Pages: 1237061-4

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Nanoscale lithography with frequency-modulation atomic force microscopy2008

    • Author(s)
      M. Hamada, K. Akiyama, et.al.
    • Journal Title

      Review of Scientific Instruments 79

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Functional probes for scanning probe microscopy2007

    • Author(s)
      Kotone Akiyama, T. Eguchi, T. An, Y. Fujikawa, T. Sakurai and Y. Hasegawa
    • Journal Title

      Journal of Physics : Conference Series 61

      Pages: 22-25

    • Related Report
      2008 Final Research Report
    • Peer Reviewed
  • [Journal Article] Functional probes for scanning probe microscopy2007

    • Author(s)
      Kotone Akiyama, et. al.
    • Journal Title

      Journal of Physics: Conference Series 61

      Pages: 22-25

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Nano-scale lithography with frequency modulation AFM2009

    • Author(s)
      Kotone Akiyama
    • Organizer
      Surface kinetics international conference
    • Place of Presentation
      Salt Lake City, USA
    • Year and Date
      2009-03-20
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] Mechanical and electrical measurements of nano-materials2009

    • Author(s)
      Kotone Akiyama
    • Organizer
      WPI-AIMR annual workshop
    • Place of Presentation
      Zao
    • Year and Date
      2009-03-04
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] Nano-scale lithography with frequency modulation atom is force microscopy2008

    • Author(s)
      Kotone Akiyama
    • Organizer
      16th international colloquium on scanning probe microscopy
    • Place of Presentation
      Ttagawa
    • Year and Date
      2008-12-11
    • Related Report
      2008 Final Research Report
  • [Presentation] Nano-scale lithography with frequency modulation atomic force microscopy2008

    • Author(s)
      Kotone Akiyama
    • Organizer
      16th international colloquium on scanning probemicroscopy
    • Place of Presentation
      Atagawa
    • Year and Date
      2008-12-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] Nano-scale lithography with frequency modulation atom is force microscopy2008

    • Author(s)
      Kotone Akiyama
    • Organizer
      ELyT Lab workshop
    • Place of Presentation
      Sendai
    • Year and Date
      2008-12-01
    • Related Report
      2008 Final Research Report
  • [Presentation] Nano-scale lithography with frequency modulation atomic force microscopy2008

    • Author(s)
      Kotone Akiyama
    • Organizer
      ELyT Lab workshop
    • Place of Presentation
      Sendai
    • Year and Date
      2008-12-01
    • Related Report
      2008 Annual Research Report
  • [Presentation] Nano-scale lithography with frequency-modulation atomic force microscopy2008

    • Author(s)
      Kotone Akiyama
    • Organizer
      International conference on nanoscience + technology 2008
    • Place of Presentation
      Keystone, USA
    • Year and Date
      2008-07-24
    • Related Report
      2008 Final Research Report
  • [Presentation] Nano-scale lithography with frequency-modulation atomic force microscopy2008

    • Author(s)
      Kotone Akiyama
    • Organizer
      International conference on nanoscience+technology 2008
    • Place of Presentation
      Keystone, USA
    • Year and Date
      2008-07-24
    • Related Report
      2008 Annual Research Report
  • [Presentation] 高精度AFMリソグラフィー手法の開発による単一分子の電気伝導測定2008

    • Author(s)
      秋山琴音
    • Organizer
      特定領域「ナノリンク分子の電気伝導」領域会議
    • Place of Presentation
      函館
    • Year and Date
      2008-07-04
    • Related Report
      2008 Annual Research Report 2008 Final Research Report
  • [Presentation] Development of nano-scale AFM lithography using a metal-tip cantilever2007

    • Author(s)
      Kotone Akiyama
    • Organizer
      IVC-17/ICSS-13 and ICN+T2007
    • Place of Presentation
      Stockholm
    • Year and Date
      2007-07-02
    • Related Report
      2008 Final Research Report
  • [Presentation] Development of nano-scale AFM lithography using a metal-tip cantilever2007

    • Author(s)
      Kotone Akiyama
    • Organizer
      IVC-17/ICSS-13 and ICN+T2007
    • Place of Presentation
      ストックホルム
    • Year and Date
      2007-07-02
    • Related Report
      2007 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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