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Monolithic integration of multi-wavelength light emitter By vapor-diffusion-dominated selective-area growth

Research Project

Project/Area Number 20686022
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionThe University of Tokyo

Principal Investigator

SUGIYAMA Masakazu  The University of Tokyo, 大学院・工学系研究科, 准教授 (90323534)

Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥25,480,000 (Direct Cost: ¥19,600,000、Indirect Cost: ¥5,880,000)
Fiscal Year 2010: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2009: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Fiscal Year 2008: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
KeywordsInGaN / MOVPE / 選択成長 / 多重量子井戸 / 発光ダイオード / 波長シフト / 有機金属気相成長 / GaN / 発光波長制御 / 多色集積
Research Abstract

Selective-area growth (SAG) of InGaN/GaN multiple quantum wells (MQWs), taking advantage of the vapor-phase diffusion of layer precursors with the use of wide (more than 100μm in width) masks, has been investigated in order to achieve in-plane modulation of light-emission wavelength. The mechanism behind such wavelength modulation has been explored through the analysis of the SAG of GaN, InN and InGaN bulk layers. Aiming at a wider range of wavelength modulation, a GaN hexagonal pyramid, with tailored mask width surrounding it, has been adopted and InGaN/GaN MQWs have been grown on the semi-polar surfaces on the pyramids. A multi-wavelength light emitter has been fabricated on the basis of this approach.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (37 results)

All 2011 2010 2009 2008 2007 Other

All Journal Article (13 results) (of which Peer Reviewed: 6 results) Presentation (19 results) Remarks (5 results)

  • [Journal Article] Continuous wavelength modulation of semi-polar plane InGaN/GaN MQWs based on vapor-phase-diffusion-based selective-area pyramidal growth2011

    • Author(s)
      Tatsuki Fujiwara, Yoshiaki Nakano, Masakazu Sugiyama
    • Journal Title

      Physica Status Solidi A vol.208, no.5

      Pages: 1203-1205

    • Related Report
      2010 Final Research Report
  • [Journal Article] Continuous wavelength modulation of semi-polar plane InGaN/GaN MQWs based on vapor-phase-diffusion-based selective-area pyramidal growth2011

    • Author(s)
      T.Fujiwara, Y.Nakano, M.Sugiyama
    • Journal Title

      Physica Status Solidi A

      Volume: 208 Pages: 1203-1205

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Continuous wavelength modulation of semi-polar plane InGaN/GaN MQ Ws based on vapor-phase-diffusion-based selective-area pyramidal growth2011

    • Author(s)
      T.Fujiwara, Y.Nakano, M.Sugiyama
    • Journal Title

      Physica Status Solidi A

      Volume: 208 Pages: 1203-1205

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Selectivity enhancement by hydrogen addition in selective area metal-organic vapor phase epitaxy of GaN and InGaN2010

    • Author(s)
      Tomonari Shioda, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki Nakano
    • Journal Title

      Physica Status Solidi (A) vol.207, no.6

      Pages: 1375-1378

    • Related Report
      2010 Final Research Report
  • [Journal Article] Monolithically integrated InGaN-based multicolor light-emitting diodes fabricated by wide-sripe selective area metal organic vapor phase epitaxy2010

    • Author(s)
      T.Shioda, M.Sugiyama, Y.Shimogaki, Y.Nakano
    • Journal Title

      Applied Physics Express

      Volume: 3

    • Related Report
      2010 Annual Research Report 2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Role of vapor-phase diffusion in selective-area MOVPE of InGaN/GaN MQWs2009

    • Author(s)
      Yuki Tomita, Tomonari Shioda, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki Nakano
    • Journal Title

      J.Crystal Growth 311

      Pages: 2813-2816

    • Related Report
      2010 Final Research Report
  • [Journal Article] Selective Area Metal-Organic Vapor Phase Epitaxy of Nitride Semiconductors for Multicolor Emission2009

    • Author(s)
      Tomonari Shioda, Yuki Tomita, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki Nakano
    • Journal Title

      J.Selected Topics in Quantum Electronics(Invited Paper) Vol.15, No.4

      Pages: 1053-1065

    • Related Report
      2010 Final Research Report
  • [Journal Article] Selective area metal-organic vapor-phase epitaxy of InN, GaN and InGaN covering whole composition range2009

    • Author(s)
      Tomonari Shioda, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki Nakano
    • Journal Title

      J.Crystal Growth 311

      Pages: 2809-2812

    • Related Report
      2010 Final Research Report
  • [Journal Article] Optical and Structural Characterization of InGaN/GaN Multiple Quantum Wells by Epitaxial Lateral Overgrowth2009

    • Author(s)
      Masakazu Sugiyama, Tomonari Shioda, Yuki Tomita, Takahisa Yamamoto, Yuichi Ikuhara, Yoshiaki Nakano
    • Journal Title

      Material Transactions Vol.50 No.5

      Pages: 1085-1090

    • NAID

      10024814790

    • Related Report
      2010 Final Research Report
  • [Journal Article] (Invited Paper) "Selective Area Metal-Organic Vapor Phase Epitaxy of Nitride Semiconductors for Multicolor Emission"2009

    • Author(s)
      T.Shioda, Y.Tomita, M.Sugiyama, Y.Shimogaki, Y.Nakano
    • Journal Title

      J.Selected Topics in Quantum Electronics 15

      Pages: 1053-1065

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Role of vapor-phase diffusion in selective-area MOVPE of InGaN/GaN MQWs2009

    • Author(s)
      Y.Tomita, T.Shioda, M.Sugiyama. Y.Shimogaki, Y.Nakano
    • Journal Title

      J.Crystal Growth 311

      Pages: 2813-2816

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Selective area metal-organic vapor-phase epitaxy of InN, GaN and InGa N covering whole composition range2009

    • Author(s)
      T.Shioda, M.Sugiyama, Y.Shimogaki, Y.Nakano
    • Journal Title

      J.Crystal Growth 311

      Pages: 2809-2812

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Monolithically integrated InGaN-based multicolor light-emitting diodes fabricated by wide-sripe selective area metal organic vapor phase epitaxy2007

    • Author(s)
      Tomonari Shioda, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki Nakano
    • Journal Title

      Applied Physics Express vol.3, no.9

    • Related Report
      2010 Final Research Report
  • [Presentation] Continuous wavelength modulation of semi-polar plane InGaN/GaN MQWs based on vapor- phase-diffusion-based selective-area pyramidal growth2010

    • Author(s)
      Tatsuki Fujiwara, Yoshiaki Nakano, Masakazu Sugiyama
    • Organizer
      International Symposium on Growth of Nitride (ISGN-3)
    • Place of Presentation
      Montpellier, France
    • Year and Date
      2010-07-05
    • Related Report
      2010 Final Research Report 2009 Annual Research Report
  • [Presentation] Continuous wavelength modulation of semi-polar plane InGaN/GaN MQWs based on vapor-phase-diffusion-based selective-area pyramidal growth2010

    • Author(s)
      T.Fujiwara, Y.Nakano, M.Sugiyama
    • Organizer
      International Symposium on Growth of Nitride (ISGN-3)
    • Place of Presentation
      Montpellier, France
    • Year and Date
      2010-07-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] Continuous wavelength modulation from semi-polar InGaN/GaN MQWs with vapor-phase-diffusion-based selective-area pyramidal growth2010

    • Author(s)
      Tatsuki Fujiwara, Yoshiaki Nakano, Masakazu Sugiyama
    • Organizer
      International Workshop on Nitride Semiconductors (IWN 2010)
    • Place of Presentation
      Tampa, Florida, U.S.A.
    • Related Report
      2010 Annual Research Report 2010 Final Research Report 2009 Annual Research Report
  • [Presentation] Monolithically integrated muti-color light emitting diode fabrication by wide-stripe selective area metal-organic vapor phase epitaxy2009

    • Author(s)
      Tomonari Shioda, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki Nakano:
    • Organizer
      Abstract Book, 8th International Conference on Nitride Semiconductors (ICNS-8), ThP97, pp. 1273-1274
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2009-10-22
    • Related Report
      2010 Final Research Report
  • [Presentation] Examination of intermediate species in GaN MOVPE by selective-area growth2009

    • Author(s)
      Masakazu Sugiyama, Satoshi Yasukochi, Tomonari Shioda, Yukihiro Shimogaki, Yoshiaki Nakano
    • Organizer
      Abstract Book, 8th International Conference on Nitride Semiconductors (ICNS-8), TP41, pp. 630-631
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2009-10-20
    • Related Report
      2010 Final Research Report
  • [Presentation] InGaN/GaN選択MOVPEによる可視光発光波長シフトのメカニズム2009

    • Author(s)
      杉山正和, 塩田倫也, 富田祐貴, 霜垣幸浩, 中野義昭
    • Organizer
      化学工学会第41回秋季大会研究発表講演要旨集,A104
    • Place of Presentation
      広島大学
    • Year and Date
      2009-09-16
    • Related Report
      2010 Final Research Report
  • [Presentation] マルチスケール解析によるGaN MOVPE反応メカニズムの検討2009

    • Author(s)
      杉山正和, 安河内諭, 塩田倫也, 霜垣幸浩, 中野義昭
    • Organizer
      化学工学会第41回秋季大会研究発表講演要旨集,A121
    • Place of Presentation
      広島大学
    • Year and Date
      2009-09-16
    • Related Report
      2010 Final Research Report
  • [Presentation] 広幅マスク選択MOVPEによるInGaN量子井戸発光波長シフトのメカニズムと長波長化2009

    • Author(s)
      杉山正和, 富田祐貴, 塩田倫也, 霜垣幸浩, 中野義昭
    • Organizer
      第1回窒化物半導体結晶成長講演会, FRI_05
    • Place of Presentation
      東京農工大学
    • Year and Date
      2009-05-15
    • Related Report
      2010 Final Research Report
  • [Presentation] マルチスケール製膜速度分布を用いたGaN MOVPE反応機構の解析2009

    • Author(s)
      杉山正和, 安河内諭, 塩田倫也, 霜垣幸浩, 中野義昭
    • Organizer
      第1回窒化物半導体結晶成長講演会,FRI05
    • Place of Presentation
      東京農工大学
    • Year and Date
      2009-05-15
    • Related Report
      2010 Final Research Report
  • [Presentation] 広幅マスク選択MOVPEによるInGaN量子井戸発光波長シフトのメカニズムと長波長化2009

    • Author(s)
      杉山正和, 富田祐貴, 塩田倫也, 霜垣幸浩, 中野義昭
    • Organizer
      日本結晶成長学会ナノエピ分科会講演会
    • Place of Presentation
      東京農工大学
    • Year and Date
      2009-05-15
    • Related Report
      2008 Annual Research Report
  • [Presentation] マルチスケールの成長速度分布を用いたGaN MOVPE反応メカニズムの考察(Discussion on the reaction mechanism of GaN MOVPE using2009

    • Author(s)
      安河内諭, 塩田倫也, 杉山正和, 霜垣幸浩, 中野義昭
    • Organizer
      第56回応用物理学関係連合講演会講演予稿集,No. 1, p. 397, 31a-ZJ-18
    • Related Report
      2010 Final Research Report
  • [Presentation] InGaNのMOVPE選択成長における水素添加の効果(Effects of hydrogen addition in selective area metal-organic vapor phase epitaxy of InGaN)2009

    • Author(s)
      塩田倫也, 富田祐貴, 杉山正和, 霜垣幸浩, 中野義昭
    • Organizer
      第56回応用物理学関係連合講演会講演予稿集,No. 1, p. 403, 31p-ZJ-3
    • Related Report
      2010 Final Research Report
  • [Presentation] 選択MOVPEにおけるInGaN量子井戸発光波長シフトに対する井戸厚の効果(Well thickness effect in luminescence wavelength from InGaN quantum wells in selective-area MOVPE)2009

    • Author(s)
      富田祐貴, 塩田倫也, 霜垣幸浩, 中野義昭, 杉山正和
    • Organizer
      第56回応用物理学関係連合講演会講演予稿集,No. 1, p. 403, 31p-ZJ-4
    • Related Report
      2010 Final Research Report
  • [Presentation] Role of vapor-phase diffusion in selective-area MOVPE of InGaN/GaN MQWs2008

    • Author(s)
      Yuki Tomita, Tomonari Shioda, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki Nakano
    • Organizer
      International Symposium on Growth of Nitride (ISGN-2)
    • Place of Presentation
      Shuzenji, Japan
    • Related Report
      2010 Final Research Report
  • [Presentation] Selective area metal-organic vapor-phase epitaxy of InN, GaN and InGaN covering whole composition range2008

    • Author(s)
      Tomonari Shioda, Masakazu Sugiyama, Yukihiro Shimogaki, Yoshiaki Nakano
    • Organizer
      International Symposium on Growth of Nitride (ISGN-2)
    • Place of Presentation
      Shuzenji, Japan
    • Related Report
      2010 Final Research Report
  • [Presentation] MOVPE選択成長InGaNの気相拡散モデルによる解析(Vapor phase diffusion model analysis on InGaN grown by selective area metal-organic vapor phase epitaxy)2008

    • Author(s)
      塩田倫也, 杉山正和, 霜垣幸浩, 中野義昭
    • Organizer
      第69回応用物理学会学術講演会講演予稿集,No. 1, p. 330, 4p-CG-17
    • Related Report
      2010 Final Research Report
  • [Presentation] 選択MOVPEにおけるInGaN量子井戸発光波長シフトの起源(Origin of shift in luminescence wavelength from InGaN quantum wells in selective-area MOVPE)2008

    • Author(s)
      富田祐貴, 塩田倫也, 杉山正和, 霜垣幸浩, 中野義昭
    • Organizer
      第69回応用物理学会学術講演会講演予稿集,No. 1, p. 330, 4p-CG-18
    • Related Report
      2010 Final Research Report
  • [Presentation] 選択成長InGaN量子井戸における気相拡散の効果2008

    • Author(s)
      富田祐貴, 塩田倫也, 杉山正和, 霜垣幸浩, 中野義昭
    • Organizer
      化学工学会第40回秋季大会,T306
    • Related Report
      2010 Final Research Report
  • [Presentation] MOVPE選択成長におけるInN成長速度分布の解析2008

    • Author(s)
      塩田倫也, 杉山正和, 霜垣幸浩, 中野義昭
    • Organizer
      化学工学会第40回秋季大会,T307
    • Related Report
      2010 Final Research Report
  • [Remarks] 日経産業新聞2010年12月7日p.10「多色LED1基板に東大3色同時に道」

    • Related Report
      2010 Final Research Report
  • [Remarks] 日本経済新聞Webサイト「ケミカルブティック」

    • URL

      http://snow.nikkeivi.co.jp/chemical-boutique/html110124/

    • Related Report
      2010 Final Research Report
  • [Remarks] 日経産業新聞2010年12月7日p.10「多色LED 1基板に東大3色同時に道」

    • Related Report
      2010 Annual Research Report
  • [Remarks] 日本経済新聞Webサイト「ケミカルブティック」

    • URL

      http://snow.nikkeivi.co.jp/chemical-boutique/html110124/

    • Related Report
      2010 Annual Research Report
  • [Remarks] 日経産業新聞2010年12月7日p.10「多色LED1基板に 東大3色同時に道」日本経済新聞Webサイト「ケミカルブティック」

    • URL

      http://snow.nikkeivi.co.jp/chemical-boutique/html110124/

    • Related Report
      2009 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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