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Role of nano particles in conductive metal/polymer composite for interconnect of 3D-LSI

Research Project

Project/Area Number 24550218
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Functional materials/Devices
Research InstitutionNational Institute for Materials Science

Principal Investigator

KAWAKITA Jin  独立行政法人物質・材料研究機構, ナノエレクトロニクス材料ユニット, MANA研究者 (50296745)

Research Collaborator HASHIMOTO Yasuo  
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2012: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Keywords導電機能素子
Outline of Final Research Achievements

This study is related to the vertical and narrow interconnect technology of the advanced 3-dimensional LSI. We have found metal / conductive polymer composites synthesized in the solution using the photo assist effect and it might form the conductive interconnect ten times faster than the conventional techniques. A technological issue is to establish the material principles for further decrease in resistance of the composite and in this study, we clarified the relationship between the presence state of the metal (content, size, shape) of the composite and its electric conductivity. This research output has a scientific features that suggested a new composite rule for conducting metal and polymer by utilizing the metal nanoparticles, and contributes greatly to improvement in the productivity of the 3D-LSI by reducing time to form the interconnect from some hours as the current status to a few minutes.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Research Products

    (60 results)

All 2015 2014 2013 2012 Other

All Journal Article (14 results) (of which Peer Reviewed: 11 results,  Acknowledgement Compliant: 3 results) Presentation (36 results) (of which Invited: 6 results) Book (1 results) Remarks (3 results) Patent(Industrial Property Rights) (6 results) (of which Overseas: 2 results)

  • [Journal Article] Conductive polymer/metal composites for interconnect of flexible devices2015

    • Author(s)
      Jin Kawakita, Yasuo Hashimoto Shinoda, Takanori Shuto, and Toyohiro Chikyow
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Issue: 6S1 Pages: 06FJ12-06FJ12

    • DOI

      10.7567/jjap.54.06fj12

    • NAID

      210000145271

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] プラスチックと密着するインターコネクトの高速形成技術2015

    • Author(s)
      川喜多仁
    • Journal Title

      プラスチックス・エージ

      Volume: 61 Pages: 45-49

    • Related Report
      2014 Annual Research Report
  • [Journal Article] ~曲げに強い配線材料へ~導電性ポリマーと金属ナノ粒子の複合化技術2015

    • Author(s)
      川喜多 仁
    • Journal Title

      MATERIAL STAGE

      Volume: 15 Pages: 49-50

    • Related Report
      2014 Annual Research Report
  • [Journal Article] Through silicon via filling methods with metal/polymer composite for three-dimensional LSI2014

    • Author(s)
      B. Horvath, J. Kawakita, T. Chikyow
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 53 Issue: 6S Pages: 06JH01-06JH01

    • DOI

      10.7567/jjap.53.06jh01

    • NAID

      210000155738

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Diffusion barrier and adhesion properties of SiOxNy and SiOx layers between Ag/polypyrrole composites and Si substrates2014

    • Author(s)
      B. Horvath, J. Kawakita, T. Chikyow
    • Journal Title

      ACS Appl. Mater. Interfaces

      Volume: 6 Issue: 12 Pages: 9201-9206

    • DOI

      10.1021/am501305b

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] フレキシブルエレクトロニクス用インターコネクトの高速形成技術2014

    • Author(s)
      川喜多仁
    • Journal Title

      コンバーテック

      Volume: 42 Pages: 40-43

    • Related Report
      2014 Annual Research Report
  • [Journal Article] TSV filling methods with metal/polymer composite for 3D-LSI2014

    • Author(s)
      Barbara Horvath, Jin Kawakita and Toyohiro Chikyow
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: NA

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Strong Adhesion of Silver/Polypyrrole Composite onto Plastic Substrates toward Flexible Electronics2013

    • Author(s)
      Jin Kawakita, Yasuo Hashimoto and Toyohiro Chikyow
    • Journal Title

      Japan. J. Appl. Phys.

      Volume: 52 Issue: 6S Pages: 06GG12-06GG12

    • DOI

      10.7567/jjap.52.06gg12

    • NAID

      210000142378

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Photo-electrochemical deposition behaviour of metal silver on polypyrrole as conducting polymer2013

    • Author(s)
      Jin Kawakita, Hiroshi Fujihira, Toyohiro Chikyow and Y. Sakamoto
    • Journal Title

      ECS Transactions

      Volume: 50 Issue: 53 Pages: 25-33

    • DOI

      10.1149/05053.0025ecst

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] 導電性ポリマー・金属複合材料の分散溶液を用いたTSVの高速充填2013

    • Author(s)
      川喜多仁,バーバラ ホルバス,知京豊裕
    • Journal Title

      JOURNAL OF THE SURFACE FINISHING SOCIETY OF JAPAN

      Volume: 64 Pages: 685-686

    • NAID

      130004704932

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] 金属シェルで覆われた有機ポリマーのプラスチック基材に対する密着2013

    • Author(s)
      橋本 康男、川喜多 仁、知京 豊裕、坂本 幸弘
    • Journal Title

      表面技術

      Volume: 2 Pages: 146-147

    • NAID

      10031148127

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Strong Adhesion of Silver/Polypyrrole Composite onto Plastic Substrates toward Flexible Electronics2013

    • Author(s)
      Jin Kawakita, Yasuo Hashimoto, and Toyohiro Chikyow
    • Journal Title

      Japan. J. Appl. Phys.

      Volume: NA

    • NAID

      210000142378

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Photo-electrochemical deposition behaviour of metal silver on polypyrrole as conducting polymer2013

    • Author(s)
      Jin Kawakita, Hiroshi Fujihira, Toyohiro Chikyow, and Y. Sakamoto
    • Journal Title

      ECS Transactions

      Volume: NA

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fast Formation of Conductive Material by Simultaneous Chemical Process for Infilling Through-Silicon Via2012

    • Author(s)
      Jin Kawakita and Toyohiro Chikyow
    • Journal Title

      Japan. J. Appl. Phys.

      Volume: 51 Issue: 6S Pages: 06FG11-06FG11

    • DOI

      10.1143/jjap.51.06fg11

    • NAID

      210000140792

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] 光化学反応による導電性ポリマー/金属コンポジットの生成に及ぼすアニオンの影響2015

    • Author(s)
      川喜多仁, Jelmer M. Boter, 知京豊裕
    • Organizer
      電気化学会第82回大会
    • Place of Presentation
      横浜
    • Year and Date
      2015-03-15 – 2015-03-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] 細孔への溶液浸透現象を利用した導電配線の高速形成2015

    • Author(s)
      川喜多仁, 知京豊裕
    • Organizer
      表面技術協会第131回講演大会
    • Place of Presentation
      横浜
    • Year and Date
      2015-03-04 – 2015-03-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Conducting polymer/metal composite for interconnect of advanced electronics2014

    • Author(s)
      J. Kawakita
    • Organizer
      EMNT2014
    • Place of Presentation
      つくば
    • Year and Date
      2014-11-05 – 2014-11-08
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Conductive polymer/metal composites for vertical interconnect of 3D-LSI2014

    • Author(s)
      Kento Fujii, Jin Kawakita, Yukihiro Sakamoto, Toyohiro Chikyow
    • Organizer
      EMNT2014
    • Place of Presentation
      Okinawa
    • Year and Date
      2014-11-05 – 2014-11-08
    • Related Report
      2014 Annual Research Report
  • [Presentation] Conductive polymer/metal composites for interconnect of flexible devices2014

    • Author(s)
      J. Kawakita, D. Gerlach, Y. Hashimoto, B. Horvath, T. Shutoh, T. Chikyo
    • Organizer
      27th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      福岡
    • Year and Date
      2014-11-04 – 2014-11-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] 微細配線の高速形成に向けた導電性ポリマー/金属コンポジットの光化学析出2014

    • Author(s)
      川喜多仁, 知京豊裕
    • Organizer
      2014年電気化学秋季大会
    • Place of Presentation
      京都
    • Year and Date
      2014-09-27 – 2014-09-28
    • Related Report
      2014 Annual Research Report
  • [Presentation] 導電性ポリマー/金属複合材料の垂直ビアへの埋込と電 気特性の評価2014

    • Author(s)
      藤井健人,川喜多仁,知京豊裕,坂本幸弘
    • Organizer
      表面技術協会第130回講演大会
    • Place of Presentation
      京都
    • Year and Date
      2014-09-22 – 2014-09-23
    • Related Report
      2014 Annual Research Report
  • [Presentation] Metal/polymer composite for filling of TSV2014

    • Author(s)
      J. Kawakita
    • Organizer
      The 1st Japan-France Workshop on Heterogeneous integration and its application by three dimensional structures
    • Place of Presentation
      東京
    • Year and Date
      2014-06-09
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] UV光を用いた銀微粒子の還元析出の加速2014

    • Author(s)
      川喜多仁,Shova Neupane,Amar Yadav,知京豊裕
    • Organizer
      電気化学会第81回大会
    • Place of Presentation
      関西大学千里山キャンパス,大阪府吹田市
    • Related Report
      2013 Research-status Report
  • [Presentation] TSV の高速形成に向けた有機系導電インクの注入手法2014

    • Author(s)
      川喜多 仁
    • Organizer
      シリコン材料・デバイス研究会(SDM)、シリコンテクノロジー分科会
    • Place of Presentation
      機械振興会館,東京都
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Interface examination of conductive polymer/metal composite in through-silicon vias for 3D-LSI2014

    • Author(s)
      Barbara Horvath, Jin Kawakita and Toyohiro Chikyow
    • Organizer
      ICONN2014
    • Place of Presentation
      Adelaide Convention Centre,Adelaide,Australia
    • Related Report
      2013 Research-status Report
  • [Presentation] Conducting polymer/metal composite toward advanced electronics2013

    • Author(s)
      Jin Kawakita
    • Organizer
      Russian Scientific-Technical Conference <Flexible Electronics>
    • Place of Presentation
      Saint Petersburg Electrotechnical University
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] Organic materials for advanced electronics2013

    • Author(s)
      Jin Kawakita
    • Organizer
      16th Scientific Young School
    • Place of Presentation
      Saint Petersburg Electrotechnical University
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] エレクトロニクスと化学2013

    • Author(s)
      川喜多 仁
    • Organizer
      スーパーサイエンスハイスクール 探究I・科学技術講演会
    • Place of Presentation
      山梨県立日川高等学校
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] 微細化半導体用電極としての導電性ポリマーのオーミック特性評価2013

    • Author(s)
      川喜多仁,藤川祐樹,知京豊裕
    • Organizer
      2013年電気化学秋季大会
    • Place of Presentation
      東京工業大学大岡山キャンパス,東京都
    • Related Report
      2013 Research-status Report
  • [Presentation] Via filling methods with Metal/Polymer Composite for 3D-LSI2013

    • Author(s)
      Barbara Horvath, Jin Kawakita and Toyohiro Chikyow
    • Organizer
      26th Microprocesses and Nanotechnology conference
    • Place of Presentation
      Royton,Sapporo,日本(Japan)
    • Related Report
      2013 Research-status Report
  • [Presentation] Fast Infilling with Metal/Polymer Composite to Via Hole for 3D-LSI2013

    • Author(s)
      Barbara Horvath, Jin Kawakita and Toyohiro Chikyow
    • Organizer
      NIMS conference
    • Place of Presentation
      Tsukuba International Congress Center,Tsukuba,日本(Japan)
    • Related Report
      2013 Research-status Report
  • [Presentation] Applying Silver/Polypyrrole Composite on Plastic Substrates for Flexible Electronics2013

    • Author(s)
      Barbara Horvath, Jin Kawakita, Yasuo Hashimoto and Toyohiro Chikyow
    • Organizer
      INC 9 Conference
    • Place of Presentation
      SpreePalais,Berlin,Germany
    • Related Report
      2013 Research-status Report
  • [Presentation] フレキシブルエレクトロニクス用の導電配線に向けた導電性/金属複合材料の導電特性2013

    • Author(s)
      藤井健人,川喜多仁,知京豊裕,坂本幸弘
    • Organizer
      表面技術協会第128回講演大会
    • Place of Presentation
      福岡工業大学,福岡市
    • Related Report
      2013 Research-status Report
  • [Presentation] フレキシブルエレクトロニクス用微細配線に向けた常温形成型導電性ポリマー/金属複合材料のプラスチック基材に対する密着2013

    • Author(s)
      Kento Fujii, Jin Kawakita, Toyohiro Chikyow and Y. Sakamoto
    • Organizer
      NIMS Conference 2013
    • Place of Presentation
      つくば国際会議場,つくば市
    • Related Report
      2013 Research-status Report
  • [Presentation] フレキシブルエレクトロニクス用微細配線に向けた常温形成型導電性ポリマー2013

    • Author(s)
      橋本 康男、川喜多 仁、知京 豊裕、坂本 幸弘
    • Organizer
      表面技術協会 第127回講演大会
    • Place of Presentation
      大宮
    • Related Report
      2012 Research-status Report
  • [Presentation] 光照射下における導電性ポリマー表面への金属析出の速度と形態の関係2013

    • Author(s)
      藤平 浩史、川喜多 仁、知京 豊裕、坂本 幸弘
    • Organizer
      表面技術協会 第127回講演大会
    • Place of Presentation
      大宮
    • Related Report
      2012 Research-status Report
  • [Presentation] フレキシブルエレクトロニクスに向けた金 属/導電性ポリマー複合材料を用いた微細配 線の形成2013

    • Author(s)
      川喜多 仁、橋本 康男、知京 豊裕
    • Organizer
      電気化学会第80回大会
    • Place of Presentation
      仙台
    • Related Report
      2012 Research-status Report
  • [Presentation] 金属シェル構造を有する有機ポリマーの形成反応に及ぼす光/熱の影響2012

    • Author(s)
      橋本 康男、川喜多 仁、知京 豊裕、坂本 幸弘
    • Organizer
      日本材料科学会平成24年度講演大会
    • Place of Presentation
      東京
    • Related Report
      2012 Research-status Report
  • [Presentation] Influence of light on deposition process of silver on conductive polymer2012

    • Author(s)
      Hiroshi Fujihira, Jin Kawakita, Toyohiro Chikyow, and Y. Sakamoto
    • Organizer
      The Eighth International Nanotechnology Conferenc
    • Place of Presentation
      Tsukuba, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Effect of light/heat on fast formation reaction of highly-conductive polymer with metal shell structure2012

    • Author(s)
      Yasuo Hashimoto, Jin Kawakita, Toyohiro Chikyow and Yukihiro Sakamoto
    • Organizer
      INC8
    • Place of Presentation
      Tsukuba, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Effect of light/heat on fast formation reaction of highly-conductive polymer with metal shell structure2012

    • Author(s)
      Yasuo Hashimoto, Jin Kawakita, Toyohiro Chikyow and Yukihiro Sakamoto
    • Organizer
      PRIME 2012
    • Place of Presentation
      Hawaii, USA
    • Related Report
      2012 Research-status Report
  • [Presentation] 導電性ポリマー表面上での金属ナノ粒子の析出反応速度の光依存性2012

    • Author(s)
      藤平 浩史、川喜多 仁、知京 豊裕、坂本 幸弘
    • Organizer
      日本材料科学会平成24年度講演大会
    • Place of Presentation
      東京
    • Related Report
      2012 Research-status Report
  • [Presentation] 金属シェルの光析出過程に及ぼす導電性ポリマーコア中のドーパントの影響 / 金属シェルの光析出過程に及ぼす導電性ポリマーコア中のドーパントの影響2012

    • Author(s)
      藤平 浩史、川喜多 仁、知京 豊裕、坂本 幸弘
    • Organizer
      第19回材料科学若手研究者討論会
    • Place of Presentation
      横浜
    • Related Report
      2012 Research-status Report
  • [Presentation] 導電性ポリマー表面上での金属シェルの形成速度 / 導電性ポリマー表面上での金属シェルの形成速度2012

    • Author(s)
      藤平 浩史、川喜多 仁、知京 豊裕、坂本 幸弘
    • Organizer
      連携ラボ第8回公開シンポジウム
    • Place of Presentation
      つくば
    • Related Report
      2012 Research-status Report
  • [Presentation] 金属シェルで覆われた有機ポリマーの構造制御 / 金属シェルで覆われた有機ポリマーの構造制御2012

    • Author(s)
      橋本 康男、川喜多 仁、知京 豊裕、坂本 幸弘
    • Organizer
      連携ラボ第8回公開シンポジウム
    • Place of Presentation
      つくば
    • Related Report
      2012 Research-status Report
  • [Presentation] Photo-electrochemical deposition behaviour of metal silver on polypyrrole as conducting polymer2012

    • Author(s)
      Hiroshi Fujihira, Jin Kawakita, Toyohiro Chikyow, and Y. Sakamoto
    • Organizer
      PACIFIC RIM MEETING ON ELECTROCHEMICAL AND SOLID-STATE SCIENCE
    • Place of Presentation
      Hawaii, USA
    • Related Report
      2012 Research-status Report
  • [Presentation] Strong adhesion of metal-encrusted polymer onto plastic substrates2012

    • Author(s)
      Jin Kawakita, Yasuo Hashimoto and Toyohiro Chikyow
    • Organizer
      25th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kobe, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Fast forming and highly conducting metal-encrusted polymer for electric wiring of advanced electronics devices2012

    • Author(s)
      Jin Kawakita and Toyohiro Chikyow
    • Organizer
      8th International Nanotechnology Conference (INC8)
    • Place of Presentation
      Tsukuba, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Photo-induced action upon fast chemical formation of highly conductive polymer with metal shell structure2012

    • Author(s)
      Jin Kawakita and Toyohiro Chikyow
    • Organizer
      IUMRS-ICEM 2012
    • Place of Presentation
      Yokohama, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] 金属シェルを有する高導電性ポリマー2012

    • Author(s)
      川喜多 仁、知京 豊裕
    • Organizer
      アカデミックプラザ2012
    • Place of Presentation
      東京
    • Related Report
      2012 Research-status Report
  • [Book] 導電性ポリマー材の高機能化と用途開発最前線2014

    • Author(s)
      川喜多 仁他(執筆者計42名)
    • Total Pages
      286
    • Publisher
      株式会社エヌ・ティーエス
    • Related Report
      2014 Annual Research Report
  • [Remarks] http://samurai.nims.go.jp/KAWAKITA_Jin-j.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] NIMS研究者総覧

    • URL

      http://samurai.nims.go.jp/KAWAKITA_Jin-j.html

    • Related Report
      2013 Research-status Report
  • [Remarks] 研究者総覧

    • URL

      http://samurai.nims.go.jp/KAWAKITA_Jin-j.html

    • Related Report
      2012 Research-status Report
  • [Patent(Industrial Property Rights)] 銀拡散障壁材料、銀拡散障壁、銀拡散障壁被覆2014

    • Inventor(s)
      川喜多仁/バーバラホルバス/知京豊裕
    • Industrial Property Rights Holder
      川喜多仁/バーバラホルバス/知京豊裕
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-102210
    • Filing Date
      2014-05-16
    • Related Report
      2014 Annual Research Report
  • [Patent(Industrial Property Rights)] 導電性ポリマー-金属複合体薄膜塗付用分散液、その製造方法及びその塗布方法、 導電性ポリマー-金属複合体と基材との付着体及びその形成方法、並びに穴を導電性材料で充填する方法2013

    • Inventor(s)
      川喜多仁/知京豊裕/橋本康男/バーバラホルバス
    • Industrial Property Rights Holder
      川喜多仁/知京豊裕/橋本康男/バーバラホルバス
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-100815
    • Filing Date
      2013-05-13
    • Related Report
      2013 Research-status Report
  • [Patent(Industrial Property Rights)] 導電性ポリマー-金属複合体薄膜塗付用分散液、その製造方法及びその塗布方法、 導電性ポリマー-金属複合体と基材との付着体及びその形成方法、並びに穴を導電性材料で充填する方法2013

    • Inventor(s)
      川喜多仁/知京豊裕/橋本康男/バーバラホルバス
    • Industrial Property Rights Holder
      川喜多仁/知京豊裕/橋本康男/バーバラホルバス
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-10-21
    • Related Report
      2013 Research-status Report
    • Overseas
  • [Patent(Industrial Property Rights)] 導電性ポリマー-金属複合体と基材との付着体及びその形成方法2013

    • Inventor(s)
      川喜多仁/知京豊裕/橋本康男
    • Industrial Property Rights Holder
      物質・材料研究機構
    • Industrial Property Rights Type
      特許
    • Filing Date
      2013-02-13
    • Related Report
      2012 Research-status Report
  • [Patent(Industrial Property Rights)] 導電性ポリマー-金属複合体の析出方法及び導電性ポリマー-金属複合体2012

    • Inventor(s)
      川喜多 仁、知京 豊裕
    • Industrial Property Rights Holder
      物質・材料研究機構
    • Industrial Property Rights Type
      特許
    • Filing Date
      2012-07-29
    • Related Report
      2012 Research-status Report
    • Overseas
  • [Patent(Industrial Property Rights)] 導電性ポリマー-金属複合体薄膜塗付用分散液及びその製造方法、並びにその塗布方法2012

    • Inventor(s)
      川喜多仁/知京豊裕/橋本康男
    • Industrial Property Rights Holder
      物質・材料研究機構
    • Industrial Property Rights Type
      特許
    • Filing Date
      2012-10-24
    • Related Report
      2012 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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