Role of nano particles in conductive metal/polymer composite for interconnect of 3D-LSI
| Project/Area Number |
24550218
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Functional materials/Devices
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| Research Institution | National Institute for Materials Science |
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Principal Investigator |
KAWAKITA Jin 独立行政法人物質・材料研究機構, ナノエレクトロニクス材料ユニット, MANA研究者 (50296745)
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| Research Collaborator |
HASHIMOTO Yasuo
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| Project Period (FY) |
2012-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2012: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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| Keywords | 導電機能素子 |
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| Outline of Final Research Achievements |
This study is related to the vertical and narrow interconnect technology of the advanced 3-dimensional LSI. We have found metal / conductive polymer composites synthesized in the solution using the photo assist effect and it might form the conductive interconnect ten times faster than the conventional techniques. A technological issue is to establish the material principles for further decrease in resistance of the composite and in this study, we clarified the relationship between the presence state of the metal (content, size, shape) of the composite and its electric conductivity. This research output has a scientific features that suggested a new composite rule for conducting metal and polymer by utilizing the metal nanoparticles, and contributes greatly to improvement in the productivity of the 3D-LSI by reducing time to form the interconnect from some hours as the current status to a few minutes.
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Report
(4 results)
Research Products
(60 results)
