| Budget Amount *help |
¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2012: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
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| Outline of Final Research Achievements |
This study is related to the vertical and narrow interconnect technology of the advanced 3-dimensional LSI. We have found metal / conductive polymer composites synthesized in the solution using the photo assist effect and it might form the conductive interconnect ten times faster than the conventional techniques. A technological issue is to establish the material principles for further decrease in resistance of the composite and in this study, we clarified the relationship between the presence state of the metal (content, size, shape) of the composite and its electric conductivity. This research output has a scientific features that suggested a new composite rule for conducting metal and polymer by utilizing the metal nanoparticles, and contributes greatly to improvement in the productivity of the 3D-LSI by reducing time to form the interconnect from some hours as the current status to a few minutes.
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