A study on non-power MEMS wake up module
| Project/Area Number |
25420324
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | The University of Electro-Communications |
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Principal Investigator |
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2014: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2013: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
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| Keywords | 電子デバイス / 電子機器 / ＭＥＭＳ / ウエイクアップモジュール / MEMS |
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| Outline of Final Research Achievements |
We have investigated non power wake up module which utilizes a high Q MEMS resonator. Design, fabrication, measurement, and simulation methods of electric static MEMS resonator have been investigated. It is shown that electric static MEMS resonator cannot store energy to achieve a wake up module. Piezo type MEMS resonator is found to be a resonator which can store enough energy to achieve a wake up module, if the resonator has enough volume.
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Report
(4 results)
Research Products
(1 results)
