Lead-free piezoelectric thick films deposited by ultrasonic assisted hydrothermal method for miniaturized actuator

• Project/Area Number: 26289059
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: The University of Tokyo
• Principal Investigator: MORITA Takeshi 東京大学, 新領域創成科学研究科, 准教授 (60344735)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥14,040,000 (Direct Cost: ¥10,800,000、Indirect Cost: ¥3,240,000); Fiscal Year 2016: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2015: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2014: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
• Keywords: 水熱合成法 / 超音波アシスト / 圧電デバイス / 圧電厚膜 / 非鉛圧電材料 / 小型アクチュエータ / ナノマイクロメカトロニクス / 圧電厚膜応用デバイス / 厚電圧膜 / 圧電アクチュエータ / 強力超音波

Outline of Final Research Achievements

A thick piezoelectric film is strongly required for realizing miniaturized piezoelectric actuator because conventional piezoelectric ceramics has difficulty to be machined. The hydrothermal synthesis method enables such thick film and high power ultrasonic irradiation during hydrothermal process is effective for thicker film. In this study, we examined to obtain thick piezoelectric film for the miniaturized actuator by using the ultrasonic assisted hydrothermal synthesis. As a result, the thickness of lead zirconate titanate was increased to 31 micro meter by repeated two processes, and the excellent vibration performance 1.2 m/s was measured by using the piezoelectric transducer. In addition, 10 micro meter thick film of barium titanate could be achieved as a lead-free material. Its piezoelectric property was confirmed by a piezoelectric force microscope (PFM).

Research Products

• [Journal Article] Optimum reaction conditions for lead zirconate titanate thick film by ultrasonic assisted hydrothermal method (2016)
  • Author(s): Katsuhiro Saigusa and Takeshi Morita
  • Journal Title: Japanese Journal of Applied Physics Volume: 55
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Optimum reaction conditions for lead zirconate titanate thick film by ultrasonic assisted hydrothermal method (2016)
  • Author(s): Katsuhiro Saigusa and Takeshi Morita
  • Journal Title: Jpn. J. Appl. Phys. Volume: 印刷中
  • Peer Reviewed
• [Journal Article] Thick KNbO₃ films deposited by ultrasonic-assisted hydrothermal method (2015)
  • Author(s): Ryo Kudo, Peter Bornmann, Tobias Hemsel and Takeshi Morita
  • Journal Title: Acoust. Sci. & Tech. Volume: 36 Issue: 3 Pages: 262-264
  • DOI: 10.1250/ast.36.262
  • NAID: 130005068451
  • ISSN: 1346-3969, 1347-5177
  • Peer Reviewed / Int'l Joint Research
• [Presentation] Barium titanate thin film deposited by ultrasonic-assisted hydrothermal method (2016)
  • Author(s): Rikuri Takayama and Takeshi Morita
  • Organizer: International Workshop on Piezoelectric Materials and Actuators
  • Place of Presentation: 韓国・済州島
  • Year and Date: 2016-08-21
  • Int'l Joint Research
• [Presentation] Barium Titanate Thick Film Deposited by Ultrasonic-Assisted Hydrothermal Method (2016)
  • Author(s): Rikuri Takayama and Takeshi Morita
  • Organizer: Actuator 2016
  • Place of Presentation: ドイツ・ブレーメン
  • Year and Date: 2016-06-25
  • Int'l Joint Research
• [Presentation] 超音波アシスト水熱合成法を用いたチタン酸バリウム圧電薄膜の成膜 (2016)
  • Author(s): 高山陸離 森田剛
  • Organizer: 第28回 電磁力関連のダイナミクス」シンポジウム
  • Place of Presentation: 神奈川・慶應義塾大学日吉キャンパス
  • Year and Date: 2016-05-18
• [Presentation] 超音波アシスト水熱合成法によるチタン酸バリウム薄膜の合成 (2016)
  • Author(s): 高山陸離，森田剛
  • Organizer: 2016年度精密工学会春季大会
  • Place of Presentation: 東京理科大学(千葉県野田市)
  • Year and Date: 2016-03-15
• [Presentation] 超音波アシスト水熱合成法によるPZT圧膜の繰り返し成膜とその組成ならびに圧電特性評価 (2016)
  • Author(s): 三枝勝博，森田剛
  • Organizer: 2016年度精密工学会春季大会
  • Place of Presentation: 東京理科大学(千葉県野田市)
  • Year and Date: 2016-03-15
• [Presentation] Various piezoelectric actuators based on R-SIDM principle (2015)
  • Author(s): Takeshi Morita
  • Organizer: ICAE 2015
  • Place of Presentation: 韓国済州島
  • Year and Date: 2015-11-19
  • Int'l Joint Research / Invited
• [Presentation] Repetition synthesis of lead zirconate titanate thick film by ultrasonic-assisted hydrothermal method (2015)
  • Author(s): Katsuhiro Saigusa and Takeshi Morita
  • Organizer: The 17th US-Japan Seminar on Dielectric and Piezoelectric Ceramics
  • Place of Presentation: Hotel Buena Vista (長野県松本市)
  • Year and Date: 2015-11-17
  • Int'l Joint Research
• [Presentation] 超音波アシスト水熱合成法 (2014)
  • Author(s): 森田剛, 太田賀奈子, 工藤遼, 大久保康平, 五十部学
  • Organizer: 第43回EMシンポジウム
  • Place of Presentation: 東京理科大学 森戸記念館 (東京都 新宿区)
  • Year and Date: 2014-06-05 – 2014-06-06