Development of a QCM sensor for greenhouse gases and study of compensating method for temperature and humidity

• Project/Area Number: 26420400
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Measurement engineering
• Research Institution: Osaka Institute of Technology
• Principal Investigator: Muraoka Shigenobu 大阪工業大学, 工学部, 教授 (40097994)
• Co-Investigator(Renkei-kenkyūsha): HIGASHIMOTO SHINYA 大阪工業大学, 工学部, 准教授 (70368140)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2016: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2015: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2014: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
• Keywords: 温室効果ガス / ＱＣＭ / CO2センサ / 温湿度特性 / 感応膜 / QCM / センサ / 温室効果ガスセンサ / 感度の温湿度補正

Outline of Final Research Achievements

Temperature and humidity characteristics of a QCM coated with acrylonitrile styrene copolymer (AS) were studied as a CO2 sensor. Consequently, the following results were obtained. 1) A frequency shift of the QCM is in proportion to CO2 concentration under the condition of constant temperature. 2) The sensitivity for CO2 concentration decreases in a linear fashion with a rise in temperature. 3) The frequency shift increases in a parabolic fashion and the sensitivity for humidity increases in a linear fashion with a rise in humidity under the condition of constant temperature. 4) The sensitivity for absolute humidity decreases in a parabolic fashion with a rise in temperature under the condition of constant absolute humidity.

Research Products

• [Journal Article] Temperature and Humidity Characteristics of a CO₂ Sensor using a QCM Coated with Acrylonitrile-styrene Copolymer (2017)
  • Author(s): 村岡茂信，東本慎也，貞弘政紀，山内謙，大植弘義，大松繁
  • Journal Title: IEEJ Transactions on Sensors and Micromachines Volume: 137 Issue: 4 Pages: 115-120
  • DOI: 10.1541/ieejsmas.137.115
  • NAID: 130005529936
  • ISSN: 1341-8939, 1347-5525
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] 熱線式マイクロブリッジMEMSセンサのガス検出特性 (2015)
  • Author(s): 矢野 満明，藤井建多，村岡茂信，大松繁
  • Journal Title: 電気学会論文誌E Volume: Vol. 135，No. 7
  • NAID: 130005086210
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] CO2センサとしてのQCMの温湿度特性 ― アクリロニトリルスチレンを感応膜として修飾した場合 － (2016)
  • Author(s): 村岡 茂信，東本 慎也，貞広 政紀，山内 謙，大植 弘義
  • Organizer: 第33回センシングフォーラム 計測部門大会
  • Place of Presentation: 近畿大学 和歌山キャンパス 2号館（和歌山県紀の川市西三谷930）
  • Year and Date: 2016-09-01
• [Presentation] 熱線式マイクロブリッジMEMSセンサのガス検出特性 (2014)
  • Author(s): 藤井健太、村岡茂信、大松繁、矢野満明
  • Organizer: 電気学会
  • Place of Presentation: 松江市くにびきメッセ
  • Year and Date: 2014-10-20 – 2014-10-22