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Research on platform technologies for electronic-photonic integrated circuits based on III-V CMOS photonics

Research Project

Project/Area Number 26709022
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypePartial Multi-year Fund
Research Field Electron device/Electronic equipment
Research InstitutionThe University of Tokyo

Principal Investigator

Takenaka Mitsuru  東京大学, 大学院工学系研究科(工学部), 准教授 (20451792)

Project Period (FY) 2014-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥23,920,000 (Direct Cost: ¥18,400,000、Indirect Cost: ¥5,520,000)
Fiscal Year 2017: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2016: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2015: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2014: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Keywords光変調器 / トランジスタ / シリコンフォトニクス / CMOSフォトニクス / ウェハボンディング / 光電子融合集積回路 / 光デバイス / 化合物半導体
Outline of Final Research Achievements

We have successfully established the process technologies to integrate active and passive waveguide photonic devices on the III-V CMOS photonics platform. Thus, we have demonstrated the carrier-injection InGaAsP optical modulator on the III-V-OI wafer. Moreover, the monolithic integration of the InGaAsP optical modulator and InGaAs MOS transistor has been successfully demonstrated, exhibiting the feasibility of the electronic-photonic integration capability of the III-V CMOS photonics platform. Through the investigation of optical modulators based on the free-carrier effect, we have invented the Si hybrid MOS optical modulator which exhibits the highest modulation efficiency among semiconductor-based optical modulators. We have also proposed the III-V on SiC platform which can dramatically improve the heat dissipation.

Report

(5 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (73 results)

All 2018 2017 2016 2015 2014 Other

All Journal Article (14 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 13 results,  Open Access: 4 results,  Acknowledgement Compliant: 8 results) Presentation (54 results) (of which Int'l Joint Research: 27 results,  Invited: 18 results) Remarks (4 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] InGaAsP Mach-Zehnder interferometer optical modulator monolithically integrated with InGaAs driver MOSFET on a III-V CMOS photonics platform2018

    • Author(s)
      J.-K. Park, S. Takagi, and M. Takenaka
    • Journal Title

      Optics Express

      Volume: 26 Issue: 4 Pages: 4842-4852

    • DOI

      10.1364/oe.26.004842

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] InP-based photonic integrated circuit platform on SiC wafer2017

    • Author(s)
      M. Takenaka and S. Takagi
    • Journal Title

      Optics Express

      Volume: 25 Issue: 24 Pages: 29993-30000

    • DOI

      10.1364/oe.25.029993

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Efficient low-loss InGaAsP/Si hybrid MOS optical modulator2017

    • Author(s)
      J.-H. Han, F. Boeuf, J. Fujikata, S. Takahashi, S. Takagi, and M. Takenaka
    • Journal Title

      Nature Photonics

      Volume: 11 Issue: 8 Pages: 486-490

    • DOI

      10.1038/nphoton.2017.122

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Benchmarking Si, SiGe and III-V/Si hybrid SIS Optical Modulators for Datacenter Applications2017

    • Author(s)
      F. Boeuf, J.-H. Han, S. Takagi, and M. Takenaka
    • Journal Title

      J. Light. Technol.

      Volume: 35 Issue: 18 Pages: 4047-4055

    • DOI

      10.1109/jlt.2017.2728365

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Numerical analysis of carrier-depletion InGaAsP optical modulator with lateral PN junction formed on III-V-on-insulator wafer2017

    • Author(s)
      N. Sekine, J.-H. Jan, S. Takagi, and M. Takenaka
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 56 Issue: 4S Pages: 04CH09-04CH09

    • DOI

      10.7567/jjap.56.04ch09

    • NAID

      210000147623

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Heterogeneous CMOS Photonics Based on SiGe/Ge and III-V Semiconductors Integrated on Si Platform2017

    • Author(s)
      Mitsuru Takenaka,Younghyun Kim, Jaehoon Han, Jian Kang, Yuki Ikku, Yongpeng Cheng, Jinkwon Park, Misa Yoshida, Seiya Takashima, Shinich Takagi
    • Journal Title

      IEEE Journal of Selected Topics in Quantum Electronics

      Volume: 23 Issue: 3 Pages: 8200713-8200713

    • DOI

      10.1109/jstqe.2017.2660884

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Challenges and opportunities of near and mid-infrared photonics based on SiGe and Ge2016

    • Author(s)
      M. Takenaka, Y. Kim, J. Han, J. Kang, and S. Takagi
    • Journal Title

      ECS Trans.

      Volume: 75 Issue: 8 Pages: 447-459

    • DOI

      10.1149/07508.0447ecst

    • Related Report
      2016 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] InGaAsP variable optical attenuator with lateral P-I-N junction formed by Ni-InGaAsP and Zn diffusion on III-V on insulator wafer2016

    • Author(s)
      J.-K. Park, J. Han, M. Takenaka, and S. Takagi
    • Journal Title

      MRS Advances

      Volume: 48 Issue: 48 Pages: 3295-3300

    • DOI

      10.1557/adv.2016.339

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Low resistivity lateral P-I-N junction formed by Ni-InGaAsP alloy for carrier injection InGaAsP photonic devices2016

    • Author(s)
      Jin-Kwon Park, Mitsuru Takenaka and Shinichi Takagi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 4S Pages: 04EH04-04EH04

    • DOI

      10.7567/jjap.55.04eh04

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Low-dark-current waveguide InGaAs metal-semiconductor-metal photodetector monolithically integrated with InP grating coupler on III–V CMOS photonics platform2016

    • Author(s)
      Y. Cheng, Y. Ikku, M. Takenaka, and S. Takagi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 Issue: 4S Pages: 04EH01-04EH01

    • DOI

      10.7567/jjap.55.04eh01

    • NAID

      210000146348

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Effect of III-V on insulator structure on quantum well intermixing2016

    • Author(s)
      S. Takashima, Y. Ikku, M. Takenaka, and S. Takagi
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 Issue: 4S Pages: 04EH13-04EH13

    • DOI

      10.7567/jjap.55.04eh13

    • NAID

      210000146360

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Surface leakage reduction in MSM InGaAs photodetector on III-V CMOS photonics platform2015

    • Author(s)
      Y. Cheng, Y. Ikku, M. Takenaka, and S. Takagi,
    • Journal Title

      IEEE Photonics Technology Letters

      Volume: 27 Issue: 14 Pages: 120-125

    • DOI

      10.1109/lpt.2015.2432052

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] InGaAs MSM photodetector monolithically integrated with InP photonic-wire waveguide on III-V CMOS photonics platform2014

    • Author(s)
      Y. Cheng, Y. Ikku, M. Takenaka, and S. Takagi
    • Journal Title

      IEICE Electronics Express

      Volume: 11 Issue: 16 Pages: 20140609-20140609

    • DOI

      10.1587/elex.11.20140609

    • NAID

      130004678211

    • ISSN
      1349-2543
    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Direct wafer bonding technology for large-scale InGaAs-on-insulator transistors2014

    • Author(s)
      S.H. Kim., Y. Ikku, M. Yokoyama, R. Nakane, J. Li, Y.-C. Kao, M. Takenaka, and S. Takagi
    • Journal Title

      Appl. Phys. Lett

      Volume: 105 Issue: 4 Pages: 043504-043504

    • DOI

      10.1063/1.4891493

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] High-efficiency, low-loss optical phase modulator based on III-V/Si hybrid MOS capacitor2018

    • Author(s)
      M. Takenaka, J.-H. Han, J.-K. Park, F. Boeuf, J. Fujikata, S. Takahashi, and S. Takagi
    • Organizer
      Optical Fiber Communication Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Low-crosstalk, low-power Mach-Zehnder interferometer optical switch based on III-V/Si hybrid MOS phase shifter2018

    • Author(s)
      Q. Li, J.-H. Han, C. Ho, S. Takagi, and M. Takenaka
    • Organizer
      Optical Fiber Communication Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] フォトニクス応用に向けたIII-V on SiCプラットフォームの検討2018

    • Author(s)
      三條 嵩明, 関根 尚希, 高木 信一, 竹中 充
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Efficient low-loss InGaAsP/Si hybrid MOS optical modulator2018

    • Author(s)
      韓 在勲, Boeuf Frederic, 藤方 潤一, 高橋 重樹, 高木 信一, 竹中 充
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Demonstration of Mach-Zehnder interferometer optical switch with InGaAsP/Si hybrid MOS optical phase shifter2018

    • Author(s)
      Q. Li, S. Takagi, M. Takenaka
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Design Optimization of Ultralow Capacitance InGaAs Waveguide Photodetector on III-V CMOS photonics platform2018

    • Author(s)
      P. Cheng, S. Takagi, M. Takenaka
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Monolithic integration of InGaAsP MZI modulator and InGaAs driver MOSFET using III-V CMOS photonics2017

    • Author(s)
      J. Park, S. Takagi, and M. Takenaka
    • Organizer
      Optical Fiber Communication Conference
    • Place of Presentation
      Los Angeles Convention Center, Los Angeles, USA
    • Year and Date
      2017-03-20
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-Efficiency O-Band Mach-Zehnder modulator based on InGaAsP/Si hybrid MOS capacitor2017

    • Author(s)
      J. Han, S. Takagi, and M. Takenaka
    • Organizer
      Optical Fiber Communication Conference
    • Place of Presentation
      Los Angeles Convention Center, Los Angeles, USA
    • Year and Date
      2017-03-20
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 貼り合わせ法を用いた高性能InGaAsP/Si hybrid MOS型光変調器2017

    • Author(s)
      韓 在勲, 高木 信一, 竹中 充
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Numerical investigation of ultralow-capacitance InGaAs photodetector on III-V/a-Si hybrid platform2017

    • Author(s)
      P. Cheng, S. Takagi, and M. Takenaka
    • Organizer
      7th International Symposium on Photonics and Electronics Convergence
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] III-V/Si hybrid MOS optical phase shifter toward low-crosstalk switching2017

    • Author(s)
      Q. Li, S. Takagi, and M. Takenaka
    • Organizer
      7th International Symposium on Photonics and Electronics Convergence
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-efficiency phase modulation based on Si hybrid MOS structure2017

    • Author(s)
      M. Takenaka and S. Takagi
    • Organizer
      Progress In Electromagnetics Research Symposium
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Low-crosstalk optical switch with InGaAsP/Si hybrid MOS optical phase shifter2017

    • Author(s)
      Q. Li, S. Takagi, and M. Takenaka
    • Organizer
      International Conference on Solid State Devices and Materials
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Performance benchmarking of InGaAsP, Si0.8Ge0.2 and Si-based photonics homojunction and heterojunction PN modulators2017

    • Author(s)
      F. Boeuf, N. Sekine, S. Takagi, and M. Takenaka
    • Organizer
      International Conference on Solid State Devices and Materials
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electronic-photonic integrated circuits based on heterogeneous integration of Ge/III-V on Si2017

    • Author(s)
      M. Takenaka
    • Organizer
      Silicon Photonic Workshop, European Conference on Optical Communication
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Investigation on Mg ion implantation for carrier-depletion InGaAsP optical modulator with vertical PN junction2017

    • Author(s)
      N. Sekine, J.-H. Han, S. Takagi, and M. Takenaka
    • Organizer
      24th Congress of the international Commission for Optics
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Structure optimization of InGaAsP/Si hybrid MOS optical modulator for high-efficiency phase modulation2017

    • Author(s)
      Q. Li, J.-H. Han, F. Boeuf, S. Takagi, and M. Takenaka
    • Organizer
      24th Congress of the international Commission for Optics
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Si photonics based on heterogeneous integration2017

    • Author(s)
      M. Takenaka
    • Organizer
      Tsinghua University-the University of Tokyo Joint Symposium
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] III-V/SiハイブリッドMOS構造を用いた高効率光位相変調およびユニバーサル光集積回路への展開2017

    • Author(s)
      竹中 充
    • Organizer
      第27回シリコンフォトニクス研究会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 異種半導体集積Siフォトニクスを用いた高効率光変調器への展開2017

    • Author(s)
      竹中 充, 高木 信一
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] III-V CMOSフォトニクス・プラットフォーム上L字接合をもつキャリア空乏型InGaAsP光変調器の検討2017

    • Author(s)
      関根 尚希, 高木 信一, 竹中 充
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Optimization of modulation efficiency of InGaAsP/Si hybrid MOS optical modulator2017

    • Author(s)
      Q. Li, S. Takagi, and M. Takenaka
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Extremely high modulation efficiency III-V/Si hybrid MOS optical modulator fabricated by direct wafer bonding2016

    • Author(s)
      J. Han, M. Takenaka, and S. Takagi
    • Organizer
      International Electron Devices Meeting
    • Place of Presentation
      Hilton San Francisco Union Square, San Francisco, USA
    • Year and Date
      2016-12-05
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Estimation of modulation efficiency enhancement using an InGaAsP/Si hybrid MOS optical modulator2016

    • Author(s)
      J.-H. Han, S. Takagi, and M. Takenaka
    • Organizer
      6th International Symposium on Photonics and Electronics Convergence
    • Place of Presentation
      Eneos Hall, The University of Tokyo, Meguro-ku, Komaba, Tokyo
    • Year and Date
      2016-11-28
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Numerical analysis of InGaAsP carrier-depletion optical modulator on III-V CMOS photonics platform2016

    • Author(s)
      N. Sekine, J. Han, M. Takenaka, and S. Takagi
    • Organizer
      International Conference on Solid State Devices and Materials
    • Place of Presentation
      Tsukuba International Congress Center, Tsukuba, Ibaragi
    • Year and Date
      2016-09-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Heterogeneous integration of SiGe/Ge and III-Vs on Si for electronic-photonic integrated circuit2016

    • Author(s)
      M. Takenaka, and S. Takagi
    • Organizer
      JSPS-OSA joing session
    • Place of Presentation
      Toki Messe, Niigata, Niigata
    • Year and Date
      2016-09-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] III-V CMOSフォトニクス・プラットフォーム上キャリア注入型InGaAsP可変光減衰器2016

    • Author(s)
      朴 珍權, 韓 在勲, 竹中 充, 高木 信一
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 貼り合わせInGaAsP/Si ハイブリッド MOS 型光変調器に関する検討2016

    • Author(s)
      韓 在勲, 竹中 充, 高木 信一
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Feasibility study of III-V/Si hybrid MOS optical modulators consisting of n-InGaAsP/Al2O3/p-Si MOS capacitor formed by wafer bonding2016

    • Author(s)
      J. Han, M. Takenaka, and S. Takagi
    • Organizer
      International Conference on Group IV Photonics
    • Place of Presentation
      Grand Kempinski Hotel, Shanghai, China
    • Year and Date
      2016-08-23
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Heterogeneous integration of SiGe/Ge and III-V on Si for CMOS photonics2016

    • Author(s)
      M. Takenaka, and S. Takagi
    • Organizer
      International Meeting for Future of Electron Devices, Kansai
    • Place of Presentation
      Avanti Kyoto Hall, Ryukoku Univeristy, Kyoto
    • Year and Date
      2016-06-23
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Si上異種半導体集積による光電子集積回路技術2016

    • Author(s)
      竹中 充, 高木 信一
    • Organizer
      プラナリゼーションCMPとその応用技術専門委員会第150回研究会
    • Place of Presentation
      名古屋大学ES総合館ESホール(名古屋市千種区)
    • Year and Date
      2016-06-20
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Si/III-V CMOS photonics for low-power electronic-photonic integrated circuits on Si platform2016

    • Author(s)
      M. Takenaka, and S. Takagi
    • Organizer
      Conference on Lasers and Electro-Optics
    • Place of Presentation
      San Jose Convention Center, San Jose, USA
    • Year and Date
      2016-06-05
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] CMOS photonics technologies based on heterogeneous integration of SiGe/Ge and III-V on Si2016

    • Author(s)
      M. Takenaka, Y. Kim, J. Han, J. Kang, Y. Ikku, Y. Cheng, J. Park, and S. Takagi
    • Organizer
      SPIE Photonics Europe
    • Place of Presentation
      SQUARE Brussels Meeting Center, Brussels, Belgium
    • Year and Date
      2016-04-04
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Si上異種半導体集積によるCMOSフォトニクス2016

    • Author(s)
      竹中 充, 金 栄現, 韓 在勲, 亢 健, 一宮佑希, 程 勇鵬, 朴 珍權, 金 相賢, 高木信一
    • Organizer
      電子情報通信学会SDM研究会・応用物理学会シリコンテクノロジー分科会共催研究集会
    • Place of Presentation
      機会振興会館(東京都港区)
    • Year and Date
      2016-01-28
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] CMOS photonics technologies based on heterogeneous integration of SiGe/Ge and III-V on Si2015

    • Author(s)
      M. Takenaka, Y. Kim, J. Han, J. Kang, Y. Ikku, Y. Cheng, J.-K. Park, S.-H Kim, and S. Takagi
    • Organizer
      International Electron Devices Meeting
    • Place of Presentation
      Washington Hilton, Washington D.C, USA
    • Year and Date
      2015-12-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ni-InGaAsP alloy for low-resistivity lateral PIN junction formation in carrier-injected InGaAsP photonic devices2015

    • Author(s)
      J.-K. Park, M. Takenaka, and S. Takagi
    • Organizer
      5th International Symposium on Photonics and Electronics Convergence
    • Place of Presentation
      Ito Hall, The University of Tokyo, Bunkyo-ku, Hongo, Tokyo
    • Year and Date
      2015-12-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Waveguide InGaAs metal-semiconductormetal photodetector monolithically integrated with InP grating coupler on III-V CMOS photonics platform2015

    • Author(s)
      Y. Cheng, Y. Ikku, M. Takenka, and S. Takagi
    • Organizer
      International Conference on Solid State Devices and Materials
    • Place of Presentation
      Sapporo Convention Center, Sapporo, Hokkaido
    • Year and Date
      2015-09-30
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] The influence of III-V on insulator structure on quantum well intermixing2015

    • Author(s)
      S. Takashima, Y. Ikku, M. Takenka, and S. Takagi
    • Organizer
      International Conference on Solid State Devices and Materials
    • Place of Presentation
      Sapporo Convention Center, Sapporo, Hokkaido
    • Year and Date
      2015-09-30
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Low-resistivity lateral PIN junction formed by Ni-InGaAsP alloy for carrier-injection InGaAsP photonic devices2015

    • Author(s)
      J.-K. Park, M. Takenka, and S. Takagi
    • Organizer
      International Conference on Solid State Devices and Materials
    • Place of Presentation
      Sapporo Convention Center, Sapporo, Hokkaido
    • Year and Date
      2015-09-29
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] III-V on SiC基板を用いた光集積回路プラットフォームの提案2015

    • Author(s)
      竹中充,高木信一
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市熱田区)
    • Year and Date
      2015-09-14
    • Related Report
      2015 Annual Research Report
  • [Presentation] II-V-OI基板のパターニングによるボイド低減の検討2015

    • Author(s)
      高島 成也, 一宮 佑希, 竹中 充, 高木 信一
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市熱田区)
    • Year and Date
      2015-09-14
    • Related Report
      2015 Annual Research Report
  • [Presentation] III-V CMOS photonics on Si for high-performance electronic-photonic integrated circuits2015

    • Author(s)
      M. Takenaka and S. Takagi
    • Organizer
      8th International Conference on Materials for Advanced Technologies
    • Place of Presentation
      Suntech, Singapore
    • Year and Date
      2015-07-02
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] III-V-OI基板上における量子井戸インターミキシングの検討2015

    • Author(s)
      高島 成也、一宮 佑希、竹中 充、高木 信一
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス(神奈川県平塚市)
    • Year and Date
      2015-03-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] III-V-OI 基板の耐熱性向上技術および低抵抗横型PIN 接合形成技術2014

    • Author(s)
      一宮 佑希, 竹中 充, 高木 信一
    • Organizer
      電子情報通信学会レーザ・量子エレクトロニクス研究会
    • Place of Presentation
      機会振興会館(東京都港区)
    • Year and Date
      2014-12-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] InGaAs MSM photodetector with InAlAs and InP cap layers on III-V CMOS photonics platform for low dark current operation2014

    • Author(s)
      Y. Cheng, Y. Ikku, M. Takenaka, and S. Takagi
    • Organizer
      4th International Symposium on Photonics and Electronics Convergence
    • Place of Presentation
      ENEOS hall, The University of Tokyo, Meguro, Tokyo
    • Year and Date
      2014-11-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Low-crosstalk carrier-injection Mach-Zehnder interferometer optical switches with 50-μm-long phase shifters on III-V CMOS photonics platform2014

    • Author(s)
      Y. Ikku, M. Yokoyama, M. Takenaka, and S. Takagi
    • Organizer
      4th International Symposium on Photonics and Electronics Convergence
    • Place of Presentation
      ENEOS hall, The University of Tokyo, Meguro, Tokyo
    • Year and Date
      2014-11-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] 小型低クロストークInGaAsP細線導波路光スイッチの作製2014

    • Author(s)
      一宮佑希,横山正史,竹中充,高木信一
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学札幌キャンパス(北海道札幌市)
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] ark current reduction of waveguide InGaAs MSM photodetector on III-V CMOS photonics platform by InAlAs cap layer2014

    • Author(s)
      Y. Cheng,一宮佑希,竹中充,高木信一
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学札幌キャンパス(北海道札幌市)
    • Year and Date
      2014-09-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] III-V CMOS device technologies on Si platform2014

    • Author(s)
      S. Takagi and M. Takenaka
    • Organizer
      E-MRS Fall Meeting
    • Place of Presentation
      Warsaw University of Technology, Warsaw, Poland
    • Year and Date
      2014-09-16
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Low-resistance lateral junction formation for laser diodes on III-V CMOS photonics platform2014

    • Author(s)
      Y. Ikku, and M. Takenaka, and S. Takagi
    • Organizer
      24th IEEE International Semiconductor Laser Conference
    • Place of Presentation
      Meliá Palas Atenea, Palma de Mallorca, Spain
    • Year and Date
      2014-09-08
    • Related Report
      2014 Annual Research Report
  • [Presentation] III-V CMOS photonics platform for low-power and low-crosstalk photonic-wire switches and modulators2014

    • Author(s)
      M. Takenaka, Y. Ikku, and S. Takagi
    • Organizer
      Advanced Photonics for Communications
    • Place of Presentation
      Hilton San Diego, San Dieog, USA
    • Year and Date
      2014-07-15
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Surface orientation depdendence of electro-optic effects in InGaAsP for lateral pin-junction InGaAsP photonic-wire modulators2014

    • Author(s)
      Y. Ikku, M. Takenaka, and S. Takagi
    • Organizer
      Indium Phosphide and Related Materials
    • Place of Presentation
      Le Corum, Montpellier, France
    • Year and Date
      2014-05-11 – 2014-05-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] Waveguide InGaAs photodetector with Schottky barrier enhancement layer on III-V CMOS photonics platform2014

    • Author(s)
      Y. Cheng, Y. Ikku, O. Ichikawa, T. Osada, M. Hata, M. Takenaka, and S. Takagi
    • Organizer
      Indium Phosphide and Related Materials
    • Place of Presentation
      Le Corum, Montpellier, France
    • Year and Date
      2014-05-11 – 2014-05-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] Multi-bandgap III-V on insulator wafer fabricated by quantum well intermixing for III-V CMOS photonics platform2014

    • Author(s)
      M. Kuramochi, M. Takenaka, Y. Ikku, and S. Takagi
    • Organizer
      Indium Phosphide and Related Materials
    • Place of Presentation
      Le Corum, Montpellier, France
    • Year and Date
      2014-05-11 – 2014-05-15
    • Related Report
      2014 Annual Research Report
  • [Remarks] 高木・竹中研Webページ

    • URL

      http://www.mosfet.k.u-tokyo.ac.jp/

    • Related Report
      2017 Annual Research Report
  • [Remarks] 高木竹中研究室研究紹介

    • URL

      http://www.mosfet.k.u-tokyo.ac.jp/research/index.html#III-VCMOSphotonics

    • Related Report
      2016 Annual Research Report
  • [Remarks] 高木・竹中研究室ホームページ

    • URL

      http://www.mosfet.k.u-tokyo.ac.jp/index.html

    • Related Report
      2015 Annual Research Report
  • [Remarks] 高木・竹中研究室ホームページ

    • URL

      http://www.mosfet.k.u-tokyo.ac.jp/

    • Related Report
      2014 Annual Research Report
  • [Patent(Industrial Property Rights)] MOS型光変調器及びその製造方法2016

    • Inventor(s)
      竹中充、韓在勲、高木信一
    • Industrial Property Rights Holder
      竹中充、韓在勲、高木信一
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-160229
    • Filing Date
      2016-08-17
    • Related Report
      2016 Annual Research Report

URL: 

Published: 2014-04-04   Modified: 2019-03-29  

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