高感度機械量検出を目指したナノ構造のピエゾ効果に関する研究

• 研究課題/領域番号: 21710141
• 研究種目: 若手研究(B)
• 配分区分: 補助金
• 研究分野: マイクロ・ナノデバイス
• 研究機関: 立命館大学
• 研究代表者: DAO Viet Dzung (DAO VietDzung) 立命館大学, 総合理工学研究機構, チェアプロフェッサー (50388138)
• 研究協力者: ブイ タイントン 立命館大学, 理工学研究科, 博士後期課程
• 研究期間 (年度): 2009 – 2010
• 研究課題ステータス: 完了 (2010年度)
• 配分額: 4,550千円 (直接経費: 3,500千円、間接経費: 1,050千円); 2010年度: 2,730千円 (直接経費: 2,100千円、間接経費: 630千円); 2009年度: 1,820千円 (直接経費: 1,400千円、間接経費: 420千円)
• キーワード: ピエゾ抵抗効果 / シリコンナノワイヤ / ピエゾ光学効果 / フォトニック結晶 / ピエゾ抵抗係数 / フォトニック結晶(PhC) / フォトニック結晶キャビティ / ひずみ測定 / ピエゾ抵抗計数

研究概要

本研究は、シリコンナノワイヤ(SNW)のピエゾ抵抗効果及びシリコンフォトニック結晶(PhC)ナノキャビティのピエゾ光学効果における理論及び実験研究を行った。応力又は歪みの印加によってSNWの電気抵抗及びキャビティの共振波長が変化され、これらのピエゾ効果の寸法・結晶方位の依存性を解明した。本研究で得られた成果により、高感度・高分解能機械量センサへの応用が大いに期待できる。

研究成果

• [雑誌論文] Strain sensitive effect in a triangular lattice photonic crystal hole-modified nanocavity (2011)
  • 著者名/発表者名: Bui T.Tung, Hoang M.Nguyen, Dzung Viet Dao, S.Rogge, H.W.M.Salemink, S.Sugiyama
  • 雑誌名: IEEE Sensors Journal (印刷中)
  • 査読あり
• [雑誌論文] Nanostrain Sensing Based on Piezo-Optic Property of a Photonic Crystal Cavity (2011)
  • 著者名/発表者名: Bui T.Tung, Dzung Viet Dao, S.Sugiyama
  • 雑誌名: IEEJ Transactions on Sensors and Micromachines 巻131号7(印刷中)
  • 査読あり
• [雑誌論文] Investigation of strain sensing effect in modified single-defect photonic crystal nanocavity (2011)
  • 著者名/発表者名: Bui T.Tung, Dzung Viet Dao, Taro Ikeda, Y.Kanamori, K.Hane, S.Sugiyama
  • 雑誌名: Optics Express 巻19号9 ページ: 8821-8829
  • 査読あり
• [雑誌論文] Strain sensitive effect in a rectangular lattice photonic crystal hole-modified nanocavity (2011)
  • 著者名/発表者名: Bui T.Tung, Hoang M.Nguyen, Dzung V.Dao, S.Rogge, H.W.M.Salemink, S.Sugiyama
  • 雑誌名: IEEE Sensors Journal 巻: (印刷中(掲載確定))
  • 査読あり
• [雑誌論文] Investigation of strain sensing effect in modified single-defect photonic crystal nanocavity (2011)
  • 著者名/発表者名: Bui T Tung, Dzung V.Dao, Taro Ikeda, Yoshiaki Kanamori, Kazuhiro Hane, S Sugiyama
  • 雑誌名: Optics Express 巻: Vol.19, Issue 9 ページ: 8821-8829
  • 査読あり
• [雑誌論文] Nanostrain Sensing Based on Piezo-Optic Property of a Photonic Crystal Cavity (2011)
  • 著者名/発表者名: Bui Thanh Tung, Dzung Viet Dao, Susumu Sugiyama
  • 雑誌名: IEEJ Transactions on Sensors and Micromachines, the Institute of Electrical Engineers of Japan 巻: Vol.131, No.7/Sec.E ページ: 8821-8829
  • 査読あり
• [雑誌論文] Development and Analysis of a Sliding Tactile Soft Fingertip Embedded with a Micro Force/Moment Sensor (2011)
  • 著者名/発表者名: Van Ho, Dzung Viet Dao, Susumu Sugiyama, Shinichi Hirai
  • 雑誌名: IEEE Transactions on Robotics (T-RO), IEEE Robotics and Automation Society 巻: Vol.pp, Issue 99 ページ: 1-14
  • 査読あり
• [雑誌論文] Towards highly sensitive strain sensing based on nanostructured materials (2010)
  • 著者名/発表者名: Dzung Viet Dao, Tung T.Bui, K.Nakamura, Van T.Dau, T.Yamada, K.Hata, S.Sugiyama
  • 雑誌名: Advances in Natural Sciences : Nanoscience and Nanotechnology 巻1号045012 ページ: 8-8
  • 査読あり
• [雑誌論文] Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure (2010)
  • 著者名/発表者名: R.Amarasinghe, Dzung Viet Dao, S.Sugiyama
  • 雑誌名: IEEJ Transactions on Sensors and Micromachines 巻130号6 ページ: 242-246
  • 査読あり
• [雑誌論文] Integrated CNTs thin film for MEMS mechanical sensors (2010)
  • 著者名/発表者名: Van T.Dau, Takeo Yamada, Dzung Viet Dao, Bui Thanh Tung, Kenji Hata, Susumu Sugiyama
  • 雑誌名: Journal of Microelectronics 巻41 ページ: 860-864
  • 査読あり
• [雑誌論文] Micro/nano Mechanical Sensors and Actuators Based on SOI-MEMS Technology (2010)
  • 著者名/発表者名: Dzung Viet Dao, K.Nakamura, Tung T.Bui, S.Sugiyama
  • 雑誌名: Adv.Nat.Sci.: Nanosci.Nanotechnol.IOP Publishing Ltd, UK 巻1号013001 ページ: 10-10
  • 査読あり
• [雑誌論文] Towards highly sensitive strain sensing based on nanostructured materials (2010)
  • 著者名/発表者名: Dzung Viet Dao, Tung Thanh Bui, Koichi Nakamura, Van Thanh Dau, Takeo Yamada, Kenji Hata, Susumu Sugiyama
  • 雑誌名: Advances in Natural Sciences : Nanoscience and Nanotechnology, Institute of Physics Publishing Ltd 巻: Vol.1, 045012 ページ: 1-8
  • 査読あり
• [雑誌論文] Integrated CNTs thin film for MEMS mechanical sensors (2010)
  • 著者名/発表者名: Van T.Dau, Takeo Yamada, Dzung Viet Dao, Bui Thanh Tung, Kenji Hata, Susumu Sugiyama
  • 雑誌名: Journal of Microelectronics 巻: 41 ページ: 860-864
  • 査読あり
• [雑誌論文] Measurement of mechanical and thermal properties of co-sputtered WSi thin film for MEMS applications (2010)
  • 著者名/発表者名: Tung T.Bui, Dzung V.Dao, T.Toriyama, Susumu Sugiyama
  • 雑誌名: Micro Systems Technology, Springer Berlin/Heidelberg 巻: Vol.16, No.11 ページ: 1881-1886
  • 査読あり
• [雑誌論文] Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure (2010)
  • 著者名/発表者名: R.Amarasinghe, Dzung V.Dao, S.Sugiyama
  • 雑誌名: IEEJ Transactions on Sensors and Micromachines 巻: Vol.130, Issue 6 ページ: 242-246
  • 査読あり
• [雑誌論文] Evaluation and Analysis of Physical Properties of Nanomaterials for Highly Sensitive Mechanical Sensing Devices (2010)
  • 著者名/発表者名: S.Sugiyama, T.Toriyama, Koichi Nakamura, Dzung V.Dao
  • 雑誌名: IEEJ Transactions on Sensors and Micromachines 巻: Vol.130, No 5 ページ: 146-151
  • 査読あり
• [雑誌論文] Integration of SWNT film into MEMS for a micro thermoelectric device (2010)
  • 著者名/発表者名: Van Thanh Dau, Dzung Viet Dao, Takeo Yamada, Bui Thanh Tung, Kenii Hata, Susumu Sugiyama
  • 雑誌名: Journal of Smart Materials and Structures, Institute of Physics Publishing (IOP) Ltd., UK 巻: Vol.19, No 07 ページ: 1-6
  • 査読あり
• [雑誌論文] Micro/nano Mechanical Sensors and Actuators Based on SOI-MEMS Technology (2010)
  • 著者名/発表者名: Dzung Viet Dao, Koichi Nakamura, Tung Thanh Bui, Susumu Sugiyama
  • 雑誌名: Advances in Natural Sciences : Nanoscience and Nanotechnology, Institute of Physics (IOP) Publishing Ltd, UK 巻: Vol.1, No 01 ページ: 1-10
  • 査読あり
• [雑誌論文] Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure (2010)
  • 著者名/発表者名: R.Amarasinghe, Dzung Viet Dao, S.Sugiyama
  • 雑誌名: IEEJ Transactions on Sensors and Micromachines (掲載決定)
  • 査読あり
• [雑誌論文] Integrated CNTs Thin Film for MEMS Thermal Sensors (2010)
  • 著者名/発表者名: V.T.Dau, Dzung V.Dao, T.Yamada, B.T.Tung, K.Hata, S.Sugiyama
  • 雑誌名: Journal of Smart Materials and Structures, Institute of Physics Publishing Ltd., UK (掲載決定)
  • 査読あり
• [雑誌論文] Micro/nano Mechanical Sensors and Actuators Based on SOI-MEMS Technology (2010)
  • 著者名/発表者名: Dzung V.Dao, K.Nakamura, Tung T.Bui, S.Sugiyama
  • 雑誌名: Adv.Nat.Sci.: Nanosci. Nanotechnol. IOP Publishing Ltd, UK 1 ページ: 13001-13001
  • 査読あり
• [雑誌論文] 高感度機械量センサのためのナノ材料の物性の測定と解析 (2010)
  • 著者名/発表者名: 杉山進, 鳥山寿之, 中村康一, ダオベトズン
  • 雑誌名: 電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.130 ページ: 146-151
  • 査読あり
• [雑誌論文] A Monolithic Dual-color Total Internal Reflection(TIR)-based Chip for Highly Sensitive and High-resolution Dual-fluorescence Imaging (2009)
  • 著者名/発表者名: Nam Cao Hoai Le, Dzung Viet Dao, R.Yokokawa, John C.Wells, Susumu Sugiyama
  • 雑誌名: IEEE/ASME J.Microelectromech. Syst., (JMEMS) Vol.18 ページ: 1371-1381
  • 査読あり
• [雑誌論文] Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring (2009)
  • 著者名/発表者名: R.Amarasinghe, Dzung Viet Dao, Susumu Sugiyama
  • 雑誌名: IEEJ Transactions on Sensors and Micromachines Vol.129 ページ: 142-147
  • 査読あり
• [雑誌論文] Development of Polymer Electrostatic Comb-Drive Actuator Using Hot Embossing and Ultra-Precision Cutting Technology (2009)
  • 著者名/発表者名: Satoshi Amaya, Dzung Viet Dao Susumu Sugiyama
  • 雑誌名: Journal of Micro/Nanolithography, MEMS, and MOEMS(JM3) Vol.8 ページ: 43065-43065
  • 査読あり
• [雑誌論文] Development of Polymer Electrostatic Comb-Drive Actuator Using Hot Embossing and Ultra-Precision Cutting Technology (2009)
  • 著者名/発表者名: S.Amaya, Dzung V.Dao, Susumu Sugiyama
  • 雑誌名: Journal of Micro/Nanolithography, MEMS, and MOEMS(JM3) Vol.8 ページ: 43065-43065
  • 査読あり
• [雑誌論文] Fabrication of optically smooth, through-wafer silicon molds for PDMS total internal reflection-based devices (2009)
  • 著者名/発表者名: Nam C.H.Le, Dzung V.Dao, Ryuji Yokokawa, John C.Wells, S.Sugiyama
  • 雑誌名: Microsystems Technology, Springer Berlin/Heidelberg Vol.15 ページ: 1845-1853
  • 査読あり
• [雑誌論文] Versatile Microfluidic Total Internal Reflection(TIR)-based Devices : Application to Microbeads Velocity Measurement and Single Molecule Detection with Upright and Inverted Microscope (2009)
  • 著者名/発表者名: Nam Cao Hoai Le, Ryuji Yokokawa, Dzung Viet Dao, Thien Duy Nguyen, John Wells, Susumu Sugiyama
  • 雑誌名: Lab on a Chip, Royal Society of Chemistry, UK Vol.9 ページ: 244-250
  • 査読あり
• [学会発表] Towards Highly Sensitive Strain Sensing Based on Nanostructured Materials (2010)
  • 著者名/発表者名: Dzung V.Dao, Tung T.Bui, K.Nakamura, S.Sugiyama
  • 学会等名: The 5th International Workshop on Advanced Materials Science and Nanotechnology
  • 発表場所: ハノイ(ベトナム)
  • 年月日: 2010-11-10
• [学会発表] Towards Highly Sensitive Strain Sensing Based on Nanostructured Materials (2010)
  • 著者名/発表者名: Dzung Viet Dao, Tung Thanh Bui, K.Nakamura, S.Sugiyama
  • 学会等名: The 5th Int' 1 Workshop on Advanced Materials Science and Nanotechnology (IWAMSN2010)
  • 発表場所: Hanoi, Vietnam
  • 年月日: 2010-11-10
• [学会発表] Theoretical Investigation of Piezo-Optic Effect in Photonic Crystal Nanocavity for Nanostrain Detection (2010)
  • 著者名/発表者名: Dzung V.Dao, Tung T.Bui, S.Sugiyama
  • 学会等名: IEEE International Symposium on Micro-NanoMechatronics and Human Science
  • 発表場所: 名古屋大学(愛知県)
  • 年月日: 2010-11-09
• [学会発表] Theoretical Investigation of Piezo-Optic Effect in Photonic Crystal Nanocavity for Nanostrain Detection (2010)
  • 著者名/発表者名: Dzung V.Dao, Tung T.Bui, S.Sugiyama
  • 学会等名: IEEE International Symposium on Micro-NanoMechatronics and Human Science (MHS2010)
  • 発表場所: 名古屋大学(愛知)
  • 年月日: 2010-11-09
• [学会発表] Strain Sensitivity of a Modified Single-Defect Photonic Crystal Nanocavity for Mechanical Sensing (2010)
  • 著者名/発表者名: Bui T.Tung, Dzung V.Dao, S.Sugiyama, Hoang M.Nguyen, S.Rogge, Huub W.M.Salemink
  • 学会等名: 9th IEEE International Conference on Sensors
  • 発表場所: Hawaii(USA)
  • 年月日: 2010-11-04
• [学会発表] Strain Sensitivity of a Modified Single-Defect Photonic Crystal Nanocavity for Mechanical Sensing (2010)
  • 著者名/発表者名: Bui Thanh Tung, Dzung Viet Dao, Sugiyama Susumu, Hoang Minh Nguyen, Sven Rogge, Huub W.M.Salemink
  • 学会等名: 9th IEEE Int' 1 Conference on Sensors (IEEE SENSORS 2010)
  • 発表場所: Hawaii, USA
  • 年月日: 2010-11-04
• [学会発表] Nanostrain Sensing Based on Piezo-optic Property of a Photonic Crystal Filter (2010)
  • 著者名/発表者名: Bui T.Tung, Dzung V.Dao, S.Sugiyama
  • 学会等名: The 27th Sensor Symposium IEEJ
  • 発表場所: くにびきメッセ(島根県)
  • 年月日: 2010-10-15
• [学会発表] Nanostrain Sensing Based on Piezo-optic Property of a Photonic Crystal Filter (2010)
  • 著者名/発表者名: Bui Thanh Tung, Dzung Viet Dao, Susumu Sugiyama
  • 学会等名: The 27th Sensor Symposium, (IEEJ)
  • 発表場所: くにびきメッセ(島根)
  • 年月日: 2010-10-15
• [学会発表] Investigation of Strain Sensitivity of Photonic Crystal Nanocavity for Mechanical Sensing (2010)
  • 著者名/発表者名: Bui Thanh Tung, Dzung Viet Dao, Susumu Sugiyama
  • 学会等名: 2010 International Conference on Optical MEMS & Nanophotonics, (IEEE Photonics Society)
  • 発表場所: 札幌コンベンションセンター(北海道)
  • 年月日: 2010-08-10
• [学会発表] Multi-axis NEMS Accelerometer with Nanoscale Sensing Elements and Surrounding Mass Structure (2010)
  • 著者名/発表者名: Ranjith Amarasinghe, Dzung Viet Dao, Susumu Sugiyama
  • 学会等名: 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010)
  • 発表場所: Perth, Australia
  • 年月日: 2010-07-08
• [学会発表] A three Sensing Points Tactile Finger Tip (2010)
  • 著者名/発表者名: Dzung Viet Dao, Nima Izadi, Van Anh Ho, Susumu Sugiyama, S.Hirai
  • 学会等名: 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010)
  • 発表場所: Perth, Australia
  • 年月日: 2010-07-08
• [学会発表] Micro/Nano Mechanical Sensors and Actuator Based on Silicon MEMS Technology (2009)
  • 著者名/発表者名: Dzung Viet Dao, K.Nakamura, S.Sugiyama
  • 学会等名: The 2nd Int'l Workshop on Nanotechnology and Application
  • 発表場所: Vungtau(Vietnam)
  • 年月日: 2009-11-12
• [学会発表] Micro/Nano Mechanical Sensors and Actuator Based on Silicon MEMS Technology (2009)
  • 著者名/発表者名: Dzung Viet Dao, K.Nakamura, S.Sugiyama
  • 学会等名: The 2nd Int'1 Workshop on Nanotechnology and Application
  • 発表場所: Vung Tau, Vietnam
  • 年月日: 2009-11-12
• [学会発表] Sensitivity Enhancement of Piezoresistive Micro Acceleration Sensors with Nanometer Stress Concentration Regions on Sensing Elements (2009)
  • 著者名/発表者名: R.Amarasinghe, Dzung Viet Dao, Van T.Dau, S.Sugiyama
  • 学会等名: 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers09)
  • 発表場所: Colorado (USA)
  • 年月日: 2009-06-24
• [学会発表] Evaluation of the Piezoresistive Effect in Single Crystalline Silicon Nanowires (2009)
  • 著者名/発表者名: Bui T.Tung, Dzung Viet Dao, T.Toriyama, S.Sugiyama
  • 学会等名: 8th IEEE International Conference on Sensors (IEEE SENSORS 2009)
  • 発表場所: Christchurch (New Zealand)
• [学会発表] Characterization of the Piezoresistive Effect and Temperature Coefficient of Resistance in Single Crystalline Silicon Nanowires (2009)
  • 著者名/発表者名: Tung T.Bui, Dzung V.Dao, K.Nakamura, T.Toriyama, S.Sugiyama
  • 学会等名: IEEE Int'l Symp.onMicro-NanoMechatronics and Human Science (MHS2009)
  • 発表場所: 名古屋大学 (愛知県)
• [学会発表] Piezoresistive Effect in Silicon Nanowires-A Comprehensive Analysis Based on First-Principles Calculations (2009)
  • 著者名/発表者名: K.Nakamura, Dzung V.Dao, Bui T.Tung, T..i Toriyama, S.Sugiyama
  • 学会等名: IEEE Int'l Symp.on Micro-NanoMechatronics and Human Science (MHS2009)
  • 発表場所: 名古屋大学(愛知県)
• [学会発表] Sensitivity Enhancement of Piezoresistive Micro Acceleration Sensors with Nanometer Stress Concentration Regions on Sensing Elements (2009)
  • 著者名/発表者名: Ranjith Amarasinghe, Dzung Viet Dao, Van Thanh Dan, Susumu Sugiyama
  • 学会等名: 15th International Conference on Solid-State Sensors, Actuators and Microsystems(Transducers09)
  • 発表場所: Denver, Colorado, USA
• [学会発表] Tangential and Perpendicular Driving Micro Transmission Systems Based on Ratchet Mechanism and Electrostatic Actuator (2009)
  • 著者名/発表者名: Uzung Viet Dao, Phuc Hong Pham, Satoshi Senkawa, Susumu Sugiyama
  • 学会等名: 15th International Conference on Solid-State Sensors, Actuators and Microsystems(Transducers09)
  • 発表場所: Denver, Colorado, USA
• [学会発表] Evaluation of the Piezoresistive Effect in Single Crystalline Silicon Nanowires (2009)
  • 著者名/発表者名: Bui Thanh Tung, Dzung Viet Dao, Toshiyuki Toriyama, Susumu Sugiyama
  • 学会等名: 8th IEEE Int'1 Conference on Sensors(IEEE SENSORS 2009)
  • 発表場所: Christchurch, New Zealand
• [学会発表] Design and Fabrication of Ultra Miniature Novel Three-Axis Micro Accelerometer (2009)
  • 著者名/発表者名: Ranjith Amarasinghe, Dzung Viet Dao, Susumu Sugiyama
  • 学会等名: 8th IEEE Int'1 Conference on Sensors(IEEE SENSORS 2009)
  • 発表場所: Christchurch, New Zealand
• [学会発表] Piezoresistive and Thermoelectric Effects of CNT Thin Film Patterned by EB Lithography (2009)
  • 著者名/発表者名: Van T.Dau, T.Yamada, Dzung Viet Dao, Bui T.Tung, K.Hata, S.Sugiyama
  • 学会等名: 8th IEEE Int'1 Conference on Sensors(IEEE SENSORS 2009)
  • 発表場所: Christchurch, New Zealand
• [学会発表] All PDMS Multi-color Total Internal Reflection(TIR)-based Devices for Multi-fluorescence Detection and Imaging (2009)
  • 著者名/発表者名: Nam Cao Hoai Le, Dzung Viet Dao Ryuji Yokokawa, John C.Wells, Susumu Sugiyama
  • 学会等名: 8th IEEE Int'1 Conference on Sensors(IEEE SENSORS 2009)
  • 発表場所: Christchurch, New Zealand
• [学会発表] A PMMA High Sensitive Capacitive Micro Accelerometer Fabricated Based On Hot Embossing (2009)
  • 著者名/発表者名: Satoshi Amaya, Dzung Viet Dao, Susumu Sugiyama
  • 学会等名: 8th IEEE Int'1 Conference on Sensors(IEEE SENSORS 2009)
  • 発表場所: Christchurch, New Zealand
• [学会発表] Dual-color Total Internal Reflection(TIR)-based Devices with Uniform and High S/N Ratio overlapped Evanescent Fields (2009)
  • 著者名/発表者名: Nam C.Hoai Le, R.Yokokawa, Dzung V.Dao, John C.Wells, S.Sugiyama
  • 学会等名: 13th Int'1 Conference on Miniaturized Systems for Chemistry and Life Sciences(MicroTAS 2009)
  • 発表場所: Jeju, Korea
• [学会発表] Characterization of the Piezoresistive Effect and Temperature Coefficient of Resistance in Single Crystalline Silicon Nanowires (2009)
  • 著者名/発表者名: Tung T.Bui, Dzung V.Dao, K.Nakamura, T.Toriyama, S.Sugiyama
  • 学会等名: IEEE Int'1 Symp. on Micro-NanoMechatronics andHuman Science(MHS2009), pp.0467-471
  • 発表場所: 名古屋大学(愛知県)
• [学会発表] Piezoresistive Effect in Silicon Nanowires-A Comprehensive Analysis Based on First-Principles Calculations (2009)
  • 著者名/発表者名: K.Nakamura, Dzung V.Dao, Bui T.Tung, T..i Toriyama, S.Sugiyama
  • 学会等名: IEEE Int'1 Symp.on Micro-NanoMechatronics andHuman Science(MHS2009), pp.0467-471
  • 発表場所: 名古屋大学(愛知県)
• [学会発表] Study on an Efficient Fabrication Process for PMMMA Movable Microstructures Based on Hot Embossing and Polishing Processes (2009)
  • 著者名/発表者名: Satoshi Amaya, Dzung Viet Dao, Susumu Sugiyama
  • 学会等名: IEEE Int'1 Symp.on Micro-NanoMechatronics andHuman Science(MHS2009), pp.0467-471
  • 発表場所: 名古屋大学(愛知県)
• [学会発表] Ultra Miniatured micro-accelerometer for wearable physical activity monitoring systems (2009)
  • 著者名/発表者名: Ranjith Amarasinghe, Dzung Viet Dao, Susumu Sugiyama
  • 学会等名: IEEE Int'1 Symp.on Micro-NanoMechatronics andHuman Science(MHS2009), pp.0467-471
  • 発表場所: 名古屋大学(愛知県)
• [図書] "Nanowires", 第15章:"Electronic States and Piezoresistivity in Silicon Nanowires" (2010)
  • 著者名/発表者名: 中村康一、Dzung Viet Dao、磯野吉正、鳥山寿之、杉山進
  • 出版者: In-Tech, Vienna
• [図書] 書名: "Nanowires", Chapter : "Electronic States and Piezoresistivity in Silicon Nanowires" (2010)
  • 著者名/発表者名: 中村康一、Dzung Viet Dao、磯野吉正、鳥山寿之、杉山進
  • 出版者: In-Tech, Vienna(In press(掲載決定))