2013 Fiscal Year Final Research Report
Frontier science of interactions between plasmas and nano-interfaces
| Project Area | Creation of Science of Plasma Nano-Interface Interactions |
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| Project/Area Number |
21110001
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| Research Category |
Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
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| Allocation Type | Single-year Grants |
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| Review Section |
Science and Engineering
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| Research Institution | Kyushu University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
TERASHIMA Kazuo 東京大学, 新領域創成科学研究科, 教授 (30176911)
SHIRAFUJI Tatsuru 大阪市立大学, 工学研究科, 教授 (10235757)
SASAKI Kouichi 北海道大学, 工学研究科, 教授 (50235248)
ITO Masafumi 名城大学, 理工学部, 教授 (10232472)
TOCHIKUBO Fumiyoshi 首都大学東京, 理工学研究科, 教授 (90244417)
ONO Kouichi 京都大学, 工学研究科, 教授 (30311731)
GOTO Motonobu 名古屋大学, 工学研究科, 教授 (80170471)
NAGATSU Masaaki 静岡大学, 創造科学技術大学院, 教授 (20155948)
KOMATSU Shojiro 物質・材料研究機構, ワイドバンドギャップ半導体グループ, グループリーダー (60183810)
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| Co-Investigator(Renkei-kenkyūsha) |
UCHIDA Satoshi 首都大学東京, 理工学研究科, 准教授 (90305417)
OTA Takayuki 名城大学, 理工学部, 准教授 (10379612)
KOGA Kazunori 九州大学, システム情報科学研究院, 准教授 (90315127)
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| Project Period (FY) |
2009-07-23 – 2014-03-31
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| Keywords | プラズマナノテクノロジー / ナノ界面制御 / 相互作用ゆらぎ / プラズマ局所反応場 / トップダウンプロセス / ボトムアッププロセス |
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| Research Abstract |
This project aims to reveal (1) interaction between plasma and nanointerface and to realize (2) highly precise top-down processes and (3) well controlled self organized bottom-up processes. We have obtained following achievements. (1) From a model of nonlinear coupling between fluctuation of reactive plasmas and nanoparticle growth fluctuation, we have established an generalized theory of plasma-nanointerface interaction fluctuation. (2) We have realized highly precise plasma etching processes by revealing interaction fluctuation in the etching processes. (3) For the bottom-up processes, we have clarified generation kinetics of novel materials caused by density fluctuation of super-critical plasmas.
We have held symposiums to transmit our achievements toward citizens.
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