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2002 Fiscal Year Final Research Report Summary

GHz Electromigration Endurance Evaluation of ULSI Interconnect

Research Project

Project/Area Number 13555090
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Electronic materials/Electric materials
Research InstitutionTokyo Institute of Technology

Principal Investigator

MASU Kazuya  Tokyo Institute of Technology, Precision and Intelligence Lab., Professor, 精密工学研究所, 教授 (20157192)

Project Period (FY) 2001 – 2002
KeywordsULSI / Silicon / Interconnect / Electromigration / High Speed Signal Processing / Transmission Line Interconnect
Research Abstract

The two major reliability issues of Si CMOS ULSI are (1) reliability of ultra thin gate insulator, and (2) EM(electromigration) endurance when a high density current is flowed through ultra fine interconnects. This research project is relating to the second issue. In 100nm and sub-100nm Si CMOS ULSIs, the EM issue is critical at the fine interconnect with several tens μm length. The conventional EM endurance is measured using DC current. On the other, in real ULSI, GHz pulse signal is flowed through the fine interconnect. It has been said that the EM endurance is improved at high frequency current condition. However, quantitative EM life time is not clarified. The purpose of this research project is to develop the interconnect structure which can measure GHz EM endurance. The measurement system for GHz signal through ULSI interconnect has been established. Using a 3D electromagnetic simulation, the transmission line interconnect has been designed, fabricated, and evaluated. Furthermore, driver circuit which drives the transmission line interconnect has been designed. From these results, the evaluation technology for GHz EM endurance has been established.

  • Research Products

    (56 results)

All Other

All Publications (56 results)

  • [Publications] Y.Yokoyama, T.Fukushige, S.Hata, K.Masu, A.Shimokohbe: "On-chip Variable Inductor Using MEMS Technology"Jpn.J.Appl.Phys.. 42(4B). 2190-2192 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Yamaguchi, Y.Yokoyama, S.Ikeda, T.Kuribara, K.Masu, K.Arai: "Equivalent circuit analysis of RF integrated inductors with/without ferromagnetic material"Jpn.J.Appl.Phys.. 42(4B). 2210-2213 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Takagi, H.Shinoki, T.Tsushima, Y.Yokoyama, K.Masu: "Interconnect Length Distribution in Si System ULSI"Extended Abstracts of the 2001 International Conference on Solid State Devices and Materials, Tokyo. 54-55 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Yokovarna, T.Tsushima, H.Shinoki, N.Takagi, K.Masu: "GHz Clock Distribution Using Transmission Line Interconnect and CMOS Differential Driver Circuit in Si ULSI"Extended Abstracts of the 2001 International Conference on Solid State Devices and Materials, Tokyo, (2001. 58-59 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Shinoki, N.Takagi, K.Masu: "Interconnect Length Distribution for Memory-Logic Mixed LSI"Advanced Metallization Conference (AMC) 2001, Montreal, Canada, and Advanced Metallization Conference 2001 : Asian Session, Tokyo. 34/88-34/89 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Takagi, H.Shinoki, K.Masu: "Estimation of Power Consumption Using Interconnect Length Distribution in System LSI"Advanced Metallization Conference (AMC) 2001, Montreal, Canada, and Advanced Metallization Conference 2001 : Asian Session, Tokyo. 37/48-37/49 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Tsushima, Y.Yokoyama, K.Masu: "CMOS Differential Driver Circuit with Source Follower for GHz Clock Transmission interconnect in Si ULSI"Advanced Metallization Conference 2001 : Asian Session, Tokyo. 50-51 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Yokoyama, T.Tsushima, K.Masu: "GHz Clock Distribution Using Transmission Line Interconnect -New Criteria for Circuit Evaluation"Advanced Metallization Conference 2001 : Asian Session, Tokyo. 52-53 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Masu: "Multilevel Interconnection in GHz ULSI"Proceedings of the Sixth China-Japan Symposium on Thin Films, Kunming Yunnan, China. 162 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Tsushima, H.Chan, Y.Yokoyama, K.Nakamura, K.Masu: "Comparison of GHz Signal Transmission Schemes in Si ULSI --RC line vs. Transmission line -"International Semiconductor Technology Conference (ISTC 2002). Abstract No.115 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Yokoyama, T.Fukushige, S.Hata, K.Masu, A.Shimokohbe: "On-chip Variable Inductor Using MEMS Technology"2002 International Conference on Solid State Devices and Materials, Nagoya. 306-307 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Nakashima, N.Takagi, K.Masu: "Extraction of Interconnect-Length-Distribution Parameters from CAD Data"Advanced Metallization Conference 2002 : Asian Session, Tokyo, October 2002. (Proceeding volume to be publised). (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hidenari Nakashima, Naohiro Takagi, Kazuya Masu: "Derivation of Interconnect Length Distribution in X Architecture LSIs"2003 IEEE International Interconnect Technology Conference, San Francisco, June 2-4, 2003. (to be Presented). (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Nakamura, H.Ito, Y.Yoshihara, K.Okada, K.Masu: "The Advantages of Transmission Lines as Global Interconnects in Si ULSI"Submitted to 2003 International Conference on Solid State Devices and Materials, Tokyo, September 2003. (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Ito, S.Gomi, H.Sugawara, K.Okada, K.Masu: "Low Crosstalk Differential Transmission Line Interconnect on Si ULSI"Submitted to 2003 International Conference on Solid State Devices and Materials, Tokyo, September 2003. (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Gomi, Y.Yokoyama, H.Sugawara, H.Ito, K.Okada, H.Hoshino, H.Onodera, K.Masu^1: "Variable RF Inductor on Si CMOS chip"Submitted to 2003 International Conference on Solid State Devices and Materials, Tokyo, September 2003. (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 益 一哉, 高木直弘: "ULSI配線超分布解析"2001年(平成13年)春季第48回応用物理学関係連合講演会. 31a-ZL-5 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 益 一哉: "システムLSIにおける多層配線構造とその設計"SEMI Forum Japan 2001 ULSI技術セミナー. 4・6-4・10 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 篠木日曜子, 高木直弘, 益 一哉: "システムLSI配線長分布(I)-導出-"2001年(平成13年)秋季第62回応用物理学会学術講演会. 14a-P13-13 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 高木直弘, 篠木日曜子, 益 一哉: "システムLSI配線長分布(II)-シミュレーション-"2001年(平成13年)秋季第62回応用物理学会学術講演会. 14a-P13-14 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 対馬朋人, 横山佳巧, 益 一哉: "伝送線路配線を用いたGHzクロック分配(I)-回路構成と電力解析-"2001年(平成13年)秋季第62回応用物理学会学術講演会. 14a-P13-15 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 横山佳巧, 対馬朋人, 益 一哉: "伝送線路配線を用いたGHzクロック分配(II)-H-Tree構成によるクロック分配-"2001年(平成13年)秋季第62回応用物理学会学術講演会. 14a-P13-16 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] チャン ホーワン, 対馬朋人, 横山佳巧, 益 一哉: "「Si ULSIにおけるGHzクロック分配回路」RC分布定数線路と伝送線路の比較"電子情報通信学会技術報告(シリコン材料・デバイス研究会). SDM2001-182. 49-53 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 益 一哉: "配線高速化の基礎と限界"Tutorial Text on ADMETA 2001 (Advanced Metallization Conference 2001 : Asian Session), Tokyo, Oct.29 (2001). 13-32 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 高木直弘, 篠木日曜子, 益 一哉: "システムLSIにおける配線長分布"電子情報通信学会集積回路研究専門委員会第5回システムLSIワークショップ. 275-278 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 対馬朋人, 横山佳巧, Felix Chan Hou Wan, 益 一哉: "Si ULSIにおける伝送線路を用いたGHzクロック分配と駆動回路の設計"電子情報通信学会技術報告(デザインガイア2001). VLD2001-116,ICD2001-161,FTS2001-63. 27-31 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] チャン ホーワン, 対馬朋人, 益 一哉: "GHz信号分配におけるRC分布定数線路と伝送線路の比較"2002年(平成14年)春季第49回応用物理学関係連合講演会. 28a-YS-6 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 益 一哉: "SoC/SiP時代の配線アーキテクチャ"第15回回路とシステム(軽井沢)ワークショップ. 483-486 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 中村恒一, 対馬朋人, 益 一哉: "Si ULSIにおける伝送線路配線駆動の検討(I)-H-tree型GHzクロック分配回路におけるRC分布定数線路と伝送線路の比較-"2002年(平成14年)秋季第63回応用物理学会学術講演会. 26-F-7 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 対馬朋人, 中村恒一, 益 一哉: "Si ULSIにおける伝送線路配線駆動の検討(II)-駆動回路の設計と試作-"2002年(平成14年)秋季第63回応用物理学会学術講演会. 26-F-8 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 伊藤浩之, 篠木日曜子, 益 一哉: "Si ULSIにおける伝送線路配線構造の検討(I)"2002年(平成14年)秋季第63回応用物理学会学術講演会. 26-F-9 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 篠木日曜子, 伊藤浩之, 益 一哉: "Si ULSIにおける伝送線路配線構造の検討(II)"2002年(平成14年)秋季第63回応用物理学会学術講演会. 26-F-10 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 高木直弘, 中島英斉, 益 一哉: "Si ULSI配線長分布に関する考察〔I〕"2002年(平成14年)秋季第63回応用物理学会学術講演会. 26-F-11 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 中島英斉, 高木直弘, 益 一哉: "ULS1配線長分布解析〔II〕"2002年(平成14年)秋季第63回応用物理学会学術講演会. 26-F-12 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 横山佳巧, 福重孝志, 秦 誠一, 益 一哉, 下河辺 明: "MEMS技術によるオンチップ可変インダクタ"2002年(平成14年)秋季第63回応用物理学会学術講演会. 26-F-17 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 横山佳巧, 福重孝志, 秦 誠一, 益 一哉, 下河辺 明: "オンチップRF可変インダクタの開発"応用物理学会分科会シリコンテクノロジー. No.49. 23-28 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y. Yokoyama, T. Fukushige, S. Hata, K. Masu and A. Shimokohbe: "On-chip Variable Inductor Using MEMS Technology"Jpn. J. Appl. Phys.. 42(4B). 2190-2192 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Yamaguchi, Y. Yokoyama, S. Ikeda, T. Kuribara, K. Masu and K. Arai: "Equivalent circuit analysis of RF integrated inductors with/without ferromagnetic material"Jpn. J. Appl. Phys.. 42(4B). 2210-2213 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Takagi, H. Shinoki, H. Nakashima and K. Masu: "Interconnect Length Distribution in System LSI and Estimating the Power Consumption"IEEE Transactions on VLSI Systems. submitted. (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Takagi, H. Shinoki, T. Tsushima, Y. Yokoyama and K, Masu: "Interconnect Length Distribution in Si System ULSI"Extended Abstracts of the 2001 International Conference on Solid State Devices and Materials, Tokyo. 54-56 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Yokoyama, T. Tsushima, H. Shinoki, N. Takagi, and K. Masu: "GHz Clock Distribution Using Transmission Line Interconnect and CMOS Differential Driver Circuit in Si ULSI"Extended Abstracts of the 2001 International Conference on Solid State Devices and Materials, Tokyo. 58-59 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Shinoki, N. Takagi, and K. Masu: "Interconnect Length Distribution for Memory-Logic Mixed LSI"Advanced Metallization Conference (AMC) 2001, Montreal, Canada, P.34 (2001), and Advanced Metallization Conference 2001 : Asian Session, Tokyo. 88-89 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Takagi, H. Shinoki, and K Masu: "Estimation of Power Consumption Using Interconnect Length Distribution in System LSI"Advanced Metallization Conference (AMC) 2001, Montreal, Canada, P.37 (2001), and Advanced Metallization Conference 2001 : Asian Session, Tokyo. 48-49 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Tsushima, Y. Yokoyama, and K. Masu: "CMOS Differential Driver Circuit with Source Follower for GHz Clock Transmission Interconnect in Si ULSI"Advanced Metallization Conference 2001 : Asian Session, Tokyo. 50-51 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Yokoyama, T. Tsushima, and K. Masu: "GHz Clock Distribution Using Transmission Line Interconnect-New Criteria for Circuit Evaluation"Advanced Metallization Conference 2001 : Asian Session, Tokyo. 52-53 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Masu: "Multilevel Interconnection in GHz ULSI"Proceedings of the Sixth China-Japan Symposium on Thin Films, Kunming Yunnan, China. 162 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Tsushima, H. Chan, Y. Yokoyama, K. Nakamura and K. Masu: "Comparison of GHz Signal Transmission Schemes in Si ULSI"- RC line vs. Transmission line - International Semiconductor Technology Conference (ISTC 2002), Tokyo, Abstract. No. 115. (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Yokoyama, T. Fukushige, S. Hata, K. Masu and A. Shimokohbe: "On-chip Variable Inductor Using MEMS Technology"Extended Abstracts of the 2002 International Conference on Solid State Devices and Materials, Nagoya. 306-307 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T. Fukushige, Y. Yokoyama, S. Hata, K. Masu and A. Shimokohbe: "Fabrication and Evaluation of On-Chip Micro Variable Inductor"Proceedings of Micro- and Nanoengineering International Conference (MNE 2002), (Lugano, Switzerland). 210-211

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Yamaguchi, Y. Yokoyama, S. Ikeda, T. Kuribara, K. Masu and K. Arai: "Equivalent circuit analysis of RF integrated inductors with/without ferromagnetic material"Extended Abstracts of the 2002 International Conference on Solid State Devices and Materials, Nagoya. 306-307 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Shinoki, H. Ito, Y. Yokoyama and K. Masu: "Transmission Line Interconnect Structure in Si ULSI"Advanced Metallization Conference 2002 : 12th Asian Session, Tokyo. (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Nakashima, N. Takagi and K. Masu: "Extraction of Interconnect-Length-Distribution Parameters from CAD Data"Advanced Metallization Conference 2002 : Asian Session, Tokyo. (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Nakashima, N. Takagi and K. Masu: "Derivation of Interconnect Length Distribution in X Architecture LSIs"2003 IEEE International Interconnect Technology Conference, San Francisco. to be presented. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Gomi, Y. Yokoyama, H. Sugawara, H. Ito, K. Okada, Hiroaki Hoshino, H. Onodera and K. Masu: "Variable RF Inductor on Si CMOS Chip"International Conference on Solid State Devices and Materials, Tokyo. submitted. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Ito, Shinichiro Gomi, Hirotaka Sugawara, K. Okada and K. Masu: "Low Crosstalk Differential Transmission Line Interconnect on Si ULSI"International Conference on Solid State Devices and Materials, Tokyo. submitted. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Nakamura, H. Ito, Y. Yoshihara, K. Okada and K. Masu: "The Advantages of Transmission Lines as Global Interconnects in Si ULSI"International Conference on Solid State Devices and Materials, Tokyo. submitted. (2003)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2004-04-14  

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