2006 Fiscal Year Final Research Report Summary
Development of Ultraprecision ＆ Ultrafine Machining System for Fabricating Nano-Devices
| Project/Area Number |
14102015
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| Research Category |
Grant-in-Aid for Scientific Research (S)
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| Allocation Type | Single-year Grants |
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| Research Field |
機械工作・生産工学
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
SHINNO Hidenori Precision and Intelligence Laboratory, Professor, 精密工学研究所, 教授 (40196639)
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| Co-Investigator(Kenkyū-buntansha) |
YOSHIOKA Hayato Precision and Intelligence Laboratory, Associate Professor, 精密工学研究所, 助教授 (90361758)
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| Project Period (FY) |
2002 – 2006
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| Keywords | Ultraprecision machining / Ultrafine machining / Nano-motion control / Machining system / Machine tool / Production engineering / Precision machine system / Mechanical engineering |
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| Research Abstract |
The demand for fabrication of nano-devices has recently increased in the field of advanced science and engineering. In particular ; an ultraprecision machining with large work area has been required for producing functional elements with three-dimensional nano-structures. In order to meet such requirements, many studies related on the development of ultraprecision machine tool have been performed so far; while there have been only few academic literatures on such developments.
In this research project, therefore, an ultraprecision and ultrafine machining system for fabricating nano-devices was newly developed and then the performances were evaluated through a series of ultraprecision machining experiments. The machining system developed in this project was of a perfect non-contact structure which could be design to minimize various error factors within the machine structure.
The developed ultraprecision and ultrafine machining system based on a new design concept was constructed from the following fundamental structural modules :
(1)An novel X-Y-θ planar motion aerostatic table system,
(2)An air turbine-driven high speed aerostatic spindle system for nano-machining,
(3)A vertical nano-motion table system equipped with innovate gravity compensator,
(4)An effective thermal deformation control system with temperature control function of supply air,
(5)An in-process ultraprecision machining status monitoring system with micro-sensor, and
(6)A stable entire machine structure which was applied new materials to all of fundamental structural modules.
Finally, the results of actual nano-machining experiments confirmed that the developed ultraprecision and ultrafine machining system provides remarkable performances and then is suitable for nano-machining of nano-devices.
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Research Products
(96 results)
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[Journal Article] X-Y-θ Nano-Positioning Table System for a Mother Machine2004
Author(s)
Shinno, H., Hashizume, H., Yoshioka, H., Shinshi, T., Sato, K.
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Journal Title
Annals of the CIRP(Annals of the International Institution for Production Engineering Research) Vol.53, No.1
Pages: 337-340
Description
「研究成果報告書概要(欧文)」より
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[Journal Article] XY Nano-Positioning Table System2004
Author(s)
Hashizume, H., Komatsu, K., Yoshioka, H., Shinno, H., Shinshi, T., Sato, K.
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Journal Title
Proceedings of the JSME Annual Meeting in 2004 (in Japanese) Vol.4
Pages: 63-64
Description
「研究成果報告書概要(欧文)」より
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[Journal Article] A Planar Motion Nano- Positioning Table System for Advanced Machine Tools2004
Author(s)
Yoshioka, H., Komatsu, K., Hashizume, H., Shinno, H., Shinshi, T., Sato, K.
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Journal Title
Proceedings of the Nineteenth Annual Meeting of ASPE Vol.34
Pages: 64-67
Description
「研究成果報告書概要(欧文)」より
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[Book] 機械加工ハンドブック2006
Author(s)
竹内芳美, 新野秀憲(編集・著)
Total Pages
511
Publisher
朝倉書店
Description
「研究成果報告書概要(和文)」より
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