2017 Fiscal Year Final Research Report
Establishment of piezoelectric films with large piezoelectric response using reversible clamp effect from the substrates
| Project/Area Number |
15H04121
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Inorganic materials/Physical properties
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
清水 荘雄 東京工業大学, 物質理工学院, 助教 (60707587)
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Keywords | 誘電体膜 / 圧電MEMS |
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| Outline of Final Research Achievements |
(100)/(001)-oriented tetragonal Pb(Zr0.5Ti0.5)O3 epitaxial films with 2 micro meter in thickness were grown on Si, SrTiO3 and CaF2 substrates. Volume fraction of (001) orientation, Vc, changed by the thermal strain above Curie temperature. Vc value increased by the pooling process for all films. There two contributions to the piezoelectric response were observed for all films by the XRD observation under applied an electric field.
Orientation change from (001) to (100) orientation plays a main role for the piezoelectric response. In addition, films on Si substrates show the maximum orientation change and macroscopic piezoelectric response.
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| Free Research Field |
工学 酸化物機能材料
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