Development of surface process technology with high speed and no damage by huge composite cluster

2017 Fiscal Year Final Research Report

• Project/Area Number: 15H04157
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/Microstructural control engineering
• Research Institution: Kyoto University
• Principal Investigator: Seki Toshio 京都大学, 工学研究科, 講師 (00402975)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: クラスター / イオンビーム / 中性ビーム / 反応性エッチング / ナノプロセス

Outline of Final Research Achievements

We have used the gas cluster generation technology originating from Kyoto University to develop the formation of huge complex cluster ions and acceleration control technology by controlling the initial cluster velocity of large clusters by mixing He to material gas. As a result, we succeeded in developing a huge composite cluster beam forming technology with energy control in the range of 0.1 to 0.4 eV / atom.

Free Research Field

イオンビーム工学