development of ionic charge, electron density, and electron temperature measurement system for soft-X ray light sources

2017 Fiscal Year Final Research Report

• Project/Area Number: 15H05472
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Plasma science
• Research Institution: Kyushu University
• Principal Investigator: Tomita Kentaro 九州大学, 総合理工学研究院, 助教 (70452729)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: 軟X線光源用プラズマ / トムソン散乱 / レーザー生成プラズマ / 電子密度 / 電子温度 / 平均イオン価数

Outline of Final Research Achievements

Soft X-ray light source have been used for various applications, such as extreme-ultraviolet(EUV) light sources (wavelength 13.5 nm) for next-generation semiconductor lithography system and water-window light sources (wavelength 2.3-4.4 nm), Laser-produced plasma is an attractive candidate for the Sof X-ray light source, because the plasma can be easily produced by table-top laser system. In order to optimize the plasma as the soft-X-ray light sources, to measure and control fundamental plasma parameters, such as averaged ionic charge state (Z), electron density (ne), and electron temperature (Te) are prerequisite. We have developed a new measurement system to obtain these plasma parameters. In our system, both ion and electron feature spectra of collective Thomson scattering have been observed simultaneously. From these spectra, it is possible to determine Z, ne, and Te.

Free Research Field

プラズマ工学