High-performance and high-reliability diamond MEMS: fundamental and magnetic sensing application

2022 Fiscal Year Final Research Report

• Project/Area Number: 20H02212
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 21060:Electron device and electronic equipment-related
• Research Institution: National Institute for Materials Science
• Principal Investigator: LIAO Meiyong 国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主席研究員 (70528950)
• Co-Investigator(Kenkyū-buntansha): 戸田 雅也 東北大学, 工学研究科, 准教授 (40509890)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Keywords: ダイヤモンド / MEMS / 磁気センサー

Outline of Final Research Achievements

All the present magnetic sensors have each own drawback, such as high cost, low-temperature requirement, and complex infrastructure for SQUID, low sensitivity for Hall sensor, and high volume and power consumption for fluxgate sensor. In particular, magnetic sensing with preserved performance at high temperatures over 500℃ has been difficult for these sensors. The present magnetic sensors are suffered from low sensitivity and poor reliability issues due to the lack of proper device concept compatible with materials tailoring.In this project, we combined the robust single-crystal diamond (SCD) MEMS with a multifunctional magnetostrictive FeGa film and demonstrated the integrated on-chip resonator-type MEMS magnetic sensor. The MEMS magnetic sensor shows a high sensitivity of 9.45 nT/Hz1/2, stable up to 300℃. The work paves the way for producing magnetic sensor to overcome the weakness of the current magnetic sensors in sensitivity, energy consumption, and reliability.

Free Research Field

電気・電子機器

Academic Significance and Societal Importance of the Research Achievements

本成果は、内燃機関、石油、鉱物探索、原子炉の材質劣化診断、宇宙利用など過酷な環境下における磁気センシングに応用されることが期待できます。