2015 Fiscal Year Final Research Report
Formation of nano-porous structures on Ge surfaces and development of surface modification processes of such surfaces as a catalytic function
| Project/Area Number |
24510179
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Microdevices/Nanodevices
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| Research Institution | The University of Shiga Prefecture |
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Principal Investigator |
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| Project Period (FY) |
2012-04-01 – 2016-03-31
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| Keywords | ナノ多孔構造 / ナノ突起構造 / 集束イオンビーム / 半導体基板表面 / ゲルマニウム / インジウムアンチモン / プラズマ酸化 / 接触角 |
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| Outline of Final Research Achievements |
Control of formation of anomalous nano-structures on semiconductor surfaces, such as nano-porous structures on Ge and nano-cone structures on InSb surfaces, using focused ion beam (FIB) irradiations was studied in the present work. Knowledge that those structures are affected by FIB irradiation parameters was also obtained. On the other hand, we have proposed the oxidation process of metallic Ti thin films, which are formed by a sputtering method, using oxygen plasma. Using this plasma oxidation process to Ti films formed on nano-structured surfaces, we have obtained the results which suggest the improvement of the photocatalytic effects of such materials.
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| Free Research Field |
半導体プロセス工学
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