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2015 Fiscal Year Final Research Report

A study on non-power MEMS wake up module

Research Project

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Project/Area Number 25420324
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionThe University of Electro-Communications

Principal Investigator

ISHIBASHI Koichiro  電気通信大学, 情報理工学(系)研究科, 教授 (50614038)

Project Period (FY) 2013-04-01 – 2016-03-31
Keywords電子デバイス / 電子機器 / MEMS / ウエイクアップモジュール
Outline of Final Research Achievements

We have investigated non power wake up module which utilizes a high Q MEMS resonator. Design, fabrication, measurement, and simulation methods of electric static MEMS resonator have been investigated. It is shown that electric static MEMS resonator cannot store energy to achieve a wake up module. Piezo type MEMS resonator is found to be a resonator which can store enough energy to achieve a wake up module, if the resonator has enough volume.

Free Research Field

エレクトロニクス

URL: 

Published: 2017-05-10  

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