MEMS two-dimensional variable dielectric device to control wavefront of electromagnetic waves

2016 Fiscal Year Final Research Report

• Project/Area Number: 26286033
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Nano/Microsystems
• Research Institution: Toyo University (2016); The University of Tokyo (2014-2015)
• Principal Investigator: Matsumoto Kiyoshi 東洋大学, 理工学部, 教授 (10282675)
• Co-Investigator(Renkei-kenkyūsha): FUJIKAWA Hisayoshi 株式会社豊田中央研究所, 戦略研究企画推進室, 主任研究員 (60394665) ; OOKADO Makoto 株式会社豊田中央研究所, 電波応用研究室, 副研究員 (70443819) ; NOMURA Tsuyoshi 株式会社豊田中央研究所, マルチフィジックスプログラム, 主任研究員 (80394823)
• Project Period (FY): 2014-04-01 – 2017-03-31
• Keywords: 波面制御 / 誘電率分布 / 液体アクチュエータ / MEMS

Outline of Final Research Achievements

In this study, to control wavefront of THz-waves or millimeter-waves, a device which can control distribution of the dielectric constant by dynamically deforming the shape of the dielectric liquid was proposed. By using MEMS technology, a liquid actuator device with flow channels which can deform the thickness of liquid was developed. The wave-front’s deformation was analyzed and confirmed that waves can be deflected or converged by the permittivity distribution. As application devices, a variable focus ultrasonic lens and a wave-front control device with fine structures were developed.

Free Research Field

知能機械システム