Development of nano-droplet laser CVD process and application to functional ceramics coatings

• Project/Area Number: 23686096
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Inorganic materials/Physical properties
• Research Institution: Japan Fine Ceramics Center
• Principal Investigator: KIMURA Teiichi 一般財団法人ファインセラミックスセンター, その他部局等, 研究員 (10333882)
• Project Period (FY): 2011-04-01 – 2014-03-31
• Project Status: Completed (Fiscal Year 2013)
• Budget Amount: ¥26,520,000 (Direct Cost: ¥20,400,000、Indirect Cost: ¥6,120,000); Fiscal Year 2013: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2012: ¥12,220,000 (Direct Cost: ¥9,400,000、Indirect Cost: ¥2,820,000); Fiscal Year 2011: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000)
• Keywords: 化学気相析出 / 静電噴霧 / レーザー / コーティング / 高結晶性膜 / 高密度膜 / 低温成膜 / 大気圧CVD / 静電噴霧レーザーCVD / セラミックス / 気相化学析出 / 膜材料 / 成膜プロセス

Research Abstract

Laser-assisted chemical vapor deposition using electro-sprayed nano-droplets as source has been newly developed. In this process, decrease of a surface temperature caused by vaporization of solvents and source molecules can be suppressed by direct energy supply to the surface by laser, and homogenization reaction in gas phase vapor can also be suppressed by electrostatic repulsion of charged droplets. Consequently as a result, a source yield and a deposition rate was much improved comparing to a conventional CVD.

Research Products

• [Journal Article] Domain boundary structures in lanthanum lithium titanates (2014)
  • Author(s): Xiang Gao, Craig A. J. Fisher, Teiichi Kimura, Yumi H. Ikuhara, Akihide Kuwabara, Hiroki Moriwake, Hideki Oki, Takeshi Tojigamori, Keiichi Kohama, and Yuichi Ikuhara
  • Journal Title: J. Mater. Chem. A Volume: 第2巻 Pages: 843-852
  • Peer Reviewed
• [Journal Article] Domain boundary structures in lanthanum lithium titanates (2014)
  • Author(s): Xiang Gao, Craig A. J. Fisher, Teiichi Kimura, Yumi H. Ikuhara, Hiroki Moriwake, Akihide Kuwabara, Hideki Oki, Takeshi Tojigamori, Keiixhi Kohama and Yuichi Ikuhara
  • Journal Title: J. Mater. Chem. A, Volume: 2014(2) Issue: 3 Pages: 843-852
  • DOI: 10.1039/c3ta13726k
  • Peer Reviewed
• [Journal Article] レーザーCVDによる実用工具コーティング (2013)
  • Author(s): 木村禎一
  • Journal Title: 金属 Volume: 第83巻 Pages: 603-607
  • Peer Reviewed
• [Journal Article] Preparation of multi-layer hard coating for cutting tools by laser CVD (2013)
  • Author(s): T.Kimura, T. Matsuda, H. Nomura, H. Matsubara
  • Volume: 第5巻
  • Peer Reviewed
• [Journal Article] Lithium Atom and A-Site Vacancy Distributions in Lanthanum Lithium Titanate (2013)
  • Author(s): Xiang Gao, Craig A. J. Fisher, Teiichi Kimura, Yumi H. Ikuhara, Hiroki Moriwake, Akihide Kuwabara, Hideki Oki, Takeshi Tojigamori, Rong Huang, and Yuichi Ikuhara
  • Journal Title: Chem. Mater Volume: 第25巻 Pages: 607-1614
  • Peer Reviewed
• [Journal Article] レーザーCVDよる実用工具コーティング (2013)
  • Author(s): 木村禎一
  • Journal Title: 金属 Volume: 83 Pages: 603-607
• [Journal Article] 27Preparation of multi-layer hard coating for cutting tools by laser CVD (2013)
  • Author(s): T. Kimura; T. Matsuda; H. Nomura; H. Matsubara
  • Journal Title: Proceedings of 5th International Symposium on Advanced Ceramics Volume: 5
  • Peer Reviewed
• [Journal Article] Lithium Atom and A-Site Vacancy Distributions in Lanthanum Lithium Titanate (2013)
  • Author(s): Xiang Gao, Craig A. J. Fisher, Teiichi Kimura, Yumi H. Ikuhara, Hiroki Moriwake, Akihide Kuwabara, Hideki Oki, Takeshi Tojigamori, Rong Huang and Yuichi Ikuhara
  • Journal Title: Chem. Mater. Volume: 25(9) Issue: 9 Pages: 1607-1614
  • DOI: 10.1021/cm3041357
  • Peer Reviewed
• [Presentation] Preparation of multi-layer hard coating for cutting tools by laser CVD (2013)
  • Author(s): T.Kimura, T. Matsuda, H. Nomura, H. Matsubara
  • Organizer: Proceedings of 5^<th> international sumposium on advanced ceramics
• [Presentation] Preparation of multi-layer hard coating for cutting tools by laser CVD (2013)
  • Author(s): Teiichi KIMURA
  • Organizer: 5th International Symposium on Advanced Ceramics (China)
  • Place of Presentation: Wuhan, China
  • Invited